{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,12]],"date-time":"2026-05-12T14:12:11Z","timestamp":1778595131411,"version":"3.51.4"},"reference-count":25,"publisher":"MDPI AG","issue":"8","license":[{"start":{"date-parts":[[2013,7,26]],"date-time":"2013-07-26T00:00:00Z","timestamp":1374796800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>A ~1 MHz piezoelectric micromachined ultrasonic transducer (pMUT) array with ultra-high element density and low crosstalk is proposed for the first time. This novel pMUT array is based on a nano-layer spin-coating lead zirconium titanium film technique and can be fabricated with high element density using a relatively simple process. Accordingly, key fabrication processes such as thick piezoelectric film deposition,  low-stress Si-SOI bonding and bulk silicon removal have been successfully developed. The novel fine-pitch 6 \u00d7 6 pMUT arrays can all work at the desired frequency (~1 MHz) with good uniformity, high performance and potential IC integration compatibility. The minimum interspace is ~20 \u03bcm, the smallest that has ever been achieved to the best of our knowledge. These arrays can be potentially used to steer ultrasound beams and implement high quality 3-D medical imaging applications.<\/jats:p>","DOI":"10.3390\/s130809624","type":"journal-article","created":{"date-parts":[[2013,7,26]],"date-time":"2013-07-26T22:13:15Z","timestamp":1374876795000},"page":"9624-9634","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":57,"title":["An Ultra-High Element Density pMUT Array with  Low Crosstalk for 3-D Medical Imaging"],"prefix":"10.3390","volume":"13","author":[{"given":"Yi","family":"Yang","sequence":"first","affiliation":[{"name":"Institute of Microelectronics, Tsinghua University, Beijing 100084, China"},{"name":"Tsinghua National Laboratory for Information Science and Technology (TNList),  Tsinghua University, Beijing 100084, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"He","family":"Tian","sequence":"additional","affiliation":[{"name":"Institute of Microelectronics, Tsinghua University, Beijing 100084, China"},{"name":"Tsinghua National Laboratory for Information Science and Technology (TNList),  Tsinghua University, Beijing 100084, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yu-Feng","family":"Wang","sequence":"additional","affiliation":[{"name":"Institute of Microelectronics, Tsinghua University, Beijing 100084, China"},{"name":"Tsinghua National Laboratory for Information Science and Technology (TNList),  Tsinghua University, Beijing 100084, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yi","family":"Shu","sequence":"additional","affiliation":[{"name":"Institute of Microelectronics, Tsinghua University, Beijing 100084, China"},{"name":"Tsinghua National Laboratory for Information Science and Technology (TNList),  Tsinghua University, Beijing 100084, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chang-Jian","family":"Zhou","sequence":"additional","affiliation":[{"name":"Institute of Microelectronics, Tsinghua University, Beijing 100084, China"},{"name":"Tsinghua National Laboratory for Information Science and Technology (TNList),  Tsinghua University, Beijing 100084, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Hui","family":"Sun","sequence":"additional","affiliation":[{"name":"Institute of Microelectronics, Tsinghua University, Beijing 100084, China"},{"name":"Tsinghua National Laboratory for Information Science and Technology (TNList),  Tsinghua University, Beijing 100084, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Cang-Hai","family":"Zhang","sequence":"additional","affiliation":[{"name":"Institute of Microelectronics, Tsinghua University, Beijing 100084, China"},{"name":"Tsinghua National Laboratory for Information Science and Technology (TNList),  Tsinghua University, Beijing 100084, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Hao","family":"Chen","sequence":"additional","affiliation":[{"name":"Institute of Microelectronics, Tsinghua University, Beijing 100084, China"},{"name":"Tsinghua National Laboratory for Information Science and Technology (TNList),  Tsinghua University, Beijing 100084, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Tian-Ling","family":"Ren","sequence":"additional","affiliation":[{"name":"Institute of Microelectronics, Tsinghua University, Beijing 100084, China"},{"name":"Tsinghua National Laboratory for Information Science and Technology (TNList),  Tsinghua University, Beijing 100084, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2013,7,26]]},"reference":[{"key":"ref_1","first-page":"426","article-title":"Difficulties of the X-ray computed tomographic diagnosis of pelvic tumor recurrence: Comparison with other medical imaging techniques (ultrasonography, immunoscintigraphy)","volume":"31","author":"Tournemaine","year":"1988","journal-title":"Ann. 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