{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T04:30:49Z","timestamp":1760243449305,"version":"build-2065373602"},"reference-count":16,"publisher":"MDPI AG","issue":"3","license":[{"start":{"date-parts":[[2013,3,15]],"date-time":"2013-03-15T00:00:00Z","timestamp":1363305600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>The study presents an ammonia microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.18 \u03bcm complementary metal oxide semiconductor (CMOS) process. The integrated sensor chip consists of a heater, an ammonia sensor and a readout circuit. The ammonia sensor is constructed by a sensitive film and the interdigitated electrodes. The sensitive film is zirconium dioxide that is coated on the interdigitated electrodes. The heater is used to provide a working temperature to the sensitive film. A post-process is employed to remove the sacrificial layer and to coat zirconium dioxide on the sensor. When the sensitive film adsorbs or desorbs ammonia gas, the sensor produces a change in resistance. The readout circuit converts the resistance variation of the sensor into the output voltage. The experiments show that the integrated ammonia sensor has a sensitivity of 4.1 mV\/ppm.<\/jats:p>","DOI":"10.3390\/s130303664","type":"journal-article","created":{"date-parts":[[2013,3,15]],"date-time":"2013-03-15T12:08:39Z","timestamp":1363349319000},"page":"3664-3674","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":2,"title":["A Zirconium Dioxide Ammonia Microsensor Integrated  with a Readout Circuit Manufactured Using the 0.18 \u03bcm  CMOS Process"],"prefix":"10.3390","volume":"13","author":[{"given":"Guan-Ming","family":"Lin","sequence":"first","affiliation":[{"name":"Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ching-Liang","family":"Dai","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ming-Zhi","family":"Yang","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2013,3,15]]},"reference":[{"doi-asserted-by":"crossref","unstructured":"Gardner, J.W., Varadan, V.K., and Awadelkarim, O.O. 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