{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,19]],"date-time":"2026-06-19T16:12:26Z","timestamp":1781885546042,"version":"3.54.5"},"reference-count":15,"publisher":"MDPI AG","issue":"3","license":[{"start":{"date-parts":[[2011,3,1]],"date-time":"2011-03-01T00:00:00Z","timestamp":1298937600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This study proposes a wireless remote weather monitoring system based on Micro-Electro-Mechanical Systems (MEMS) and wireless sensor network (WSN) technologies comprising sensors for the measurement of temperature, humidity, pressure, wind speed and direction, integrated on a single chip. The sensing signals are transmitted between the Octopus II-A sensor nodes using WSN technology, following amplification and analog\/digital conversion (ADC). Experimental results show that the resistance of the micro temperature sensor increases linearly with input temperature, with an average TCR (temperature coefficient of resistance) value of 8.2 \u00d7 10\u22124 (\u00b0C\u22121). The resistance of the pressure sensor also increases linearly with air pressure, with an average sensitivity value of 3.5 \u00d7 10\u22122 (\u03a9\/kPa). The sensitivity to humidity increases with ambient temperature due to the effect of temperature on the dielectric constant, which was determined to be 16.9, 21.4, 27.0, and 38.2 (pF\/%RH) at 27 \u00b0C, 30 \u00b0C, 40 \u00b0C, and 50 \u00b0C, respectively. The velocity of airflow is obtained by summing the variations in resistor response as airflow passed over the sensors providing sensitivity of 4.2 \u00d7 10\u22122, 9.2 \u00d7 10\u22122, 9.7 \u00d7 10\u22122 (\u03a9\/ms\u22121) with power consumption by the heating resistor of 0.2, 0.3, and 0.5 W, respectively. The passage of air across the surface of the flow sensors prompts variations in temperature among each of the sensing resistors. Evaluating these variations in resistance caused by the temperature change enables the measurement of wind direction.<\/jats:p>","DOI":"10.3390\/s110302715","type":"journal-article","created":{"date-parts":[[2011,3,2]],"date-time":"2011-03-02T19:57:04Z","timestamp":1299095824000},"page":"2715-2727","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":41,"title":["Wireless Remote Weather Monitoring System Based on MEMS Technologies"],"prefix":"10.3390","volume":"11","author":[{"given":"Rong-Hua","family":"Ma","sequence":"first","affiliation":[{"name":"Department of Mechanical Engineering, Chinese Military Academy, Kaohsiung 830, Taiwan"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yu-Hsiang","family":"Wang","sequence":"additional","affiliation":[{"name":"Department of Mechanical and Automation Engineering, Da-Yeh University, Changhua 515, Taiwan"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Chia-Yen","family":"Lee","sequence":"additional","affiliation":[{"name":"Department of Materials Engineering, National Pingtung University of Science and Technology, Pingtung 912, Taiwan"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2011,3,1]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"6200","DOI":"10.3390\/s90806200","article-title":"Fabrication and Performance of MEMS-Based Pressure Sensor Packages Using Patterned Ultra-Thick Photoresists","volume":"9","author":"Chen","year":"2009","journal-title":"Sensors"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"2389","DOI":"10.3390\/s7102389","article-title":"A MEMS-based Air Flow Sensor with a Free-standing Microcantilever Structure","volume":"7","author":"Wang","year":"2007","journal-title":"Sensors"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"5460","DOI":"10.3390\/s90705460","article-title":"A MEMS-Based Flow Rate and Flow Direction Sensing Platform with Integrated Temperature Compensation Scheme","volume":"9","author":"Ma","year":"2009","journal-title":"Sensors"},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"205","DOI":"10.3390\/s20600205","article-title":"Thin Films of In2O3\/SiO for Humidity Sensing Applications","volume":"2","author":"Arshak","year":"2002","journal-title":"Sensors"},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"50","DOI":"10.3390\/s20200050","article-title":"A Ceramic Thick Film Humidity Sensor Based on MnZn Ferrite","volume":"2","author":"Arshaka","year":"2002","journal-title":"Sensors"},{"key":"ref_6","unstructured":"Gogoi, BP, and Mastrangelo, CH (1996, January 8\u201311). A Low Voltage Force-Balanced Barometric Pressure Sensor. San Francisco, CA, USA."},{"key":"ref_7","unstructured":"Mayer, F, Haberli, A, Jacobs, H, Ofner, G, Paul, O, and Balter, H (1997, January 7\u201310). A Single Chip CMOS Anemometer. Washington, DC, USA."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"196","DOI":"10.1016\/S0924-4247(01)00788-9","article-title":"Recent Achievement in Miniaturized Humidity Sensors\u2014A Review of Transduction Techniques","volume":"96","author":"Rittersma","year":"2002","journal-title":"Sens. Actuat. A"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1166\/sl.2005.001","article-title":"Humidity Sensors: A Review","volume":"3","author":"Lee","year":"2005","journal-title":"Sens. Lett"},{"key":"ref_10","unstructured":"Bakker, A (2002, January 12\u201314). CMOS Smart Temperature Sensor\u2014An Overview. Orlando, FL, USA."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"215","DOI":"10.1515\/IJNSNS.2002.3.3-4.215","article-title":"MEMS-Based Temperature Control Systems for PCR Applications","volume":"3","author":"Lee","year":"2002","journal-title":"Int. J. Nonlin. Sci. Num. Simul"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"620","DOI":"10.1088\/0960-1317\/13\/5\/313","article-title":"Micromachine-Based Humidity Sensors with Integrated Temperature Sensors for Signal Drift Compensation","volume":"13","author":"Lee","year":"2003","journal-title":"J. Micromech. Microeng"},{"key":"ref_13","first-page":"100","article-title":"A Smart Flow Sensor for Flow Direction Measurement","volume":"6","author":"Lee","year":"2008","journal-title":"Adv. Mater. 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