{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T04:36:05Z","timestamp":1760243765741,"version":"build-2065373602"},"reference-count":37,"publisher":"MDPI AG","issue":"12","license":[{"start":{"date-parts":[[2012,12,3]],"date-time":"2012-12-03T00:00:00Z","timestamp":1354492800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Recent progress in patterned microelectrode manufacturing technology and microfluidics has opened the way to a large variety of cellular and molecular biosensor-based applications. In this extremely diverse and rapidly expanding landscape, silicon-based technologies occupy a special position, given their statute of mature, consolidated, and highly accessible areas of development. Within the present work we report microfabrication procedures and workflows for 3D patterned gold-plated microelectrode arrays (MEA) of different shapes (pyramidal, conical and high aspect ratio), and we provide a detailed characterization of their physical features during all the fabrication steps to have in the end a reliable technology. Moreover, the electrical performances of MEA silicon chips mounted on standardized connector boards via ultrasound wire-bonding have been tested using non-destructive electrochemical methods: linear sweep and cyclic voltammetry, impedance spectroscopy. Further, an experimental recording chamber package suitable for in vitro electrophysiology experiments has been realized using custom-design electronics for electrical stimulus delivery and local field potential recording, included in a complete electrophysiology setup, and the experimental structures have been tested on newborn rat hippocampal slices, yielding similar performance compared to commercially available MEA equipments.<\/jats:p>","DOI":"10.3390\/s121216571","type":"journal-article","created":{"date-parts":[[2012,12,4]],"date-time":"2012-12-04T12:53:43Z","timestamp":1354625623000},"page":"16571-16590","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":8,"title":["Design, Fabrication and Characterization of a Low-Impedance 3D Electrode Array System for Neuro-Electrophysiology"],"prefix":"10.3390","volume":"12","author":[{"given":"Mihaela","family":"Kusko","sequence":"first","affiliation":[{"name":"Laboratory of Nanobiotechnology, National Institute for Research and Development in Microtechnologies (IMT-Bucharest), 126A, Erou Iancu Nicolae Street, 077190 Bucharest, Romania"}]},{"given":"Florea","family":"Craciunoiu","sequence":"additional","affiliation":[{"name":"Laboratory of Nanobiotechnology, National Institute for Research and Development in Microtechnologies (IMT-Bucharest), 126A, Erou Iancu Nicolae Street, 077190 Bucharest, Romania"}]},{"given":"Bogdan","family":"Amuzescu","sequence":"additional","affiliation":[{"name":"Department of Biophysics and Physiology, Faculty of Biology, University of Bucharest, Splaiul Independentei 91-95, 005095 Bucharest, Romania"}]},{"given":"Ferdinand","family":"Halitzchi","sequence":"additional","affiliation":[{"name":"Department of Biophysics and Physiology, Faculty of Biology, University of Bucharest, Splaiul Independentei 91-95, 005095 Bucharest, Romania"}]},{"given":"Tudor","family":"Selescu","sequence":"additional","affiliation":[{"name":"Department of Biophysics and Physiology, Faculty of Biology, University of Bucharest, Splaiul Independentei 91-95, 005095 Bucharest, Romania"}]},{"given":"Antonio","family":"Radoi","sequence":"additional","affiliation":[{"name":"Laboratory of Nanobiotechnology, National Institute for Research and Development in Microtechnologies (IMT-Bucharest), 126A, Erou Iancu Nicolae Street, 077190 Bucharest, Romania"}]},{"given":"Marian","family":"Popescu","sequence":"additional","affiliation":[{"name":"Laboratory of Nanobiotechnology, National Institute for Research and Development in Microtechnologies (IMT-Bucharest), 126A, Erou Iancu Nicolae Street, 077190 Bucharest, Romania"}]},{"given":"Monica","family":"Simion","sequence":"additional","affiliation":[{"name":"Laboratory of Nanobiotechnology, National Institute for Research and Development in Microtechnologies (IMT-Bucharest), 126A, Erou Iancu Nicolae Street, 077190 Bucharest, Romania"}]},{"given":"Adina","family":"Bragaru","sequence":"additional","affiliation":[{"name":"Laboratory of Nanobiotechnology, National Institute for Research and Development in Microtechnologies (IMT-Bucharest), 126A, Erou Iancu Nicolae Street, 077190 Bucharest, Romania"}]},{"given":"Teodora","family":"Ignat","sequence":"additional","affiliation":[{"name":"Laboratory of Nanobiotechnology, National Institute for Research and Development in Microtechnologies (IMT-Bucharest), 126A, Erou Iancu Nicolae Street, 077190 Bucharest, Romania"}]}],"member":"1968","published-online":{"date-parts":[[2012,12,3]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"45","DOI":"10.1016\/S0165-0270(98)00156-3","article-title":"The neurochip: A new multielectrode device for stimulating and recording from cultured neurons","volume":"87","author":"Maher","year":"1999","journal-title":"J. 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