{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,1]],"date-time":"2026-03-01T03:42:08Z","timestamp":1772336528530,"version":"3.50.1"},"reference-count":21,"publisher":"MDPI AG","issue":"9","license":[{"start":{"date-parts":[[2012,9,5]],"date-time":"2012-09-05T00:00:00Z","timestamp":1346803200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>The present paper presents the design and development results of a system setup for measuring Young\u2019s modulus of thin films by laser-induced surface acoustic waves based on the integration of two detection methods, namely, piezoelectric transducer detection and differential confocal detection, which may be used for conducting consecutive or simultaneous measurements. After demonstrating the capabilities of each detection approach, it is shown how, depending on a wider range of applications, sample materials and measurement environments, the developed integrated system inherits and harnesses the main characteristics of its detection channels, resulting in an more practical and flexible equipment for determining Young\u2019s modulus than traditional nanoindentation equipment, and also suitable for cross-validation purposes.<\/jats:p>","DOI":"10.3390\/s120912208","type":"journal-article","created":{"date-parts":[[2012,9,5]],"date-time":"2012-09-05T11:40:07Z","timestamp":1346845207000},"page":"12208-12219","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":10,"title":["An Integrated Laser-Induced Piezoelectric\/Differential Confocal Surface Acoustic Wave System for Measurement of Thin Film Young\u2019s Modulus"],"prefix":"10.3390","volume":"12","author":[{"given":"Fei","family":"Yang","sequence":"first","affiliation":[{"name":"State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Weijin Road, No.92, Tianjin 300072, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Dante J.","family":"Dorantes-Gonzalez","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Weijin Road, No.92, Tianjin 300072, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Kun","family":"Chen","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Weijin Road, No.92, Tianjin 300072, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zimo","family":"Lu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Weijin Road, No.92, Tianjin 300072, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Baoyin","family":"Jin","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Weijin Road, No.92, Tianjin 300072, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yanning","family":"Li","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Weijin Road, No.92, Tianjin 300072, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zhi","family":"Chen","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Weijin Road, No.92, Tianjin 300072, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xiaotang","family":"Hu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Weijin Road, No.92, Tianjin 300072, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2012,9,5]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"458","DOI":"10.1016\/S0257-8972(96)02853-8","article-title":"A comparative study of the mechanical properties of TiN coatings using the non-destructive surface acoustic wave method, scratch test and four-point bending test","volume":"84","author":"Ollendorf","year":"1996","journal-title":"Surf. 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