{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T04:35:31Z","timestamp":1760243731485,"version":"build-2065373602"},"reference-count":17,"publisher":"MDPI AG","issue":"8","license":[{"start":{"date-parts":[[2012,7,25]],"date-time":"2012-07-25T00:00:00Z","timestamp":1343174400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This work demonstrates a highly sensitive pressure sensor that was fabricated using carbon microcoils (CMCs) and polydimethylsiloxane (PDMS). CMCs were grown by chemical vapor deposition using various ratios of Fe-Sn catalytic solution. The pressure sensor has a sandwiched structure, in which the as-grown CMCs were inserted between two PDMS layers. The pressure sensor exhibits piezo-resistivity changes in response to mechanical loading using a load cell system. The yields of the growth of CMCs at a catalyst proportion of Fe:Sn = 95:5 reach 95%. Experimental results show that the sensor achieves a high sensitivity of 0.93%\/kPa from the CMC yield of 95%. The sensitivity of the pressure sensor increases with increasing yield of CMCs. The demonstrated pressure sensor shows the advantage of high sensitivity and is suitable for mass production.<\/jats:p>","DOI":"10.3390\/s120810034","type":"journal-article","created":{"date-parts":[[2012,7,25]],"date-time":"2012-07-25T11:40:38Z","timestamp":1343216438000},"page":"10034-10041","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":18,"title":["Fabrication of High Sensitivity Carbon Microcoil Pressure Sensors"],"prefix":"10.3390","volume":"12","author":[{"given":"Chih-Chung","family":"Su","sequence":"first","affiliation":[{"name":"Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chen-Hung","family":"Li","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Neng-Kai","family":"Chang","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Feng","family":"Gao","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Mechanical System & Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, 800 Dongchuan Road, Shanghai 200240, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Shuo-Hung","family":"Chang","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2012,7,25]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"41","DOI":"10.1016\/j.sna.2005.09.005","article-title":"Piezoelectric and dielectric properties of La2O3 added Bi (Na, K)TiO3\u2013SrTiO3 ceramics for pressure sensor application","volume":"126","author":"Yoo","year":"2006","journal-title":"Sens. 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