{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,11]],"date-time":"2026-03-11T03:36:25Z","timestamp":1773200185511,"version":"3.50.1"},"reference-count":35,"publisher":"MDPI AG","issue":"11","license":[{"start":{"date-parts":[[2010,11,17]],"date-time":"2010-11-17T00:00:00Z","timestamp":1289952000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>In this paper we discuss the fabrication and characterization of three dimensional (3D) micro- and nanoelectrodes with the goal of using them for extra- and intracellular studies. Two different types of electrodes will be described: high aspect ratio microelectrodes for studying the communication between cells and ultimately for brain slice recordings and small nanoelectrodes for highly localized measurements and ultimately for intracellular studies. Electrical and electrochemical characterization of these electrodes as well as the results of PC12 cell differentiation on chip will be presented and discussed.<\/jats:p>","DOI":"10.3390\/s101110339","type":"journal-article","created":{"date-parts":[[2010,11,17]],"date-time":"2010-11-17T11:34:35Z","timestamp":1289993675000},"page":"10339-10355","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":20,"title":["Fabrication and Characterization of 3D Micro- and Nanoelectrodes for Neuron Recordings"],"prefix":"10.3390","volume":"10","author":[{"given":"Maria","family":"Dimaki","sequence":"first","affiliation":[{"name":"Department of Micro- and Nanotechnology, Technical University of Denmark, DTU Nanotech, Building 345E, Kgs. Lyngby, Denmark"}]},{"given":"Patricia","family":"Vazquez","sequence":"additional","affiliation":[{"name":"Department of Micro- and Nanotechnology, Technical University of Denmark, DTU Nanotech, Building 345E, Kgs. Lyngby, Denmark"}]},{"given":"Mark Holm","family":"Olsen","sequence":"additional","affiliation":[{"name":"Department of Micro- and Nanotechnology, Technical University of Denmark, DTU Nanotech, Building 345E, Kgs. Lyngby, Denmark"}]},{"given":"Luigi","family":"Sasso","sequence":"additional","affiliation":[{"name":"Department of Micro- and Nanotechnology, Technical University of Denmark, DTU Nanotech, Building 345E, Kgs. Lyngby, Denmark"}]},{"given":"Romen","family":"Rodriguez-Trujillo","sequence":"additional","affiliation":[{"name":"Department of Micro- and Nanotechnology, Technical University of Denmark, DTU Nanotech, Building 345E, Kgs. Lyngby, Denmark"}]},{"given":"Indumathi","family":"Vedarethinam","sequence":"additional","affiliation":[{"name":"Department of Micro- and Nanotechnology, Technical University of Denmark, DTU Nanotech, Building 345E, Kgs. Lyngby, Denmark"}]},{"given":"Winnie E.","family":"Svendsen","sequence":"additional","affiliation":[{"name":"Department of Micro- and Nanotechnology, Technical University of Denmark, DTU Nanotech, Building 345E, Kgs. Lyngby, Denmark"}]}],"member":"1968","published-online":{"date-parts":[[2010,11,17]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"2225","DOI":"10.1016\/j.bios.2010.02.029","article-title":"Real-time electrical impedance detection of cellular activities of oral cancer cells","volume":"25","author":"Arias","year":"2010","journal-title":"Biosens. Bioelectron"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"167","DOI":"10.1016\/S1535-6108(03)00216-2","article-title":"Cell signalling and cancer","volume":"4","author":"Martin","year":"2003","journal-title":"Cancer cell"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"61","DOI":"10.1016\/0014-4827(72)90481-8","article-title":"A miniature microelectrode array to monitor the bioelectric activity of cultured cells","volume":"74","author":"Thomas","year":"1972","journal-title":"Exp. Cell Res"},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"101","DOI":"10.1016\/0304-3940(77)90003-9","article-title":"A new fixed-array multi-microelectrode system designed for long-term monitoring of extracellular single unit neuronal activity in vitro","volume":"6","author":"Gross","year":"1977","journal-title":"Neurosci. Lett"},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"45","DOI":"10.1016\/S0165-0270(98)00156-3","article-title":"The neurochip: A new multielectrode device for stimulating and recording from cultured neurons","volume":"87","author":"Maher","year":"1999","journal-title":"J. Neurosci. Meth"},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"61","DOI":"10.1016\/S0165-0270(99)00113-2","article-title":"A new planar multielectrode array for extracellular recording: Application to hippocampal acute slice","volume":"93","author":"Oka","year":"1999","journal-title":"J. Neurosci. Meth"},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"358","DOI":"10.1016\/j.bios.2004.02.006","article-title":"CMOS microelectrode array for the monitoring of electrogenic cells","volume":"20","author":"Heer","year":"2004","journal-title":"Biosens. Bioelectron"},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"93","DOI":"10.1016\/j.jneumeth.2007.04.006","article-title":"A CMOS-based microelectrode array for interaction with neuronal cultures","volume":"164","author":"Hafizovic","year":"2007","journal-title":"J. Neurosci. Meth"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"501","DOI":"10.1109\/TBME.2003.809486","article-title":"Geometry-based finite-element modeling of the electrical contact between a cultured neuron and a microelectrode","volume":"50","author":"Buitenweg","year":"2003","journal-title":"IEEE Trans. Biomed. Eng"},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"1591","DOI":"10.1109\/TBME.2002.804504","article-title":"Extracellular stimulation window explained by a geometry-based model of the neuron-electrode contact","volume":"49","author":"Buitenweg","year":"2002","journal-title":"IEEE Trans. Biomed. Eng"},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"359","DOI":"10.1016\/0956-5663(91)85023-P","article-title":"Single cell mobility and adhesion monitoring using extracellular electrodes","volume":"6","author":"Lind","year":"1991","journal-title":"Biosens. Bioelectron"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"1855","DOI":"10.1111\/j.1471-4159.1991.tb03441.x","article-title":"Secretion of catecholamines from individual adrenal medullary chromaffin cells","volume":"56","author":"Leszczyszyn","year":"1991","journal-title":"J. Neurochem"},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"213104","DOI":"10.1063\/1.2206102","article-title":"Silicon nanowires for high-sensitivity glucose detection","volume":"88","author":"Chen","year":"2006","journal-title":"Appl. Phys. Lett"},{"key":"ref_14","unstructured":"Bard, AJ, and Faulkner, LR (2001). Electrochemical Methods: Fundamentals and Applications, John Wiley & Sons, Inc."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"135","DOI":"10.1016\/S0165-0270(01)00514-3","article-title":"A three-dimensional multi-electrode array for multi-site stimulation and recording in acute brain slices","volume":"114","author":"Heuschkel","year":"2002","journal-title":"J. Neurosci. Meth"},{"key":"ref_16","first-page":"61","article-title":"An array of Pt-tip microelectrodes for extracellular monitoring of activity of brain slices","volume":"14","author":"Beuret","year":"1999","journal-title":"Biosens. Bioelectron"},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"51","DOI":"10.1016\/S0925-4005(00)00553-0","article-title":"Microfabrication of Pt-tip microelectrodes","volume":"70","author":"Beuret","year":"2000","journal-title":"Sens. Actuat. B"},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"1889","DOI":"10.1016\/j.bios.2010.01.001","article-title":"BioMEA (TM): A versatile high-density 3D microelectrode array system using integrated electronics","volume":"25","author":"Charvet","year":"2010","journal-title":"Biosens. Bioelectron"},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"340","DOI":"10.1002\/tee.20148","article-title":"Fabrication of densely arrayed Si needles with large height for transdermal drug delivery system application","volume":"2","author":"Sasaki","year":"2007","journal-title":"IEE J. Trans. Electr. Electron. Eng"},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"200","DOI":"10.1038\/nmeth.1420","article-title":"In-cell recordings by extracellular microelectrodes","volume":"7","author":"Hai","year":"2010","journal-title":"Nat. Meth"},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"1635","DOI":"10.1152\/jn.00950.2003","article-title":"Spatiotemporal evolution of excitation and inhibition in the rat barrel cortex investigated with multielectrode arrays","volume":"91","author":"Wirth","year":"2004","journal-title":"J. Neurophysiol"},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"70","DOI":"10.1016\/j.brainres.2006.04.034","article-title":"The adult rat hippocampal slice revisited with multi-electrode arrays","volume":"1096","author":"Steidl","year":"2006","journal-title":"Brain Res"},{"key":"ref_23","doi-asserted-by":"crossref","unstructured":"Kopanitsa, MV, O Afinowi, N, and Grant, SGN (2006). Recording long-term potentiation of synaptic transmission by three-dimensional multi-electrode arrays. BMC Neurosci.","DOI":"10.1186\/1471-2202-7-61"},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"33","DOI":"10.1016\/j.neulet.2006.05.016","article-title":"Electrophysiological measurements in three-dimensional in vivo-mimetic organotypic cell cultures: Preliminary studies with hen embryo brain spheroids","volume":"404","author":"Uroukov","year":"2006","journal-title":"Neurosci. Lett"},{"key":"ref_25","doi-asserted-by":"crossref","unstructured":"Vazquez, P, Dimaki, M, and Svendsen, WE (2009, January 3\u20136). Three dimensional electrochemical system for neurobiological studies. Minneapolis, MN, USA.","DOI":"10.1109\/IEMBS.2009.5334443"},{"key":"ref_26","doi-asserted-by":"crossref","unstructured":"Vazquez, P, Dimaki, M, and Svendsen, WE (2009, January 26\u201329). Metallization of high aspect ratio, out of plane structures. Trani, Italia.","DOI":"10.1109\/IWASI.2009.5184794"},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"279","DOI":"10.1088\/0960-1317\/6\/2\/011","article-title":"Precise mask alignment to the crystallographic orientation of silicon wafers using wet anisotropic etching","volume":"6","author":"Vangbo","year":"1996","journal-title":"J. Micromech. Microeng"},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"808","DOI":"10.1088\/0960-1317\/16\/4\/018","article-title":"The evolution from convex corner undercut towards microneedle formation: theory and experimental verification","volume":"16","author":"Wilke","year":"2006","journal-title":"J. Micromech. Microeng"},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"7228","DOI":"10.1021\/ja071456k","article-title":"Interfacing silicon nanowires with mammalian cells","volume":"129","author":"Kim","year":"2007","journal-title":"J. Am. Chem. Soc"},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"085303","DOI":"10.1088\/0957-4484\/21\/8\/085303","article-title":"Surface-modified microelectrode array with flake nanostructure for neural recording and stimulation","volume":"21","author":"Kim","year":"2010","journal-title":"Nanotechnology"},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"3775","DOI":"10.1149\/1.1393973","article-title":"Effect of substrate on polyaniline film properties\u2014A cyclic voltammetry and impedance study","volume":"147","author":"Dinh","year":"2000","journal-title":"J. Electrochem. Soc"},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"2979","DOI":"10.1021\/ac00127a018","article-title":"Protein-modified electrodes\u2014The glucose-oxidase polypyrrole System","volume":"58","author":"Umana","year":"1986","journal-title":"Anal. Chem"},{"key":"ref_33","doi-asserted-by":"crossref","first-page":"1135","DOI":"10.1023\/B:JMSM.0000046396.14073.92","article-title":"Comparative investigation of the biocompatibility of various silicon nitride ceramic qualities in vitro","volume":"15","author":"Neumann","year":"2004","journal-title":"J. Mater. Sci. Mater. Med"},{"key":"ref_34","doi-asserted-by":"crossref","first-page":"6441","DOI":"10.1143\/JJAP.39.6441","article-title":"Surface modification of Si3N4-coated silicon plate for investigation of living cells","volume":"39","author":"Hirata","year":"2000","journal-title":"Jpn. J. Appl. Phys"},{"key":"ref_35","doi-asserted-by":"crossref","first-page":"5411","DOI":"10.3390\/ijms10125411","article-title":"Cell culture on MEMS platforms: A review","volume":"10","author":"Ni","year":"2009","journal-title":"Int. J. Mol. 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