{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,1,22]],"date-time":"2026-01-22T08:32:43Z","timestamp":1769070763589,"version":"3.49.0"},"reference-count":25,"publisher":"MDPI AG","issue":"4","license":[{"start":{"date-parts":[[2012,3,26]],"date-time":"2012-03-26T00:00:00Z","timestamp":1332720000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This paper reports a versatile nano-sensor technology using \u201ctop-down\u201d poly-silicon nanowire field-effect transistors (FETs) in the conventional Complementary Metal-Oxide Semiconductor (CMOS)-compatible semiconductor process. The nanowire manufacturing technique reduced nanowire width scaling to 50 nm without use of extra lithography equipment, and exhibited superior device uniformity. These n type polysilicon nanowire FETs have positive pH sensitivity (100 mV\/pH) and sensitive deoxyribonucleic acid (DNA) detection ability (100 pM) at normal system operation voltages. Specially designed oxide-nitride-oxide buried oxide nanowire realizes an electrically Vth-adjustable sensor to compensate device variation. These nanowire FETs also enable non-volatile memory application for a large and steady Vth adjustment window (&gt;2 V Programming\/Erasing window). The CMOS-compatible manufacturing technique of polysilicon nanowire FETs offers a possible solution for commercial System-on-Chip biosensor application, which enables portable physiology monitoring and in situ recording.<\/jats:p>","DOI":"10.3390\/s120403952","type":"journal-article","created":{"date-parts":[[2012,3,26]],"date-time":"2012-03-26T11:04:58Z","timestamp":1332759898000},"page":"3952-3963","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":29,"title":["A CMOS-Compatible Poly-Si Nanowire Device with Hybrid Sensor\/Memory Characteristics for System-on-Chip Applications"],"prefix":"10.3390","volume":"12","author":[{"given":"Min-Cheng","family":"Chen","sequence":"first","affiliation":[{"name":"National Nano Device Laboratories, No. 26, Prosperity Road 1, Hsinchu Science Park, Hsinchu 300, Taiwan"}]},{"given":"Hao-Yu","family":"Chen","sequence":"additional","affiliation":[{"name":"National Nano Device Laboratories, No. 26, Prosperity Road 1, Hsinchu Science Park, Hsinchu 300, Taiwan"},{"name":"Institute of Electronics, National Chiao Tung University, Hsin-Chu 300, Taiwan"}]},{"given":"Chia-Yi","family":"Lin","sequence":"additional","affiliation":[{"name":"National Nano Device Laboratories, No. 26, Prosperity Road 1, Hsinchu Science Park, Hsinchu 300, Taiwan"}]},{"given":"Chao-Hsin","family":"Chien","sequence":"additional","affiliation":[{"name":"Institute of Electronics, National Chiao Tung University, Hsin-Chu 300, Taiwan"}]},{"given":"Tsung-Fan","family":"Hsieh","sequence":"additional","affiliation":[{"name":"Graduate Institute of Biomedical Sciences, Chang Gung University, Taoyuan 333, Taiwan"}]},{"given":"Jim-Tong","family":"Horng","sequence":"additional","affiliation":[{"name":"Graduate Institute of Biomedical Sciences, Chang Gung University, Taoyuan 333, Taiwan"}]},{"given":"Jian-Tai","family":"Qiu","sequence":"additional","affiliation":[{"name":"Graduate Institute of Biomedical Sciences, Chang Gung University, Taoyuan 333, Taiwan"}]},{"given":"Chien-Chao","family":"Huang","sequence":"additional","affiliation":[{"name":"National Nano Device Laboratories, No. 26, Prosperity Road 1, Hsinchu Science Park, Hsinchu 300, Taiwan"}]},{"given":"Chia-Hua","family":"Ho","sequence":"additional","affiliation":[{"name":"National Nano Device Laboratories, No. 26, Prosperity Road 1, Hsinchu Science Park, Hsinchu 300, Taiwan"}]},{"given":"Fu-Liang","family":"Yang","sequence":"additional","affiliation":[{"name":"National Nano Device Laboratories, No. 26, Prosperity Road 1, Hsinchu Science Park, Hsinchu 300, Taiwan"}]}],"member":"1968","published-online":{"date-parts":[[2012,3,26]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"103","DOI":"10.1016\/S0925-4005(03)00231-4","article-title":"Analysis, control and augmentation of microcantilever deflections in bio-sensing systems","volume":"94","author":"Khaled","year":"2003","journal-title":"Sens. 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