{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,1,9]],"date-time":"2026-01-09T19:44:16Z","timestamp":1767987856987,"version":"3.49.0"},"reference-count":14,"publisher":"MDPI AG","issue":"7","license":[{"start":{"date-parts":[[2010,7,16]],"date-time":"2010-07-16T00:00:00Z","timestamp":1279238400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>A two-dimensional (2D) scanning micro-mirror for target detection and measurement has been developed. This new micro-mirror is used in a MOEMS target detector to replace the conventional scanning detector. The micro-mirror is fabricated by MEMS process and actuated by a piezoelectric actuator. To achieve large deflection angles, the micro-mirror is excited in the resonance modes. It has two degrees of freedom and changes the direction of the emitted laser beam for a regional 2D scanning. For the deflection angles measurement, piezoresistors are integrated in the micro-mirror and the deflection angles of each direction can be detected independently and precisely. Based on the scanning micro-mirror and the phase-shift ranging technology, a MOEMS target detector has been developed in a size of 90 mm \u00d7 35 mm \u00d7 50 mm. The experiment shows that the target can be detected in the scanning field and the relative range and orientation can be measured by the MOEMS target detector. For the target distance up to 3 m with a field of view about 20\u00ba \u00d7 20\u00ba, the measurement resolution is about 10.2 cm in range, 0.15\u00ba in the horizontal direction and 0.22\u00ba in the vertical direction for orientation.<\/jats:p>","DOI":"10.3390\/s100706848","type":"journal-article","created":{"date-parts":[[2010,7,16]],"date-time":"2010-07-16T11:46:50Z","timestamp":1279280810000},"page":"6848-6860","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":14,"title":["Study on a Two-Dimensional Scanning Micro-Mirror and Its Application in a MOEMS Target Detector"],"prefix":"10.3390","volume":"10","author":[{"given":"Chi","family":"Zhang","sequence":"first","affiliation":[{"name":"State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China"}]},{"given":"Zheng","family":"You","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China"}]},{"given":"Hu","family":"Huang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China"}]},{"given":"Guanhua","family":"Li","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China"}]}],"member":"1968","published-online":{"date-parts":[[2010,7,16]]},"reference":[{"key":"ref_1","unstructured":"Saito, H, Hashimoto, T, Kasamura, K, and Goto, H (1999, January August). Micro-scanning laser range finders and position-attitude determination for formation flight. Logan, UT, USA. Report #: SSC99-VI-1."},{"key":"ref_2","unstructured":"Mizuno, T, Mita, M, Takahara, T, Hamada, Y, Takeyama, N, Takahashi, T, and Toshiyoshi, H (1,, January August). Two dimensional scanning LIDAR for planetary explorer. Toulouse, France."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1088\/0960-1317\/18\/1\/015015","article-title":"Linearization of a two-axis MEMS scanner driven by vertical comb-drive actuators","volume":"18","author":"Tsai","year":"2008","journal-title":"J. Micromech. Microeng"},{"key":"ref_4","first-page":"72","article-title":"Improved layout for a resonant 2D micro scanning mirror with low operation voltages","volume":"4985","author":"Wolter","year":"2003","journal-title":"Proceeding of SPIE-The International Society for Optical Engineering"},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"1315","DOI":"10.1016\/j.proche.2009.07.328","article-title":"Position encoding and phase control of resonant MOEMS-mirrors","volume":"1","author":"Tortschanoff","year":"2009","journal-title":"Procedia Chem"},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"511","DOI":"10.1109\/JMEMS.2007.896708","article-title":"A novel coilless scanning mirror using eddy current Lorentz force and magnetostatic force","volume":"16","author":"Yang","year":"2007","journal-title":"J. Microelectromech. Syst"},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"2439","DOI":"10.1088\/0960-1317\/17\/12\/008","article-title":"Design, fabrication and characterization of a bulk-PZT-actuated MEMS deformable mirror","volume":"17","author":"Xu","year":"2007","journal-title":"J. Micromech. Microeng"},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"2653","DOI":"10.1117\/1.1597676","article-title":"Compact robotics perception system based on a laser range finder coupled with silicon micromirrors","volume":"42","author":"Lescure","year":"2003","journal-title":"Opt. Eng"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"243","DOI":"10.1109\/JMEMS.2003.809961","article-title":"A MEMS electromagnetic optical scanner for a commercial confocal laser scanning microscope","volume":"12","author":"Miyajima","year":"2003","journal-title":"J. Microelectromech. Syst"},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"631","DOI":"10.3390\/s90100631","article-title":"A two-dimensional micro scanner integrated with a piezoelectric actuator and piezoresistors","volume":"9","author":"Zhang","year":"2009","journal-title":"Sensors"},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"64","DOI":"10.1109\/T-ED.1982.20659","article-title":"A graphical representation of the piezoresistance coefficients in silicon","volume":"29","author":"Kanda","year":"1982","journal-title":"IEEE Trans. Electron. Dev"},{"key":"ref_12","doi-asserted-by":"crossref","unstructured":"Zhang, C, Zhang, GF, and You, Z (2007, January August). Piezoresistor design for deflection angles decoupling measurement of two-dimensional MOEMS scanning mirror. Hong Kong, China.","DOI":"10.1109\/NANO.2007.4601159"},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"840","DOI":"10.1109\/19.863935","article-title":"A low-cost laser range finder based on an FMCW-like method","volume":"49","author":"Journet","year":"2000","journal-title":"IEEE Trans. Instrum. Meas"},{"key":"ref_14","doi-asserted-by":"crossref","unstructured":"Zhang, C, Zhang, GF, and You, Z (2009, January August). Design of space target detection system based on a two-dimensional scanning micro-mirror. Beijing, China.","DOI":"10.1109\/ICEMI.2009.5274451"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/10\/7\/6848\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T22:02:57Z","timestamp":1760220177000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/10\/7\/6848"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2010,7,16]]},"references-count":14,"journal-issue":{"issue":"7","published-online":{"date-parts":[[2010,7]]}},"alternative-id":["s100706848"],"URL":"https:\/\/doi.org\/10.3390\/s100706848","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2010,7,16]]}}}