{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T04:34:57Z","timestamp":1760243697071,"version":"build-2065373602"},"reference-count":12,"publisher":"MDPI AG","issue":"8","license":[{"start":{"date-parts":[[2012,8,7]],"date-time":"2012-08-07T00:00:00Z","timestamp":1344297600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This paper presents a new actuation mechanism to drive comb-drive actuators. An asymmetric configuration of the finger overlap was used to generate capacitive coupling for the actuation mechanism. When the driving voltages were applied on the stators, a voltage would be induced at the rotor due to the capacitive coupling. Then, an electrostatic force would be exerted onto the rotor due to the voltage differences between the stators and the rotor. The actuator\u2019s static displacement and resonant frequency were theoretically analyzed. To verify the design, a comb-drive actuator with different initial finger overlaps, i.e., 159.3 \u03bcm and 48.9 \u03bcm on each side, was fabricated and tested. The results show that the actuator worked well using the proposed actuation mechanism. A static displacement of 41.7 \u03bcm and a resonant frequency of 577 Hz were achieved. Using the actuation mechanism, no electrical connection is required between the rotor and the outside power supply. This makes some comb-drive actuators containing heterogeneous structures easy to design and actuate.<\/jats:p>","DOI":"10.3390\/s120810881","type":"journal-article","created":{"date-parts":[[2012,8,7]],"date-time":"2012-08-07T10:56:27Z","timestamp":1344336987000},"page":"10881-10889","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":6,"title":["A Comb-Drive Actuator Driven by Capacitively-Coupled-Power"],"prefix":"10.3390","volume":"12","author":[{"given":"Chao-Min","family":"Chang","sequence":"first","affiliation":[{"name":"Institute of NanoEngineering and MicroSystems, National Tsing Hua University, 101, Sec. 2, Kuang-Fu Rd., Hsinchu 30013, Taiwan"},{"name":"Department of Mechanical Engineering, National United University, 1, Lienda, Miaoli 36003, Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Shao-Yu","family":"Wang","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, National United University, 1, Lienda, Miaoli 36003, Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Rongshun","family":"Chen","sequence":"additional","affiliation":[{"name":"Institute of NanoEngineering and MicroSystems, National Tsing Hua University, 101, Sec. 2, Kuang-Fu Rd., Hsinchu 30013, Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"J. Andrew","family":"Yeh","sequence":"additional","affiliation":[{"name":"Institute of NanoEngineering and MicroSystems, National Tsing Hua University, 101, Sec. 2, Kuang-Fu Rd., Hsinchu 30013, Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Max T.","family":"Hou","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, National United University, 1, Lienda, Miaoli 36003, Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2012,8,7]]},"reference":[{"key":"ref_1","first-page":"043015:1","article-title":"In-plane rotary comb-drive actuator for a variable optical attenuator","volume":"7","author":"Hou","year":"2008","journal-title":"J. Micro\/Nanolithogr. 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MEMS"},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"523","DOI":"10.1016\/j.sna.2007.10.004","article-title":"A closed-form approach for frequency tunable comb resonators with curved finger contour","volume":"141","author":"Lee","year":"2008","journal-title":"Sensor Actuators A."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"530","DOI":"10.1016\/j.sna.2004.04.052","article-title":"Design and modeling for comb drive actuator with enlarged static displacement","volume":"115","author":"Chen","year":"2004","journal-title":"Sensor Actuators A."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"52","DOI":"10.1109\/84.128056","article-title":"Design, fabrication, and operation of submicron gap comb-drive microactuators","volume":"1","author":"Hirano","year":"1992","journal-title":"IEEE J. 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Technol."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"947","DOI":"10.1109\/JMEMS.2003.821468","article-title":"Power delivery and locomotion of untethered microactuators","volume":"12","author":"Donald","year":"2003","journal-title":"IEEE J. MEMS"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"320","DOI":"10.1088\/0960-1317\/6\/3\/004","article-title":"Comb-drive actuators for large displacements","volume":"6","author":"Legtenberg","year":"1996","journal-title":"J. Micromech. Microeng."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/12\/8\/10881\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T21:51:39Z","timestamp":1760219499000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/12\/8\/10881"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2012,8,7]]},"references-count":12,"journal-issue":{"issue":"8","published-online":{"date-parts":[[2012,8]]}},"alternative-id":["s120810881"],"URL":"https:\/\/doi.org\/10.3390\/s120810881","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2012,8,7]]}}}