{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,15]],"date-time":"2026-03-15T02:11:25Z","timestamp":1773540685766,"version":"3.50.1"},"reference-count":38,"publisher":"MDPI AG","issue":"4","license":[{"start":{"date-parts":[[2010,4,14]],"date-time":"2010-04-14T00:00:00Z","timestamp":1271203200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>A bulk micromachined inertial measurement unit (MIMU) is presented in this paper. Three single-axis accelerometers and three single-axis gyroscopes were simultaneously fabricated on a silicon wafer using a bulk micromachining process; the wafer is smaller than one square centimeter. In particular, a global area optimization method based on the relationship between the sensitivity and layout area was proposed to determine the layout configuration of the six sensors. The scale factors of the X\/Y-axis accelerometer and Z-axis accelerometer are about 213.3 mV\/g and 226.9 mV\/g, respectively. The scale factors of the X\/Y-axis gyroscope and Z-axis gyroscope are about 2.2 mV\/o\/s and 10.8 mV\/o\/s, respectively. The bias stability of the X\/Y-axis gyroscope and the Z-axis gyroscope are about 2135 deg\/h and 80 deg\/h, respectively. Finally, the resolutions of X\/Y-axis accelerometers, Z-axis accelerometers, X\/Y-axis gyroscopes, and Z-axis gyroscopes are 0.0012 g\/ \u221aHz, 0.0011 g\/ \u221aHz, 0.314 \u00b0\/s\/ \u221aHz, and 0.008 \u00b0\/s\/ \u221aHz, respectively.<\/jats:p>","DOI":"10.3390\/s100403835","type":"journal-article","created":{"date-parts":[[2010,4,15]],"date-time":"2010-04-15T10:51:29Z","timestamp":1271328689000},"page":"3835-3856","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":10,"title":["Design, Fabrication, and Testing of a Bulk Micromachined Inertial Measurement Unit"],"prefix":"10.3390","volume":"10","author":[{"given":"Honglong","family":"Chang","sequence":"first","affiliation":[{"name":"Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi\u2019an, Shaanxi, China"}]},{"given":"Qiang","family":"Shen","sequence":"additional","affiliation":[{"name":"Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi\u2019an, Shaanxi, China"}]},{"given":"Zhiguang","family":"Zhou","sequence":"additional","affiliation":[{"name":"Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi\u2019an, Shaanxi, China"}]},{"given":"Jianbing","family":"Xie","sequence":"additional","affiliation":[{"name":"Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi\u2019an, Shaanxi, China"}]},{"given":"Qinghua","family":"Jiang","sequence":"additional","affiliation":[{"name":"Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi\u2019an, Shaanxi, China"}]},{"given":"Weizheng","family":"Yuan","sequence":"additional","affiliation":[{"name":"Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi\u2019an, Shaanxi, China"}]}],"member":"1968","published-online":{"date-parts":[[2010,4,14]]},"reference":[{"key":"ref_1","unstructured":"Kourepenis, A., Connelly, J., and Sitomer, J. 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