{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T04:39:03Z","timestamp":1760243943681,"version":"build-2065373602"},"reference-count":17,"publisher":"MDPI AG","issue":"9","license":[{"start":{"date-parts":[[2010,9,1]],"date-time":"2010-09-01T00:00:00Z","timestamp":1283299200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>The movement of a micro cantilever was detected via a self constructed portable data acquisition prototype system which integrates a linear array of 32 1D amorphous silicon position sensitive detectors (PSD). The system was mounted on a microscope using a metal structure platform and the movement of the 30  \u00b5m wide by 400  \u00b5m long cantilever was tracked by analyzing the signals acquired by the 32 sensor array electronic readout system and the relevant data algorithm. The obtained results show a linear behavior of the photocurrent relating X and Y movement, with a non-linearity of about 3%, a spatial resolution of less than 2 \u00b5m along the lateral dimension of the sensor as well as of less than 3 \u00b5m along the perpendicular dimension of the sensor, when detecting just the micro-cantilever, and a spatial resolution of less than 1 \u00b5m when detecting the holding structure.<\/jats:p>","DOI":"10.3390\/s100908173","type":"journal-article","created":{"date-parts":[[2010,9,19]],"date-time":"2010-09-19T09:41:46Z","timestamp":1284889306000},"page":"8173-8184","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":8,"title":["Micro Cantilever Movement Detection with an Amorphous Silicon Array of Position Sensitive Detectors"],"prefix":"10.3390","volume":"10","author":[{"given":"Javier","family":"Contreras","sequence":"first","affiliation":[{"name":"CENIMAT, Department of Materials Science, Faculty of Science and Technology of New University of Lisbon and CEMOP\/UNINOVA, Campus da Caparica, 2928-516 Caparica, Portugal"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Daniel","family":"Costa","sequence":"additional","affiliation":[{"name":"CENIMAT, Department of Materials Science, Faculty of Science and Technology of New University of Lisbon and CEMOP\/UNINOVA, Campus da Caparica, 2928-516 Caparica, Portugal"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Sonia","family":"Pereira","sequence":"additional","affiliation":[{"name":"CENIMAT, Department of Materials Science, Faculty of Science and Technology of New University of Lisbon and CEMOP\/UNINOVA, Campus da Caparica, 2928-516 Caparica, Portugal"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Elvira","family":"Fortunato","sequence":"additional","affiliation":[{"name":"CENIMAT, Department of Materials Science, Faculty of Science and Technology of New University of Lisbon and CEMOP\/UNINOVA, Campus da Caparica, 2928-516 Caparica, Portugal"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Rodrigo","family":"Martins","sequence":"additional","affiliation":[{"name":"CENIMAT, Department of Materials Science, Faculty of Science and Technology of New University of Lisbon and CEMOP\/UNINOVA, Campus da Caparica, 2928-516 Caparica, Portugal"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Rafal","family":"Wierzbicki","sequence":"additional","affiliation":[{"name":"NASCATEC GmbH, Ludwig-Erhard-Str. 10, 34131 Kassel, Germany"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Holger","family":"Heerlein","sequence":"additional","affiliation":[{"name":"NASCATEC GmbH, Ludwig-Erhard-Str. 10, 34131 Kassel, Germany"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Isabel","family":"Ferreira","sequence":"additional","affiliation":[{"name":"CENIMAT, Department of Materials Science, Faculty of Science and Technology of New University of Lisbon and CEMOP\/UNINOVA, Campus da Caparica, 2928-516 Caparica, Portugal"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2010,9,1]]},"reference":[{"key":"ref_1","unstructured":"Herman, B, and Lemasters, JJ (1993). 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