{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,1]],"date-time":"2026-03-01T00:56:34Z","timestamp":1772326594747,"version":"3.50.1"},"reference-count":31,"publisher":"MDPI AG","issue":"12","license":[{"start":{"date-parts":[[2013,12,4]],"date-time":"2013-12-04T00:00:00Z","timestamp":1386115200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>The design and characteristics of a micro-system for thermogravimetric analysis (TGA) in which heater, temperature sensor and mass sensor are integrated into a single device are presented. The system consists of a suspended cantilever that incorporates a microfabricated resistor, used as both heater and thermometer. A three-dimensional finite element analysis was used to define the structure parameters. TGA sensors were fabricated by standard microlithographic techniques and tested using milli-Q water and polyurethane microcapsule. The results demonstrated that our approach provides a faster and more sensitive TGA with respect to commercial systems.<\/jats:p>","DOI":"10.3390\/s131216657","type":"journal-article","created":{"date-parts":[[2013,12,4]],"date-time":"2013-12-04T12:02:38Z","timestamp":1386158558000},"page":"16657-16671","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":7,"title":["Heater-Integrated Cantilevers   for Nano-Samples Thermogravimetric Analysis"],"prefix":"10.3390","volume":"13","author":[{"given":"Valeria","family":"Toffoli","sequence":"first","affiliation":[{"name":"IOM-CNR Laboratorio TASC, SS 14 km 163, 5, Trieste 34012, Italy"},{"name":"DIA-Universit\u00e0 di Trieste, Via Valerio, Trieste 10-34127, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Sergio","family":"Carrato","sequence":"additional","affiliation":[{"name":"DIA-Universit\u00e0 di Trieste, Via Valerio, Trieste 10-34127, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Dongkyu","family":"Lee","sequence":"additional","affiliation":[{"name":"University of Alberta, 116 St and 85 Ave, Edmonton, Alberta T6G 2R3, Canada"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Sangmin","family":"Jeon","sequence":"additional","affiliation":[{"name":"Department of Chemical Engineering, Pohang University of Science and Technology,  Pohang 790-784, Korea"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Marco","family":"Lazzarino","sequence":"additional","affiliation":[{"name":"IOM-CNR Laboratorio TASC, SS 14 km 163, 5, Trieste 34012, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2013,12,4]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"63","DOI":"10.1016\/S0040-6031(03)00063-7","article-title":"Simultaneous characterizing study of the metallic iron-organic coordination compounds by TG\u2013DSC\u2013MS coupling techniques","volume":"404","author":"Lu","year":"2003","journal-title":"Thermochim. Acta"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"468","DOI":"10.1016\/j.ijpharm.2012.11.007","article-title":"Selection of PLA polymers for the development of injectable prilocaine controlled release microparticles: Usefulness of thermal analysis","volume":"441","author":"Bragagni","year":"2013","journal-title":"Int. J. Pharm."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"92","DOI":"10.1016\/j.jaap.2012.03.010","article-title":"Effect of different nanoparticles on thermal decomposition of poly(propylene sebacate)\/nanocomposites: Evaluation of mechanisms using TGA and TG\u2013FTIR\u2013GC\/MS","volume":"96","author":"Chrissafis","year":"2012","journal-title":"J. Anal. Appl. Pyrolysis"},{"key":"ref_4","unstructured":"Brown, M.E. (2002). Introduction to Thermal Analysis: Techniques and Applications. Hot Topics in Thermal Analysis and Calorimetry, Kluwer Academic Publishers. [2nd ed.]."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"181","DOI":"10.1016\/S0040-6031(98)00582-6","article-title":"Kinetic study of the thermal degradation of lake aquatic humic matter by thermogravimetric analysis","volume":"325","author":"Peuravuori","year":"1999","journal-title":"Thermochim. Acta"},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"154","DOI":"10.1016\/j.sna.2006.04.002","article-title":"System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection","volume":"132","author":"Villarroya","year":"2006","journal-title":"Sens. Actuators A: Phys."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"2697","DOI":"10.1063\/1.1569050","article-title":"Femtogram mass detection using photothermally actuated nanomechanical resonators","volume":"82","author":"Lavrik","year":"2003","journal-title":"Appl. Phys. Lett."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"2894","DOI":"10.1063\/1.111407","article-title":"Thermal and ambient-induced deflections of a scanning force microscope cantilever","volume":"64","author":"Thundat","year":"1994","journal-title":"Appl. Phys. Lett."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"173118","DOI":"10.1063\/1.2732200","article-title":"Asymmetric twin cantilever for single molecole detection","volume":"90","author":"Qazi","year":"2007","journal-title":"Appl. Phys. Lett."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"1046","DOI":"10.1016\/j.mee.2009.01.006","article-title":"Electron- and ion-beam lithography for the fabrication of nanomechanical devices integrated on CMOS circuits","volume":"86","author":"Rius","year":"2009","journal-title":"Microelectron. Eng."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"363","DOI":"10.1016\/S0009-2614(98)00817-3","article-title":"Micromechanical thermogravimetry","volume":"294","author":"Berger","year":"1998","journal-title":"Chem. Phys. Lett."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"1977","DOI":"10.1088\/0957-0233\/15\/10\/005","article-title":"Mass sensing with resonating ultra-thin silicon beams detected by a double-beam laser Doppler vibrometer","volume":"15","author":"Ono","year":"2004","journal-title":"Meas. Sci. Technol."},{"key":"ref_13","doi-asserted-by":"crossref","unstructured":"Lee, J., and King, W.P. (2007). Microcantilever actuation via periodic internal heating. Rev. Sci. Instrum., 78.","DOI":"10.1063\/1.2818805"},{"key":"ref_14","doi-asserted-by":"crossref","unstructured":"Iervolino, E., van Herwaarden, A.W., van der Vlist, W., and Sarro, P.M. (2010, January 24\u201328). Thermogravimetric Device with Integrated Thermal Actuators. Hong Kong.","DOI":"10.1109\/MEMSYS.2010.5442316"},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"1277","DOI":"10.1109\/JMEMS.2011.2167672","article-title":"MEMS for thermogravimetry: Fully integrated device for inspection of nanomasses","volume":"20","author":"Iervolino","year":"2010","journal-title":"J. Microelectromech. Syst."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"2635","DOI":"10.1016\/j.jeurceramsoc.2009.03.011","article-title":"Effect of temperature on the pre-creep mechanical properties of silicon nitride","volume":"29","author":"Miranda","year":"2009","journal-title":"J. Eur. Ceram. Soc."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"593","DOI":"10.1016\/j.jeurceramsoc.2012.10.005","article-title":"Thermal and corrosion properties of silicon nitride for copper die casting components","volume":"33","author":"Khader","year":"2013","journal-title":"J. Eur. Ceram. Soc."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"2348","DOI":"10.1016\/j.mee.2010.04.005","article-title":"Fabrication of micro heaters on polycrystalline 3C-SiC suspended membranes for gas sensors and their characteristics","volume":"87","author":"Chung","year":"2010","journal-title":"Microelectron. Eng."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"1578","DOI":"10.1016\/j.ijhydene.2010.10.100","article-title":"System simulation modeling and heat transfer in sodium alanate based hydrogen storage systems","volume":"36","author":"Raju","year":"2011","journal-title":"Int. J. Hydrog. Energy"},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"245","DOI":"10.1016\/j.ijheatmasstransfer.2013.04.029","article-title":"Lumped parameter model for charge\u2013discharge cycle of adsorptive hydrogen storage system","volume":"64","author":"Xiao","year":"2013","journal-title":"Int. J. Heat Mass Transf."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"1884","DOI":"10.1016\/S0921-4526(99)02941-5","article-title":"Heat capacity of small superconducting disks","volume":"284\u2013288","author":"Lindell","year":"2000","journal-title":"Phys. B: Condens. Matter"},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"2967","DOI":"10.1016\/S0266-3538(00)00162-7","article-title":"Thermal conductivity and thermal diffusivity analyses of low-density polyethylene composites reinforced with sisal, glass and intimately mixed sisal\/glass fibres","volume":"60","author":"Kalaprasad","year":"2000","journal-title":"Compos. Sci. Technol."},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"263","DOI":"10.1016\/S0955-2219(00)00210-7","article-title":"The temperature dependence of Young's modulus of MgSiN2, AlN and Si3N4","volume":"21","author":"Bruls","year":"2001","journal-title":"J. Eur. Ceram. Soc."},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"40","DOI":"10.1016\/S0925-8388(02)01065-4","article-title":"Thermal expansion of cubic Si3N4 with the spinel structure","volume":"351","author":"Hintzen","year":"2003","journal-title":"J. Alloys Compd."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"115011","DOI":"10.1088\/0960-1317\/19\/11\/115011","article-title":"A high-temperature MEMS heater using suspended silicon structures","volume":"19","author":"Lee","year":"2009","journal-title":"J. Micromech. Microeng."},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"152","DOI":"10.1016\/S0924-4247(00)00541-0","article-title":"MEMS flow sensors for nano-fluidic applications","volume":"89","author":"Wu","year":"2001","journal-title":"Sens. Actuators A: Phys."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"5815","DOI":"10.1021\/ac100913k","article-title":"Microthermogravimetry of a single microcapsule using silicon microresonators","volume":"82","author":"Lee","year":"2010","journal-title":"Anal. Chem."},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"645","DOI":"10.1002\/adma.200802008","article-title":"Self-Healing polymer coatings","volume":"21","author":"Cho","year":"2009","journal-title":"Adv. Mater."},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"137","DOI":"10.1016\/j.tca.2004.11.016","article-title":"Subtracting the water effect from DSC curves by using simultaneous TGA data","volume":"428","author":"Artiaga","year":"2005","journal-title":"Thermochim. Acta."},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"502","DOI":"10.1006\/jcis.2001.7727","article-title":"Preparation and characterization of microcapsules containing lemon oil","volume":"241","author":"Park","year":"2001","journal-title":"J. Colloid Interface Sci."},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"4390","DOI":"10.1007\/s10853-006-0606-6","article-title":"The permeability and stability of microencapsulated epoxy resins","volume":"42","author":"Yuan","year":"2007","journal-title":"J. Mater. Sci."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/13\/12\/16657\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T21:51:06Z","timestamp":1760219466000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/13\/12\/16657"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2013,12,4]]},"references-count":31,"journal-issue":{"issue":"12","published-online":{"date-parts":[[2013,12]]}},"alternative-id":["s131216657"],"URL":"https:\/\/doi.org\/10.3390\/s131216657","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2013,12,4]]}}}