{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,12,20]],"date-time":"2025-12-20T22:29:52Z","timestamp":1766269792890,"version":"build-2065373602"},"reference-count":8,"publisher":"MDPI AG","issue":"12","license":[{"start":{"date-parts":[[2010,11,30]],"date-time":"2010-11-30T00:00:00Z","timestamp":1291075200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>A compact vertical scanner for an atomic force microscope (AFM) is developed. The vertical scanner is designed to have no interference with the optical microscope for viewing the cantilever. The theoretical stiffness and resonance of the scanner are derived and verified via finite element analysis. An optimal design process that maximizes the resonance frequency is performed. To evaluate the scanner\u2019s performance, experiments are performed to evaluate the travel range, resonance frequency, and feedback noise level. In addition, an AFM image using the proposed vertical scanner is generated.<\/jats:p>","DOI":"10.3390\/s101210673","type":"journal-article","created":{"date-parts":[[2010,11,30]],"date-time":"2010-11-30T10:57:54Z","timestamp":1291114674000},"page":"10673-10682","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":14,"title":["A Compact Vertical Scanner for Atomic Force Microscopes"],"prefix":"10.3390","volume":"10","author":[{"given":"Jae Hong","family":"Park","sequence":"first","affiliation":[{"name":"NEMS and Bio Team, National Nano-fab Center, 335, Gwahangno, Yuseong-gu, Daejeon-si, 305-806, Korea"}]},{"given":"Jaesool","family":"Shim","sequence":"additional","affiliation":[{"name":"School of Mechanical Engineering, Yeungnam University, 214-1, Dae-dong, Gyeongsan-si, Gyeongsangbukdo, 712-749, Korea"}]},{"given":"Dong-Yeon","family":"Lee","sequence":"additional","affiliation":[{"name":"School of Mechanical Engineering, Yeungnam University, 214-1, Dae-dong, Gyeongsan-si, Gyeongsangbukdo, 712-749, Korea"}]}],"member":"1968","published-online":{"date-parts":[[2010,11,30]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"4378","DOI":"10.1063\/1.1610782","article-title":"Atomic force microscope with improved scan accuracy, scan speed and optical vision","volume":"74","author":"Kwon","year":"2003","journal-title":"Rev Sci Instr"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"173","DOI":"10.1016\/j.sna.2010.05.027","article-title":"A piezo-driven compliant stage with double mechanical amplification mechanisms arranged in parallel","volume":"161","author":"Choi","year":"2010","journal-title":"Sens Actuat A-Phys"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"1572","DOI":"10.1109\/LPT.2002.803331","article-title":"Large-displacement vertical microlens scanner with low driving voltage","volume":"14","author":"Kwon","year":"2002","journal-title":"IEEE Photonic Technol Lett"},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1063\/1.2207368","article-title":"Monolithic parallel linear compliant mechanism for two axes ultraprecision linear motion","volume":"77","author":"Choi","year":"2006","journal-title":"Rev Sci Instr"},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"562","DOI":"10.1016\/j.mechatronics.2009.01.002","article-title":"Optimal design of high precision XY-scanner with nanometer-level resolution and millimeter-level working range","volume":"19","author":"Kang","year":"2009","journal-title":"Mechatronics"},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"906","DOI":"10.1109\/TCST.2007.902953","article-title":"Design and modeling of a high-speed AFM-scanner","volume":"15","author":"Schitter","year":"2007","journal-title":"IEEE Trans Control Syst Techn"},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"144","DOI":"10.1002\/asjc.90","article-title":"High-speed serial-kinematic AFM scanner: Design and drive considerations","volume":"11","author":"Leang","year":"2009","journal-title":"Asian J. Control"},{"key":"ref_8","unstructured":"Smith, ST (2003). Flexure: Elements of Elastic Mechanics, Taylor and Francis."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/10\/12\/10673\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T22:03:58Z","timestamp":1760220238000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/10\/12\/10673"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2010,11,30]]},"references-count":8,"journal-issue":{"issue":"12","published-online":{"date-parts":[[2010,12]]}},"alternative-id":["s101210673"],"URL":"https:\/\/doi.org\/10.3390\/s101210673","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2010,11,30]]}}}