{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T04:38:43Z","timestamp":1760243923167,"version":"build-2065373602"},"reference-count":16,"publisher":"MDPI AG","issue":"7","license":[{"start":{"date-parts":[[2010,7,23]],"date-time":"2010-07-23T00:00:00Z","timestamp":1279843200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Micro-cantilever sensors for mass detection using resonance frequency have attracted considerable attention over the last decade in the field of gas sensing. For such a sensing system, an oscillator circuit loop is conventionally used to actuate the micro-cantilever, and trace the frequency shifts. In this paper, gas experiments are introduced to investigate the mechanical resonance frequency shifts of the micro-cantilever within the circuit loop(mechanical resonance frequency, MRF) and resonating frequency shifts of the electric signal in the oscillator circuit (system working frequency, SWF). A silicon beam with a piezoelectric zinc oxide layer is employed in the experiment, and a Self-Actuating-Detecting (SAD) circuit loop is built to drive the micro-cantilever and to follow the frequency shifts. The differences between the two resonating frequencies and their shifts are discussed and analyzed, and a coefficientrelated to the two frequency shifts is confirmed.Micro-cantilever sensors for mass detection using resonance frequency have attracted considerable attention over the last decade in the field of gas sensing. For such a sensing system, an oscillator circuit loop is conventionally used to actuate the micro-cantilever, and trace the frequency shifts. In this paper, gas experiments are introduced to investigate the mechanical resonance frequency shifts of the micro-cantilever within the circuit loop(mechanical resonance frequency, MRF) and resonating frequency shifts of the electric signal in the oscillator circuit (system working frequency, SWF). A silicon beam with a piezoelectric zinc oxide layer is employed in the experiment, and a Self-Actuating-Detecting (SAD) circuit loop is built to drive the micro-cantilever and to follow the frequency shifts. The differences between the two resonating frequencies and their shifts are discussed and analyzed, and a coefficientrelated to the two frequency shifts is confirmed.<\/jats:p>","DOI":"10.3390\/s100707044","type":"journal-article","created":{"date-parts":[[2010,7,23]],"date-time":"2010-07-23T11:25:31Z","timestamp":1279884331000},"page":"7044-7056","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":3,"title":["Investigation of the Frequency Shift of a SAD Circuit Loop and the Internal Micro-Cantilever in a Gas Sensor"],"prefix":"10.3390","volume":"10","author":[{"given":"Liu","family":"Guan","sequence":"first","affiliation":[{"name":"Department of Precision Instruments and Mechanics, Tsinghua University, Beijing 100084, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jiahao","family":"Zhao","sequence":"additional","affiliation":[{"name":"Department of Precision Instruments and Mechanics, Tsinghua University, Beijing 100084, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Shijie","family":"Yu","sequence":"additional","affiliation":[{"name":"Department of Precision Instruments and Mechanics, Tsinghua University, Beijing 100084, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Peng","family":"Li","sequence":"additional","affiliation":[{"name":"Department of Precision Instruments and Mechanics, Tsinghua University, Beijing 100084, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zheng","family":"You","sequence":"additional","affiliation":[{"name":"Department of Precision Instruments and Mechanics, Tsinghua University, Beijing 100084, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2010,7,23]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"1274","DOI":"10.1039\/b901498p","article-title":"Micro-electromechanical sensors in the analytical field","volume":"134","author":"Zougagh","year":"2009","journal-title":"Analyst"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"3084","DOI":"10.1021\/ac011269j","article-title":"Complementary metal oxide Semiconductor cantilever arrays on a single chip: mass-sensitive detection of volatile organic compounds","volume":"74","author":"Lange","year":"2002","journal-title":"Anal. 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Actuat"},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"1208","DOI":"10.1016\/j.mee.2008.12.073","article-title":"Characterization and improvement on quality factor of microcantilevers with self-actuation and self-sensing capability","volume":"86","author":"Lu","year":"2009","journal-title":"Microelectron. Eng"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1007\/s10409-008-0222-6","article-title":"Mechanical and electronic approaches to improve the sensitivity of microcantilever sensors","volume":"25","author":"Mutyala","year":"2009","journal-title":"Acta Mech. Sin"},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"045023","DOI":"10.1088\/0960-1317\/19\/4\/045023","article-title":"Resonant-cantilever bio\/chemical sensors with an integrated heater for both resonance exciting optimization and sensing repeatability enhancement","volume":"19","author":"Yu","year":"2009","journal-title":"J. Micromech. Microeng"},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"4899","DOI":"10.1063\/1.1614876","article-title":"Mercury vapor detection with a self-sensing, resonating piezoelectric cantilever","volume":"74","author":"Rogers","year":"2003","journal-title":"Rev. Sci. Instr"},{"key":"ref_15","unstructured":"Feng, G (2008). Resonant sensing theory and devices, Tsinghua University Publishing House."},{"key":"ref_16","unstructured":"Gao, W (2008). Study on resonant MEMS gas sensor based on thermally excited micro cantilever, Tsinghua University. M.S. Thesis."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/10\/7\/7044\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T22:02:59Z","timestamp":1760220179000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/10\/7\/7044"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2010,7,23]]},"references-count":16,"journal-issue":{"issue":"7","published-online":{"date-parts":[[2010,7]]}},"alternative-id":["s100707044"],"URL":"https:\/\/doi.org\/10.3390\/s100707044","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2010,7,23]]}}}