{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,23]],"date-time":"2026-03-23T22:33:19Z","timestamp":1774305199872,"version":"3.50.1"},"reference-count":13,"publisher":"MDPI AG","issue":"4","license":[{"start":{"date-parts":[[2010,3,25]],"date-time":"2010-03-25T00:00:00Z","timestamp":1269475200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This study aims to develop a X-Y dual-axial intelligent servo pneumatic-piezoelectric hybrid actuator for position control with high response, large stroke (250 mm, 200 mm) and nanometer accuracy (20 nm). In each axis, the rodless pneumatic actuator serves to position in coarse stroke and the piezoelectric actuator compensates in fine stroke. Thus, the overall control systems of the single axis become a dual-input single-output (DISO) system. Although the rodless pneumatic actuator has relatively larger friction force, it has the advantage of mechanism for multi-axial development. Thus, the X-Y dual-axial positioning system is developed based on the servo pneumatic-piezoelectric hybrid actuator. In addition, the decoupling self-organizing fuzzy sliding mode control is developed as the intelligent control strategies. Finally, the proposed novel intelligent X-Y dual-axial servo pneumatic-piezoelectric hybrid actuators are implemented and verified experimentally.<\/jats:p>","DOI":"10.3390\/s100402675","type":"journal-article","created":{"date-parts":[[2010,3,25]],"date-time":"2010-03-25T12:20:28Z","timestamp":1269519628000},"page":"2675-2693","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":24,"title":["Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy"],"prefix":"10.3390","volume":"10","author":[{"given":"Mao-Hsiung","family":"Chiang","sequence":"first","affiliation":[{"name":"Department of Engineering Science and Ocean Engineering, National Taiwan University, No.1, Sec. 4, Roosevelt Rd., Taipei 10617, Taiwan"}]}],"member":"1968","published-online":{"date-parts":[[2010,3,25]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"977","DOI":"10.1109\/20.753819","article-title":"Piezoelectric microactuator for dual stage control","volume":"35","author":"Evans","year":"1999","journal-title":"IEEE Trans. Magn"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"720","DOI":"10.1115\/1.2899203","article-title":"Non-linear piezo-actuator control by learning self-tuning regulator","volume":"115","author":"Li","year":"1993","journal-title":"ASME J. Dyn. Syst"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"331","DOI":"10.1109\/3516.891044","article-title":"Modeling piezoelectric actuators","volume":"5","author":"Han","year":"2000","journal-title":"IEEE\/ASME Trans. Mech"},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"209","DOI":"10.1109\/87.491195","article-title":"Tracking control of a piezoceramic actuator","volume":"4","author":"Ge","year":"1996","journal-title":"IEEE Trans. Contr Syst. Tech"},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"116","DOI":"10.1016\/j.sna.2008.12.012","article-title":"Tracking control of hysteretic piezoelectric actuator using adaptive rate-dependent controller","volume":"150","author":"Tan","year":"2009","journal-title":"Sensors Actuat. A-Phys"},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"9","DOI":"10.1049\/mnl:20065075","article-title":"High speed nano-scale positioning using a piezoelectric tube actuator with active shunt control","volume":"2","author":"Aphale","year":"2007","journal-title":"Micro Nano Lett"},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"1107","DOI":"10.1016\/j.conengprac.2009.04.013","article-title":"A hysteresis compensation method of piezoelectric actuator: Model, identification and control","volume":"17","author":"Ru","year":"2009","journal-title":"Control Eng. Pract"},{"key":"ref_8","unstructured":"Fujita, T., Tokashiki, R., and Kagawa, T. Stick-slip motion in pneumatic cylinders driven by meter-out circuit. Tokyo, Japan."},{"key":"ref_9","first-page":"247","article-title":"Pneumatic servo cylinder position control using a self-tuning controller","volume":"35","author":"Shih","year":"1992","journal-title":"JSME Int. J. C"},{"key":"ref_10","first-page":"83","article-title":"A H\u221e tracking-based adaptive sliding-mode controller for nonlinear pneumatic path tracking systems via a functional approximation approach","volume":"30","author":"Chiang","year":"2009","journal-title":"J. Chinese Soc. Mech. Eng"},{"key":"ref_11","first-page":"431","article-title":"Intelligenter hybrider Pneumatik-Piezo-Aktuator zur Lageregelung mit gro\u00dfem Hub und hoher Genauigkeit (in German)","volume":"6","author":"Chiang","year":"2003","journal-title":"\u00d6lhydraulik und Pneu"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"523","DOI":"10.1016\/j.mechatronics.2004.11.003","article-title":"High precision pneumatic-piezoelectric hybrid positioning control using adaptive discrete variable structure control","volume":"15","author":"Chiang","year":"2005","journal-title":"Mechatronics"},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"224","DOI":"10.1299\/jsmec.46.224","article-title":"Parallel control of velocity control and energy-saving control on a hydraulic valve-controlled system using self-organizing fuzzy sliding mode control","volume":"46","author":"Chiang","year":"2003","journal-title":"JSME Int. J. C"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/10\/4\/2675\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T22:01:54Z","timestamp":1760220114000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/10\/4\/2675"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2010,3,25]]},"references-count":13,"journal-issue":{"issue":"4","published-online":{"date-parts":[[2010,4]]}},"alternative-id":["s100402675"],"URL":"https:\/\/doi.org\/10.3390\/s100402675","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2010,3,25]]}}}