{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,20]],"date-time":"2026-03-20T16:06:55Z","timestamp":1774022815068,"version":"3.50.1"},"reference-count":24,"publisher":"MDPI AG","issue":"4","license":[{"start":{"date-parts":[[2012,4,19]],"date-time":"2012-04-19T00:00:00Z","timestamp":1334793600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>The steady-state zero output of static electric field measuring systems often fluctuates, which is caused mainly by the finite leakage resistance of the water film on the surface of the electric field microsensor package. The water adsorption has been calculated using the Boltzmann distribution equation at various relative humidities for borosilicate glass and polytetrafluoroethylene surfaces. At various humidities, water film thickness has been calculated, and the induced charge leakage and field attenuation have been theoretically investigated. Experiments have been performed with microsensors to verify the theoretical predictions and the results are in good agreement.<\/jats:p>","DOI":"10.3390\/s120405105","type":"journal-article","created":{"date-parts":[[2012,4,19]],"date-time":"2012-04-19T11:01:34Z","timestamp":1334833294000},"page":"5105-5115","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":8,"title":["Humidity-Induced Charge Leakage and Field Attenuation in Electric Field Microsensors"],"prefix":"10.3390","volume":"12","author":[{"given":"Haiyan","family":"Zhang","sequence":"first","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China"},{"name":"Graduate School of the Chinese Academy of Sciences, Beijing 100049, China"}]},{"given":"Dongming","family":"Fang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China"}]},{"given":"Pengfei","family":"Yang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China"},{"name":"Graduate School of the Chinese Academy of Sciences, Beijing 100049, China"}]},{"given":"Chunrong","family":"Peng","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China"}]},{"given":"Xiaolong","family":"Wen","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China"},{"name":"Graduate School of the Chinese Academy of Sciences, Beijing 100049, China"}]},{"given":"Shanhong","family":"Xia","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China"}]}],"member":"1968","published-online":{"date-parts":[[2012,4,19]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"515","DOI":"10.1016\/S0304-3886(01)00048-1","article-title":"A micro-aperture electrostatic field mill based on MEMS technology","volume":"51","author":"Horenstein","year":"2001","journal-title":"J. Electrost."},{"key":"ref_2","unstructured":"Kuckes, A.F. (1993). Method and Apparatus for Determining Distance for Magnetic and Electric Field Measurements. (Patent No. US5218301)."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"12013","DOI":"10.1029\/JD092iD10p12013","article-title":"Effect of E-field mill location on accuracy of electric field measurements with instrumented airplane","volume":"92","author":"Mazur","year":"1987","journal-title":"J. Geophys. Res."},{"key":"ref_4","unstructured":"Carome, E.F., and Davis, C.M. (1984). Fiber Optic Electric Field Sensor\/Phase Modulator. (Patent No. US4477723)."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"611","DOI":"10.1063\/1.95328","article-title":"Spatially resolved electric field measurements in the cathode fall using optogalvanic detection of Rydberg atoms","volume":"45","author":"Doughty","year":"1984","journal-title":"Appl. Phys. Lett."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"238","DOI":"10.1007\/BF00215600","article-title":"Theory of electric field measurements conducted in the magnetosphere with electric probes","volume":"7","author":"Fahleson","year":"1967","journal-title":"Space Sci. Rev."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"670","DOI":"10.1109\/JQE.1982.1071604","article-title":"An electric field sensor utilizing a piezoelectric polyvinylidene fluoride (PVF2) film in a single-mode fiber interferometer","volume":"18","author":"Koo","year":"1982","journal-title":"J. Quantum Electron."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"391","DOI":"10.1109\/15.179271","article-title":"Development and analysis of electric field sensor using LiNbO3 optical modulator","volume":"34","author":"Kuwabara","year":"1992","journal-title":"IEEE Trans. Electromagn. Compat."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"61","DOI":"10.1016\/0021-9169(55)90107-0","article-title":"Apparatus for the accurate and continuous measurement of the earth's electric field","volume":"7","author":"Mapleson","year":"1955","journal-title":"J. Atmos. Terr. Phys."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"738","DOI":"10.1109\/TPAS.1983.318035","article-title":"Development of field-mill instruments for ground-level and above-ground electric field measurement under HVDC transmission lines","volume":"3","author":"Maruvada","year":"1983","journal-title":"IEEE Trans. Power Appar. Syst."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"4739","DOI":"10.1029\/JA074i019p04739","article-title":"Magnetospheric electric field measurements with balloons","volume":"74","author":"Mozer","year":"1969","journal-title":"J. Geophys. Res."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"596","DOI":"10.1049\/el:19990374","article-title":"Electro-optic electric field sensor based on periodically poled LiNbO3","volume":"35","author":"Rao","year":"1999","journal-title":"Electron. Lett."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"548","DOI":"10.1038\/nature02270","article-title":"A proton pore in a potassium channel voltage sensor reveals a focused electric field","volume":"427","author":"Starace","year":"2004","journal-title":"Nature"},{"key":"ref_14","doi-asserted-by":"crossref","unstructured":"Vohra, S.T., Bucholtz, P., and Kersey, A.D. (1992, January 29\u201331). A Fiber Optic DC and Low Frequency Electric Field Sensor. Monterey, CA, USA.","DOI":"10.1364\/OFS.1992.F44"},{"key":"ref_15","unstructured":"Hsu, C., and Muller, R. (1991, January 24\u201327). Micromechanical Electrostatic Voltmeter. San Francisco, CA, USA."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"577","DOI":"10.1109\/JMEMS.2003.818066","article-title":"Electrostatic charge and field sensors based on micromechanical resonators","volume":"12","author":"Riehl","year":"2003","journal-title":"J. Microelectromech. Syst."},{"key":"ref_17","unstructured":"Gong, C., Xia, S., Deng, K., Bai, Q., and Chen, S. (2004, January 24\u201327). Design and Simulation of Miniature Vibrating Electric Field Sensors. Vienna, Austria."},{"key":"ref_18","unstructured":"Shafran, J.S. (2005). A MEMS-Based, High-Resolution Electric-Field Meter. [M. Eng. Thesis, Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology]."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"914","DOI":"10.1088\/0960-1317\/16\/5\/006","article-title":"Design and testing of a micromechanical resonant electrostatic field sensor","volume":"16","author":"Peng","year":"2006","journal-title":"J. Micromech. Microeng."},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"677","DOI":"10.1016\/j.sna.2006.02.044","article-title":"Thermally driven micro-electrostatic fieldmeter","volume":"132","author":"Chen","year":"2006","journal-title":"Sens. Actuat. A: Phys."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"1482","DOI":"10.1016\/j.proeng.2010.09.397","article-title":"Design of a novel closed-loop SOI MEMS resonant electrostatic field sensor","volume":"5","author":"Peng","year":"2010","journal-title":"Procedia Eng."},{"key":"ref_22","unstructured":"Israelachvili, J.N. (1991). Intermolecular and Surface Forces, Academic Press."},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"863","DOI":"10.1103\/PhysRevLett.67.863","article-title":"Alternative method of imaging surface topologies of nonconducting bulk specimens by scanning tunneling microscopy","volume":"67","author":"Yuan","year":"1991","journal-title":"Phys. Rev. Lett."},{"key":"ref_24","first-page":"73","article-title":"A theoretical calculation model for flashover voltage of ice-coated and polluted insulators (in Chinese)","volume":"29","author":"Yu","year":"2005","journal-title":"Power Syst. Technol."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/12\/4\/5105\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T21:49:53Z","timestamp":1760219393000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/12\/4\/5105"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2012,4,19]]},"references-count":24,"journal-issue":{"issue":"4","published-online":{"date-parts":[[2012,4]]}},"alternative-id":["s120405105"],"URL":"https:\/\/doi.org\/10.3390\/s120405105","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2012,4,19]]}}}