{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,3]],"date-time":"2026-07-03T10:49:50Z","timestamp":1783075790260,"version":"3.54.6"},"reference-count":13,"publisher":"MDPI AG","issue":"2","license":[{"start":{"date-parts":[[2013,2,6]],"date-time":"2013-02-06T00:00:00Z","timestamp":1360108800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This paper presents a novel micro dynamically tuned gyroscope (MDTG) with adjustable static capacitance. First, the principle of MDTG is theoretically analyzed. Next, some simulations under the optimized structure parameters are given as a reference for the mask design of the rotor wafer and electrode plates. As two key components, the process flows of the rotor wafer and electrode plates are described in detail. All the scanning electron microscopy (SEM) photos show that the fabrication process is effective and optimized. Then, an assembly model is designed for the static capacitance adjustable MDTG, whose static capacitance can be changed by rotating the lower electrode plate support and substituting gasket rings of different thicknesses. Thus, the scale factor is easily changeable. Afterwards, the digitalized closed-loop measurement circuit is simulated. The discrete correction and decoupling modules are designed to make the closed-loop stable and cross-coupling effect small. The dual axis closed-loop system bandwidths can reach more than 60 Hz and the dual axis scale factors are completely symmetrical. All the simulation results demonstrate the proposed fabrication of the MDTG can meet the application requirements. Finally, the paper presents the test results of static and dynamic capacitance values which are consistent with the simulation values.<\/jats:p>","DOI":"10.3390\/s130202176","type":"journal-article","created":{"date-parts":[[2013,2,6]],"date-time":"2013-02-06T11:02:06Z","timestamp":1360148526000},"page":"2176-2195","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":19,"title":["A Micro Dynamically Tuned Gyroscope with Adjustable  Static Capacitance"],"prefix":"10.3390","volume":"13","author":[{"given":"Dunzhu","family":"Xia","sequence":"first","affiliation":[{"name":"Key Laboratory of Micro-inertial Instrument and Advanced Navigation Technology, Ministry of Education, Southeast University, Nanjing 210096, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Cheng","family":"Yu","sequence":"additional","affiliation":[{"name":"Key Laboratory of Micro-inertial Instrument and Advanced Navigation Technology, Ministry of Education, Southeast University, Nanjing 210096, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Lun","family":"Kong","sequence":"additional","affiliation":[{"name":"Key Laboratory of Micro-inertial Instrument and Advanced Navigation Technology, Ministry of Education, Southeast University, Nanjing 210096, China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2013,2,6]]},"reference":[{"key":"ref_1","unstructured":"Cai, T., Gan, M., and Yu, T. (2010, January 26\u201328). Application of Wavelet Threshold Method to DTG Signal Processing. Xuzhou, China."},{"key":"ref_2","doi-asserted-by":"crossref","unstructured":"Chen, W., Xie, Q., and Luo, Y. (2010, January 17\u201319). Application of Wavelet Transform in the Signal Processing of the Dynamical Tuned Gyroscope. Chengdu, China.","DOI":"10.1109\/ICCIS.2010.60"},{"key":"ref_3","unstructured":"Fan, C., Jin, Z., and Tian, W. (2003, January 14\u201317). A Hybrid Grey-based Model for Drift Signal of DTG. Nanjing, China."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"927","DOI":"10.1016\/j.measurement.2009.01.017","article-title":"A novel hybrid EMD-based drift denoising method for a dynamically tuned gyroscope (DTG)","volume":"42","author":"Qian","year":"2009","journal-title":"Measurement"},{"key":"ref_5","unstructured":"Zhang, L., Fan, D., Pang, X., and Fan, S. (2007, January 5\u20138). 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Harbin, China.","DOI":"10.1109\/ICINFA.2010.5512270"},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"222","DOI":"10.1016\/j.isatra.2009.11.003","article-title":"Compact H\u221e robust rebalance loop controller design for a micromachined electrostatically suspended gyroscope","volume":"49","author":"Ma","year":"2010","journal-title":"ISA Trans."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"1127","DOI":"10.1016\/S0967-0661(02)00079-5","article-title":"Digital rebalance loop design for a dynamically tuned gyroscope using H2 methodology","volume":"10","author":"Song","year":"2002","journal-title":"Control Eng. Pract."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"6434","DOI":"10.3390\/s120506434","article-title":"Temperature drift compensation for hemispherical resonator gyro based on natural frequency","volume":"12","author":"Wang","year":"2012","journal-title":"Sensors"},{"key":"ref_13","doi-asserted-by":"crossref","unstructured":"Zhang, L., Fan, D., Pang, X., and Fan, S. (2007, January 5\u20138). Bond Graph Modeling and Simulation of Dynamically Tuned Gyroscope. Harbin, China.","DOI":"10.1109\/ICMA.2007.4303662"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/13\/2\/2176\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T21:44:51Z","timestamp":1760219091000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/13\/2\/2176"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2013,2,6]]},"references-count":13,"journal-issue":{"issue":"2","published-online":{"date-parts":[[2013,2]]}},"alternative-id":["s130202176"],"URL":"https:\/\/doi.org\/10.3390\/s130202176","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2013,2,6]]}}}