{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,22]],"date-time":"2026-04-22T01:01:32Z","timestamp":1776819692423,"version":"3.51.2"},"reference-count":32,"publisher":"MDPI AG","issue":"11","license":[{"start":{"date-parts":[[2012,11,16]],"date-time":"2012-11-16T00:00:00Z","timestamp":1353024000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>We present a new generation of piezoresistive nanomechanical Membrane-type Surface stress Sensor (MSS) chips, which consist of a two dimensional array of MSS on a single chip. The implementation of several optimization techniques in the design and microfabrication improved the piezoresistive sensitivity by 3~4 times compared to the first generation MSS chip, resulting in a sensitivity about ~100 times better than a standard cantilever-type sensor and a few times better than optical read-out methods in terms of experimental signal-to-noise ratio. Since the integrated piezoresistive read-out of the MSS can meet practical requirements, such as compactness and not requiring bulky and expensive peripheral devices, the MSS is a promising transducer for nanomechanical sensing in the rapidly growing application fields in medicine, biology, security, and the environment. Specifically, its system compactness due to the integrated piezoresistive sensing makes the MSS concept attractive for the instruments used in mobile applications. In addition, the MSS can operate in opaque liquids, such as blood, where optical read-out techniques cannot be applied.<\/jats:p>","DOI":"10.3390\/s121115873","type":"journal-article","created":{"date-parts":[[2012,11,16]],"date-time":"2012-11-16T11:03:15Z","timestamp":1353063795000},"page":"15873-15887","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":75,"title":["Two Dimensional Array of Piezoresistive Nanomechanical Membrane-Type Surface Stress Sensor (MSS) with Improved Sensitivity"],"prefix":"10.3390","volume":"12","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-9136-8964","authenticated-orcid":false,"given":"Genki","family":"Yoshikawa","sequence":"first","affiliation":[{"name":"International Center for Materials Nanoarchitectonics (MANA), National Institute for Materials Science (NIMS), Tsukuba 305-0044, Japan"}]},{"given":"Terunobu","family":"Akiyama","sequence":"additional","affiliation":[{"name":"Institute of Microengineering (IMT), Ecole Polytechnique F\u00e9d\u00e9rale de Lausanne (EPFL), Neuch\u00e2tel CH-2002, Switzerland"}]},{"given":"Frederic","family":"Loizeau","sequence":"additional","affiliation":[{"name":"Institute of Microengineering (IMT), Ecole Polytechnique F\u00e9d\u00e9rale de Lausanne (EPFL), Neuch\u00e2tel CH-2002, Switzerland"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-7775-0318","authenticated-orcid":false,"given":"Kota","family":"Shiba","sequence":"additional","affiliation":[{"name":"International Center for Materials Nanoarchitectonics (MANA), National Institute for Materials Science (NIMS), Tsukuba 305-0044, Japan"}]},{"given":"Sebastian","family":"Gautsch","sequence":"additional","affiliation":[{"name":"Institute of Microengineering (IMT), Ecole Polytechnique F\u00e9d\u00e9rale de Lausanne (EPFL), Neuch\u00e2tel CH-2002, Switzerland"}]},{"given":"Tomonobu","family":"Nakayama","sequence":"additional","affiliation":[{"name":"International Center for Materials Nanoarchitectonics (MANA), National Institute for Materials Science (NIMS), Tsukuba 305-0044, Japan"}]},{"given":"Peter","family":"Vettiger","sequence":"additional","affiliation":[{"name":"Institute of Microengineering (IMT), Ecole Polytechnique F\u00e9d\u00e9rale de Lausanne (EPFL), Neuch\u00e2tel CH-2002, Switzerland"}]},{"given":"Nico F. de","family":"Rooij","sequence":"additional","affiliation":[{"name":"Institute of Microengineering (IMT), Ecole Polytechnique F\u00e9d\u00e9rale de Lausanne (EPFL), Neuch\u00e2tel CH-2002, Switzerland"}]},{"given":"Masakazu","family":"Aono","sequence":"additional","affiliation":[{"name":"International Center for Materials Nanoarchitectonics (MANA), National Institute for Materials Science (NIMS), Tsukuba 305-0044, Japan"}]}],"member":"1968","published-online":{"date-parts":[[2012,11,16]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"589","DOI":"10.1016\/0009-2614(93)E1419-H","article-title":"Observation of a chemical-reaction using a micromechanical sensor","volume":"217","author":"Gimzewski","year":"1994","journal-title":"Chem. Phys. Lett."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"2894","DOI":"10.1063\/1.111407","article-title":"Thermal and ambient-induced deflections of scanning force microscope cantilevers","volume":"64","author":"Thundat","year":"1994","journal-title":"Appl. Phys. Lett."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"2385","DOI":"10.1021\/nl051449z","article-title":"Cantilever sensor for nanomechanical detection of specific protein conformations","volume":"5","author":"Mukhopadhyay","year":"2005","journal-title":"Nano Lett."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"e3610","DOI":"10.1371\/journal.pone.0003610","article-title":"Comprehensive characterization of molecular interactions based on nanomechanics","volume":"3","author":"Ghatkesar","year":"2008","journal-title":"PLoS One"},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"14587","DOI":"10.1073\/pnas.0504917102","article-title":"A label-free immunosensor array using single-chain antibody fragments","volume":"102","author":"Backmann","year":"2005","journal-title":"Proc. Natl. Acad. Sci. USA"},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"2021","DOI":"10.1126\/science.276.5321.2021","article-title":"Surface stress in the self-assembly of alkanethiols on gold","volume":"276","author":"Berger","year":"1997","journal-title":"Science"},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"316","DOI":"10.1126\/science.288.5464.316","article-title":"Translating biomolecular recognition into nanomechanics","volume":"288","author":"Fritz","year":"2000","journal-title":"Science"},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"59","DOI":"10.1016\/S0003-2670(99)00283-4","article-title":"An artificial nose based on a micromechanical cantilever array","volume":"393","author":"Lang","year":"1999","journal-title":"Anal. Chim. Acta"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"9783","DOI":"10.1073\/pnas.152330199","article-title":"Multiple label-free biodetection and quantitative DNA-binding assays on a nanomechanical cantilever array","volume":"99","author":"McKendry","year":"2002","journal-title":"Proc. Natl. Acad. Sci. USA"},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"601","DOI":"10.1021\/ja065222x","article-title":"Investigating the molecular mechanisms of in-plane mechanochemistry on cantilever arrays","volume":"129","author":"Watari","year":"2007","journal-title":"J. Am. Chem. Soc."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"214","DOI":"10.1038\/nnano.2006.134","article-title":"Rapid and label-free nanomechanical detection of biomarker transcripts in human RNA","volume":"1","author":"Zhang","year":"2006","journal-title":"Nat. Nanotechnol."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"834","DOI":"10.1063\/1.108593","article-title":"Atomic resolution with an atomic force microscope using piezoresistive detection","volume":"62","author":"Tortonese","year":"1993","journal-title":"Appl. Phys. Lett."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"321","DOI":"10.1016\/S0924-4247(01)00602-1","article-title":"Atomic force microscope for planetary applications","volume":"91","author":"Akiyama","year":"2001","journal-title":"Sens. Actuators A"},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"1698","DOI":"10.1016\/j.mee.2006.01.201","article-title":"Scanning probe arrays for life sciences and nanobiology applications","volume":"83","author":"Aeschimann","year":"2006","journal-title":"Microelectron. Eng."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"015501","DOI":"10.1088\/0957-4484\/20\/1\/015501","article-title":"Sub-ppm detection of vapors using piezoresistive microcantilever array sensors","volume":"20","author":"Yoshikawa","year":"2009","journal-title":"Nanotechnology"},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"32","DOI":"10.1016\/S1369-7021(09)70249-4","article-title":"Design & fabrication of cantilever array biosensors","volume":"12","author":"Boisen","year":"2009","journal-title":"Mater. Today"},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"163","DOI":"10.1002\/sia.1182","article-title":"Measurement of quartz particles by means of an atomic force microscope for planetary exploration","volume":"33","author":"Gautsch","year":"2002","journal-title":"Surf. Interface Anal."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"2","DOI":"10.1016\/S0925-4005(00)00546-3","article-title":"Application-specific sensor systems based on CMOS chemical microsensors","volume":"70","author":"Hierlemann","year":"2000","journal-title":"Sens. Actuators B"},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"1044","DOI":"10.1021\/nl103901a","article-title":"Nanomechanical membrane-type surface stress sensor","volume":"11","author":"Yoshikawa","year":"2011","journal-title":"Nano Lett."},{"key":"ref_20","unstructured":"Yoshikawa, G., and Rohrer, H. (May, January 26\u2013). Strain Amplification Schemes for Piezoresistive Cantilevers. Banff, AB, Canada."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"89","DOI":"10.1016\/S0924-4247(98)00259-3","article-title":"5X5 2D AFM cantilever arrays a first step towards a Terabit storage device","volume":"73","author":"Lutwyche","year":"1999","journal-title":"Sens. Actuators A"},{"key":"ref_22","doi-asserted-by":"crossref","unstructured":"Hecht, M.H., Marshall, J., Pike, W.T., Staufer, U., Blaney, D., Braendlin, D., Gautsch, S., Goetz, W., Hidber, H.R., and Keller, H.U. (2008). Microscopy capabilities of the microscopy, electrochemistry, and conductivity analyzer. J. Geophys. Res-Planet., 113.","DOI":"10.1029\/2008JE003077"},{"key":"ref_23","unstructured":"Ricci, A., Giuri, E., and Ricciardi, C. (2006, January 14). Simulation of Surface Stress Effect on Mechanical Behavior of Silicon Microcantilevers. Milano, Italy."},{"key":"ref_24","doi-asserted-by":"crossref","unstructured":"Sarid, D. (1994). Scanning Force Microscopy, Oxford University Press Inc.","DOI":"10.1093\/oso\/9780195092042.001.0001"},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"64","DOI":"10.1109\/T-ED.1982.20659","article-title":"A graphical representation of the piezoresistance coefficients in silicon","volume":"29","author":"Kanda","year":"1982","journal-title":"IEEE Trans. Electron. Dev."},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"20082019","DOI":"10.1063\/1.1728280","article-title":"Semiconducting stress transducers utilizing transverse and shear piezoresistance effects","volume":"32","author":"Pfann","year":"1961","journal-title":"J. Appl. Phys."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"226","DOI":"10.1109\/84.846703","article-title":"1\/F noise considerations for the design and process optimization of piezoresistive cantilevers","volume":"9","author":"Harley","year":"2000","journal-title":"J. Microelectromech. Syst."},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"6296","DOI":"10.1063\/1.1493660","article-title":"Optimization of sensitivity and noise in piezoresistive cantilevers","volume":"92","author":"Yu","year":"2002","journal-title":"J. Appl. Phys."},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"139","DOI":"10.1016\/0375-9601(69)90076-0","article-title":"1\/F Noise is no surface effect","volume":"29","author":"Hooge","year":"1969","journal-title":"Phys. Lett. A"},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"033508","DOI":"10.1063\/1.2825466","article-title":"Low 1\/f noise, full bridge, microcantilever with longitudinal and transverse piezoresistors","volume":"92","author":"Mallon","year":"2008","journal-title":"Appl. Phys. Lett."},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"691","DOI":"10.1038\/nnano.2008.275","article-title":"Nanomechanical detection of antibiotic mucopeptide binding in a model for superbug drug resistance","volume":"3","author":"Ndieyira","year":"2008","journal-title":"Nat. Nanotechnol."},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"173502","DOI":"10.1063\/1.3583451","article-title":"Mechanical analysis and optimization of a microcantilever sensor coated with a solid receptor film","volume":"98","author":"Yoshikawa","year":"2011","journal-title":"Appl. Phys. Lett."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/12\/11\/15873\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T21:53:37Z","timestamp":1760219617000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/12\/11\/15873"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2012,11,16]]},"references-count":32,"journal-issue":{"issue":"11","published-online":{"date-parts":[[2012,11]]}},"alternative-id":["s121115873"],"URL":"https:\/\/doi.org\/10.3390\/s121115873","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2012,11,16]]}}}