{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,11,7]],"date-time":"2025-11-07T09:02:56Z","timestamp":1762506176013,"version":"build-2065373602"},"reference-count":15,"publisher":"MDPI AG","issue":"9","license":[{"start":{"date-parts":[[2013,9,17]],"date-time":"2013-09-17T00:00:00Z","timestamp":1379376000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>A novel multi-fork z-axis gyroscope is presented in this paper. Different from traditional quartz gyroscopes, the lateral electrodes of the sense beam can be arranged in simple patterns; as a result, the fabrication is simplified. High sensitivity is achieved by the multi-fork design. The working principles are introduced, while the finite element method (FEM) is used to simulate the modal and sensitivity. A quartz fork is fabricated, and a prototype is assembled. Impedance testing shows that the drive frequency and sense frequency are similar to the simulations, and the quality factor is approximately 10,000 in air. The scale factor is measured to be 18.134 mV\/(\u00b0\/s) and the nonlinearity is 0.40% in a full-scale input range of \u00b1250 \u00b0\/s.<\/jats:p>","DOI":"10.3390\/s130912482","type":"journal-article","created":{"date-parts":[[2013,9,17]],"date-time":"2013-09-17T12:31:17Z","timestamp":1379421077000},"page":"12482-12496","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":8,"title":["A Multi-Fork Z-Axis Quartz Micromachined Gyroscope"],"prefix":"10.3390","volume":"13","author":[{"given":"Lihui","family":"Feng","sequence":"first","affiliation":[{"name":"School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ke","family":"Zhao","sequence":"additional","affiliation":[{"name":"School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yunan","family":"Sun","sequence":"additional","affiliation":[{"name":"School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jianmin","family":"Cui","sequence":"additional","affiliation":[{"name":"School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Fang","family":"Cui","sequence":"additional","affiliation":[{"name":"School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Aiying","family":"Yang","sequence":"additional","affiliation":[{"name":"School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2013,9,17]]},"reference":[{"key":"ref_1","unstructured":"Madni, A.M., Wan, L.A., and Hammons, S. (1996, January 3\u201310). A Microelectromechanical Quartz Rotational Rate Sensor for Inertial Applications. Aspen, CO, USA."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"1895","DOI":"10.1109\/JSEN.2009.2026466","article-title":"Environmentally robust MEMS vibratory gyroscopes for automotive applications","volume":"9","author":"Acar","year":"2009","journal-title":"IEEE Sens. J."},{"key":"ref_3","first-page":"332","article-title":"Inertial sensor technology trends","volume":"18","author":"Barbour","year":"2011","journal-title":"IEEE Sens. J."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"569","DOI":"10.1109\/JSEN.2003.817728","article-title":"Common design techniques for BEI GyroChip quartz rate sensors for both automotive and aerospace\/defense markets","volume":"3","author":"Madni","year":"2003","journal-title":"IEEE Sens. J."},{"key":"ref_5","doi-asserted-by":"crossref","unstructured":"Madni, A.M., Costlow, L.E., and LaBoskey, J. 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Piezoelectric Gyroscope, Beijing National Defence Industry Press."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"82025","DOI":"10.1088\/0960-1317\/8\/1\/001","article-title":"Etch rates of crystallographic planes in Z-cut quartz\u2014Experiments and simulation","volume":"8","author":"Rangsten","year":"1998","journal-title":"J. Micromech. Microeng."},{"key":"ref_15","doi-asserted-by":"crossref","unstructured":"Feng, L.H., Zhang, Z.X., Sun, Y.N., and Cui, F. (2011, January 18\u201319). Differential Pickup Circuit Design of a Kind of Z-axis MEMS Quartz Gyroscope. 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