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This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices.<\/jats:p>","DOI":"10.3390\/s100606149","type":"journal-article","created":{"date-parts":[[2010,6,22]],"date-time":"2010-06-22T02:13:46Z","timestamp":1277172826000},"page":"6149-6171","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":144,"title":["Review on the Modeling of Electrostatic MEMS"],"prefix":"10.3390","volume":"10","author":[{"given":"Wan-Chun","family":"Chuang","sequence":"first","affiliation":[{"name":"Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan"}]},{"given":"Hsin-Li","family":"Lee","sequence":"additional","affiliation":[{"name":"MicroSystems Technology Center, Industrial Technology Research Institute, Taipei, Taiwan"}]},{"given":"Pei-Zen","family":"Chang","sequence":"additional","affiliation":[{"name":"Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan"}]},{"given":"Yuh-Chung","family":"Hu","sequence":"additional","affiliation":[{"name":"Department of Mechanical and Electromechanical Engineering, Center of Green Technology, National ILan University, ILan, Taiwan"}]}],"member":"1968","published-online":{"date-parts":[[2010,6,21]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"29","DOI":"10.1016\/S0924-4247(01)00753-1","article-title":"A wireless batch sealed absolute capacitive pressure sensor","volume":"95","author":"Akar","year":"2001","journal-title":"Sensor Actuator A-Phys"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"212","DOI":"10.1016\/j.sna.2008.08.007","article-title":"Optimization of an electromagnetic comb drive actuator","volume":"154","author":"Schonhardt","year":"2009","journal-title":"Sensor Actuator A-Phys"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"559","DOI":"10.1007\/s10404-009-0416-7","article-title":"Parameter extraction from BVD electrical model of PZT actuator of micropumps using time-domain measurement technique","volume":"7","author":"Jang","year":"2009","journal-title":"Microfluid. 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