{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T04:37:48Z","timestamp":1760243868982,"version":"build-2065373602"},"reference-count":15,"publisher":"MDPI AG","issue":"11","license":[{"start":{"date-parts":[[2011,11,8]],"date-time":"2011-11-08T00:00:00Z","timestamp":1320710400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>We present the design, fabrication and characterization of a new all-optical frequency modulated pressure sensor. Using the tangential strain in a circular membrane, a waveguide with an integrated nanoscale Bragg grating is strained longitudinally proportional to the applied pressure causing a shift in the Bragg wavelength. The simple and robust design combined with the small chip area of 1 \u00d7 1.8 mm2 makes the sensor ideally suited for remote and distributed sensing in harsh environments and where miniaturized sensors are required. The sensor is designed for high pressure applications up to 350 bar and with a sensitivity of 4.8 pm\/bar (i.e., 350 \u00d7105 Pa and 4.8 \u00d7 10\u22125 pm\/Pa, respectively).<\/jats:p>","DOI":"10.3390\/s111110615","type":"journal-article","created":{"date-parts":[[2011,11,8]],"date-time":"2011-11-08T11:36:19Z","timestamp":1320752179000},"page":"10615-10623","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":2,"title":["All-Optical Frequency Modulated High Pressure MEMS Sensor for Remote and Distributed Sensing"],"prefix":"10.3390","volume":"11","author":[{"given":"Kasper","family":"Reck","sequence":"first","affiliation":[{"name":"DTU Nanotech, Technical University of Denmark, \u00d8ersteds Plads, Building 345B, DK-2800 Kgs. Lyngby, Denmark"}]},{"given":"Erik V.","family":"Thomsen","sequence":"additional","affiliation":[{"name":"DTU Nanotech, Technical University of Denmark, \u00d8ersteds Plads, Building 345B, DK-2800 Kgs. Lyngby, Denmark"}]},{"given":"Ole","family":"Hansen","sequence":"additional","affiliation":[{"name":"DTU Nanotech, Technical University of Denmark, \u00d8ersteds Plads, Building 345B, DK-2800 Kgs. Lyngby, Denmark"},{"name":"CINF Center for Individual Nanoparticle Functionality, Technical University of Denmark, Building 345B, DK-2800 Kgs. Lyngby, Denmark"}]}],"member":"1968","published-online":{"date-parts":[[2011,11,8]]},"reference":[{"key":"ref_1","first-page":"621","article-title":"High sensitivity fiber Bragg grating pressure difference sensor","volume":"2","author":"Fu","year":"2004","journal-title":"Chinese Optics Lett"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"521","DOI":"10.1088\/0960-1317\/15\/3\/012","article-title":"An ultra-sensitive optical MEMS sensor for partial discharge detection","volume":"15","author":"Wang","year":"2005","journal-title":"J. Micromech. Microeng"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"35","DOI":"10.1088\/0960-1317\/4\/1\/005","article-title":"Optical pressure sensor using two Mach-Zehnder interferometers for the TE and TM polarization","volume":"4","author":"Wagner","year":"1994","journal-title":"J. Micromech. 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A Phys"},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"513","DOI":"10.1109\/JPROC.2009.2013612","article-title":"Review: Semiconductor piezoresistance for microsystems","volume":"97","author":"Barlian","year":"2009","journal-title":"Proc. IEEE"},{"key":"ref_14","first-page":"172","article-title":"The tension of metallic films deposited by electrolysis","volume":"82","author":"Stoney","year":"1909","journal-title":"Proc. Roy. Soc. Lond"},{"key":"ref_15","first-page":"11","article-title":"Polymer integrated optics: Promise vs. practicality","volume":"4642","author":"Eldada","year":"2002","journal-title":"Organic Photon. Mater. Dev. IV"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/11\/11\/10615\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T21:57:57Z","timestamp":1760219877000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/11\/11\/10615"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2011,11,8]]},"references-count":15,"journal-issue":{"issue":"11","published-online":{"date-parts":[[2011,11]]}},"alternative-id":["s111110615"],"URL":"https:\/\/doi.org\/10.3390\/s111110615","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2011,11,8]]}}}