{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T04:39:19Z","timestamp":1760243959924,"version":"build-2065373602"},"reference-count":14,"publisher":"MDPI AG","issue":"12","license":[{"start":{"date-parts":[[2010,11,30]],"date-time":"2010-11-30T00:00:00Z","timestamp":1291075200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Integration of a reformer and a proton exchange membrane fuel cell (PEMFC) is problematic due to the presence in the gas from the reforming process of a slight amount of carbon monoxide. Carbon monoxide poisons the catalyst of the proton exchange membrane fuel cell subsequently degrading the fuel cell performance, and necessitating the sublimation of the reaction gas before supplying to fuel cells. Based on the use of micro-electro-mechanical systems (MEMS) technology to manufacture flexible micro CO sensors, this study elucidates the relation between a micro CO sensor and different SnO2 thin film thicknesses. Experimental results indicate that the sensitivity increases at temperatures ranging from 100\u2013300 \u00b0C. Additionally, the best sensitivity is obtained at a specific temperature. For instance, the best sensitivity of SnO2 thin film thickness of 100 nm at 300 \u00b0C is 59.3%. Moreover, a flexible micro CO sensor is embedded into a micro reformer to determine the CO concentration in each part of a micro reformer in the future, demonstrating the inner reaction of a micro reformer in depth and immediate detection.<\/jats:p>","DOI":"10.3390\/s101210701","type":"journal-article","created":{"date-parts":[[2010,11,30]],"date-time":"2010-11-30T10:57:54Z","timestamp":1291114674000},"page":"10701-10713","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":6,"title":["Fabrication of a Flexible Micro CO Sensor for Micro Reformer Applications"],"prefix":"10.3390","volume":"10","author":[{"given":"Chi-Yuan","family":"Lee","sequence":"first","affiliation":[{"name":"Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan, Taiwan"}]},{"given":"Chi-Chung","family":"Chang","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan, Taiwan"}]},{"given":"Yi-Man","family":"Lo","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan, Taiwan"}]}],"member":"1968","published-online":{"date-parts":[[2010,11,30]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"486","DOI":"10.1016\/0925-4005(95)85104-6","article-title":"CO gas sensor based on Au-La2O3 loaded SnO2 ceramic","volume":"25","author":"Fukui","year":"1995","journal-title":"Sens Actuat B"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"51","DOI":"10.1023\/A:1008884600516","article-title":"Thick film tin oxide sensors for detecting carbon monoxide at room temperature","volume":"9","author":"Williams","year":"1998","journal-title":"J Mater Sci Mater Electron"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"507","DOI":"10.1016\/0925-4005(95)85109-7","article-title":"The influence of the tin oxide deposition technique on the sensitivity to CO","volume":"25","author":"Horrillo","year":"1995","journal-title":"Sens Actuat B"},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"131","DOI":"10.1016\/j.snb.2009.10.047","article-title":"CO and ethanol dual selective sensor of Sm2O3-doped SnO2 nanoparticles synthesized by microwave-induced combustion","volume":"144","author":"Habibzadeh","year":"2010","journal-title":"Sens Actuat B"},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"364","DOI":"10.1016\/j.snb.2008.12.018","article-title":"Gas response, response time and selectivity of a resistive CO sensor based on two connected CeO2 thick films with various particle sizes","volume":"136","author":"Izu","year":"2009","journal-title":"Sens Actuat B"},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"7","DOI":"10.1016\/j.snb.2009.06.004","article-title":"Detection of CO in H2-rich gases with a samarium doped ceria (SDC) sensor for fuel cell applications","volume":"141","author":"Pijolat","year":"2009","journal-title":"Sens Actuat B"},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"360","DOI":"10.1016\/j.snb.2010.06.060","article-title":"Vanadium-promoted tin oxide semiconductor carbon monoxide gas sensors","volume":"150","author":"Wang","year":"2010","journal-title":"Sens Actuat B"},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"527","DOI":"10.1016\/j.snb.2009.12.070","article-title":"Carbon monoxide sensing at room temperature via electron donation in boron doped diamond films","volume":"145","author":"Joshi","year":"2010","journal-title":"Sens Actuat B"},{"key":"ref_9","doi-asserted-by":"crossref","unstructured":"Chen, J, Hangauer, A, Strzoda, R, Fleischer, M, and Amann, MC (2009, January 6\u20139). Miniaturized laser spectroscopic CO sensor for industrial and safety applications. Lausanne, Switzerland.","DOI":"10.1016\/j.proche.2009.07.345"},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"513","DOI":"10.1143\/JJAP.19.513","article-title":"Preparation of fast detecting SnO2 gas sensor","volume":"19","author":"Pink","year":"1980","journal-title":"Jpn J Appl Phys"},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"400","DOI":"10.1016\/j.snb.2010.03.061","article-title":"Highly selective Pt\/SnO2 sensor to propane or methane in presence of CO and ethanol, using gold nanoparticles on Fe2O3 catalytic filter","volume":"147","author":"Oliaee","year":"2010","journal-title":"Sens Actuat B"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"114","DOI":"10.1016\/0021-9517(91)90015-V","article-title":"Comparison of the performance characteristics of Pt\/SnOx and Au\/MnOx catalysts for low-temperature CO oxidation","volume":"129","author":"Gardner","year":"1991","journal-title":"J Catal"},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"117","DOI":"10.1016\/0926-3373(95)00010-0","article-title":"Au\/MnOx catalystic performance characteristics for low-temperature carbon monoxide oxidation","volume":"6","author":"Gardner","year":"1995","journal-title":"Appl Catal B"},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"123","DOI":"10.1007\/BF03214746","article-title":"Catalysis: A golden future","volume":"29","author":"Hutchings","year":"1996","journal-title":"Gold Bull"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/10\/12\/10701\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T22:03:58Z","timestamp":1760220238000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/10\/12\/10701"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2010,11,30]]},"references-count":14,"journal-issue":{"issue":"12","published-online":{"date-parts":[[2010,12]]}},"alternative-id":["s101210701"],"URL":"https:\/\/doi.org\/10.3390\/s101210701","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2010,11,30]]}}}