{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,11,8]],"date-time":"2025-11-08T12:43:53Z","timestamp":1762605833363,"version":"build-2065373602"},"reference-count":38,"publisher":"MDPI AG","issue":"5","license":[{"start":{"date-parts":[[2010,4,27]],"date-time":"2010-04-27T00:00:00Z","timestamp":1272326400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA.<\/jats:p>","DOI":"10.3390\/s100504180","type":"journal-article","created":{"date-parts":[[2010,4,27]],"date-time":"2010-04-27T11:18:19Z","timestamp":1272367099000},"page":"4180-4193","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":61,"title":["CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing"],"prefix":"10.3390","volume":"10","author":[{"given":"Martin","family":"Nirschl","sequence":"first","affiliation":[{"name":"Siemens AG Munich, Corporate Technology, Otto-Hahn-Ring 6, 81739 Munich, Germany"},{"name":"Laboratory of Biosensors and Bioelectronics, Institute for Biomedical Engineering, ETH Zurich, Switzerland"}]},{"given":"Arto","family":"Rantala","sequence":"additional","affiliation":[{"name":"VTT Technical Research Centre of Finland, Tietotie 3, Espoo, FI-02044 VTT, Finland"}]},{"given":"Kari","family":"Tukkiniemi","sequence":"additional","affiliation":[{"name":"VTT Technical Research Centre of Finland, Tietotie 3, Espoo, FI-02044 VTT, Finland"}]},{"given":"Sanna","family":"Auer","sequence":"additional","affiliation":[{"name":"VTT Technical Research Centre of Finland, P.O. Box 1300, FI-33101 Tampere, Finland"}]},{"given":"Ann-Charlotte","family":"Hellgren","sequence":"additional","affiliation":[{"name":"Biosensor Applications AB, Solna Strandv\u00e4g 3, 171 54 Solna, Sweden"}]},{"given":"Dana","family":"Pitzer","sequence":"additional","affiliation":[{"name":"Siemens AG Munich, Corporate Technology, Otto-Hahn-Ring 6, 81739 Munich, Germany"}]},{"given":"Matthias","family":"Schreiter","sequence":"additional","affiliation":[{"name":"Siemens AG Munich, Corporate Technology, Otto-Hahn-Ring 6, 81739 Munich, Germany"}]},{"given":"Inger","family":"Vikholm-Lundin","sequence":"additional","affiliation":[{"name":"VTT Technical Research Centre of Finland, P.O. 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