{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,1,22]],"date-time":"2026-01-22T03:35:07Z","timestamp":1769052907757,"version":"3.49.0"},"reference-count":223,"publisher":"MDPI AG","issue":"1","license":[{"start":{"date-parts":[[2014,1,14]],"date-time":"2014-01-14T00:00:00Z","timestamp":1389657600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then,  different kinds of MEMS gyroscope structures, materials and fabrication technologies are  illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating  gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface acoustic wave  (SAW) gyroscopes, bulk acoustic wave (BAW) gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs), magnetically suspended gyroscopes (MSGs), micro fiber optic gyroscopes (MFOGs), micro fluid gyroscopes (MFGs), micro atom gyroscopes (MAGs), and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of  sigma delta, mode matching, temperature\/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail.<\/jats:p>","DOI":"10.3390\/s140101394","type":"journal-article","created":{"date-parts":[[2014,1,14]],"date-time":"2014-01-14T11:21:38Z","timestamp":1389698498000},"page":"1394-1473","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":192,"title":["The Development of Micromachined Gyroscope Structure and Circuitry Technology"],"prefix":"10.3390","volume":"14","author":[{"given":"Dunzhu","family":"Xia","sequence":"first","affiliation":[{"name":"Key Laboratory for Micro-inertial Instruments and Advanced Navigation Technology of the Education Ministry, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China"}]},{"given":"Cheng","family":"Yu","sequence":"additional","affiliation":[{"name":"Key Laboratory for Micro-inertial Instruments and Advanced Navigation Technology of the Education Ministry, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China"}]},{"given":"Lun","family":"Kong","sequence":"additional","affiliation":[{"name":"Key Laboratory for Micro-inertial Instruments and Advanced Navigation Technology of the Education Ministry, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China"}]}],"member":"1968","published-online":{"date-parts":[[2014,1,14]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"1640","DOI":"10.1109\/5.704269","article-title":"Micromachined inertial sensors","volume":"86","author":"Yazdi","year":"1998","journal-title":"Proc. IEEE"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"1860","DOI":"10.1109\/JSSC.2002.804345","article-title":"Single-chip surface micromachined integrated gyroscope with 50\u00b0\/h Allan Deviation","volume":"37","author":"Geen","year":"2002","journal-title":"IEEE J. Solid-State Circuits"},{"key":"ref_3","unstructured":"Lai, S., and Kiang, J. (2009, January 21\u201323). A CMOS-MEMS Single-Chip Dual-Axis Gyroscope. Taipei, Taiwan."},{"key":"ref_4","doi-asserted-by":"crossref","unstructured":"Boxenhorn, B., and Greiff, P. A (1988, January 15\u201317). A Vibratory Micromechanical Gyroscope. Minneapolis, Minnesota.","DOI":"10.2514\/6.1988-4177"},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1088\/0960-1317\/19\/11\/113001","article-title":"The development of micro-gyroscope technology","volume":"19","author":"Liu","year":"2009","journal-title":"J. Micromech. Microeng."},{"key":"ref_6","doi-asserted-by":"crossref","unstructured":"Armenise, M.N., Ciminelli, C., Dell'Olio, F., and Passaro, V.M.N. (2011). Advances in Gyroscope Technologies, Springer.","DOI":"10.1007\/978-3-642-15494-2"},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"622","DOI":"10.1109\/JSEN.2003.817901","article-title":"Fabrication, characterization, and analysis of a DRIE CMOS-MEMS gyroscope","volume":"3","author":"Xie","year":"2003","journal-title":"IEEE Sens. J."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"68","DOI":"10.1016\/j.sna.2009.10.019","article-title":"Design of micro-electromagnetic drive on reciprocally rotating disc used for micro-gyroscopes","volume":"157","author":"Tsai","year":"2010","journal-title":"Sens. Actuators A: Phys."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"1639","DOI":"10.1109\/JSEN.2007.908921","article-title":"Zero-rate output and quadrature compensation in vibratory MEMS gyroscopes","volume":"7","author":"Saukoski","year":"2007","journal-title":"IEEE Sens. J."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"585","DOI":"10.1016\/j.mejo.2010.05.004","article-title":"Electrothermally actuated resonant rate gyroscope fabricated using the MetalMUMPs","volume":"42","author":"Shakoor","year":"2011","journal-title":"Microelectron. J."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"475","DOI":"10.1103\/RevModPhys.39.475","article-title":"Sagnac effect","volume":"39","author":"POST","year":"1967","journal-title":"Rev. Mod. Phys."},{"key":"ref_12","doi-asserted-by":"crossref","unstructured":"Donley, E.A. (2010, January 1\u20134). Nuclear MagneticResonance Gyroscopes. Kona, HI, USA.","DOI":"10.1109\/ICSENS.2010.5690983"},{"key":"ref_13","doi-asserted-by":"crossref","unstructured":"Sharma, A., Zaman, F.M., Zucher, M., and Ayazi, F. (2008, January 13\u201317). 0.1\u00b0\/Hr Bias Drift Electronically Matched Tuning Fork Microgyroscope. Tucson, AZ, USA.","DOI":"10.1109\/MEMSYS.2008.4443579"},{"key":"ref_14","unstructured":"Shkel, A.M., Acar, C., and Painter, C. (December, January 30). Two Types of Micromachined Vibratory Gyroscopes. Irvine, CA, USA."},{"key":"ref_15","doi-asserted-by":"crossref","unstructured":"Xie, L., Xiao, D., Wang, H., Wu, X., and Li, S. (2009, January 5\u20138). Sensitivity Analysis and Structure Design for Tri-Mass Structure Micromachined Gyroscope. Shenzhen, China.","DOI":"10.1109\/NEMS.2009.5068541"},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"111","DOI":"10.1007\/s00542-004-0438-8","article-title":"A novel tuning fork gyroscope with high Q-factors working at atmospheric pressure","volume":"11","author":"Chen","year":"2005","journal-title":"Microsystem. Technol."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"52","DOI":"10.1016\/j.sna.2006.01.007","article-title":"Detection capacitance analysis method for tuning fork micromachined gyroscope based on elastic body model","volume":"128","author":"Jiang","year":"2006","journal-title":"Sens. Actuators A: Phys."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1088\/0960-1317\/20\/1\/015025","article-title":"A novel electrostatic-driven tuning fork micromachined gyroscope with a bar structure operating at atmospheric pressure","volume":"20","author":"Che","year":"2010","journal-title":"J. Micromech. Microeng."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1088\/0960-1317\/20\/2\/025007","article-title":"A lateral-axis micromachined tuning fork gyroscope with torsional Z-sensing and electrostatic force-balanced driving","volume":"20","author":"Guo","year":"2010","journal-title":"J. Micromech. Microeng."},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"26","DOI":"10.1109\/LED.2009.2035143","article-title":"Decoupled comb capacitors for microelectromechanical tuning-fork gyroscopes","volume":"31","author":"Guo","year":"2010","journal-title":"IEEE Electron Device Lett."},{"key":"ref_21","unstructured":"Sharma, A., Zaman, M., Amini, B., and Ayazi, F. (2004, January 24\u201327). A High-Q In-Plane SOI Tuning Fork Gyroscope. Vienna, Austria."},{"key":"ref_22","doi-asserted-by":"crossref","unstructured":"Zaman, M., Sharma, A., Amini, B., and Ayazi, F. (2004, January 6\u201310). Towards Inertial Grade Vibratory Microgyros: A High-Q in-Plane Silicon-on-Insulator Tuning Fork Device. Hilton Head Island, SC, USA.","DOI":"10.31438\/trf.hh2004.100"},{"key":"ref_23","unstructured":"Zaman, M., Sharma, A., and Ayazi, F. (2006, January 22\u201326). High Performance Matched-Mode Tuning Fork Gyroscope. Istanbul, Turkey."},{"key":"ref_24","unstructured":"Hao, Z., Zaman, M., Sharma, A., and Ayazi, F. (2006, January 22\u201325). Energy Loss Mechanisms in a Bulk-Micromachined Tuning Fork Gyroscope. Daegu, Krea."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"1593","DOI":"10.1109\/JSSC.2009.2016996","article-title":"A sub-0.2\u00b0\/hr bias drift micromechanical silicon gyroscope with automatic CMOS mode-matching","volume":"44","author":"Sharma","year":"2009","journal-title":"IEEE J. Solid-State Circuits"},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1088\/0960-1317\/23\/2\/025013","article-title":"Development of a 3D capacitive gyroscope with reduced parasitic capacitance","volume":"23","author":"Walther","year":"2013","journal-title":"J. Micromech. Microeng."},{"key":"ref_27","doi-asserted-by":"crossref","unstructured":"Traechtler, M., Link, T., Dehnert, J., Nommensen, P., and Manoli, Y. (2007, January 28\u201331). Novel 3-Axis Gyroscope on A Single Chip Using SOI-Technology. Atlanta, GA, USA.","DOI":"10.1109\/ICSENS.2007.4388351"},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"1246","DOI":"10.1109\/JSEN.2011.2163626","article-title":"A z-axis quartz tuning fork micromachined gyroscope based on shear stress detection","volume":"12","author":"Wu","year":"2012","journal-title":"IEEE Sens. J."},{"key":"ref_29","doi-asserted-by":"crossref","unstructured":"Zhou, J., Jiang, T., Jiao, J.W., and Wu, M. (2013). Design and fabrication of a micromachined gyroscope with high shock resistance. Microsyst. Technol., in press.","DOI":"10.1007\/s00542-013-1833-9"},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"218","DOI":"10.1016\/j.sna.2008.10.015","article-title":"A doubly decoupled lateral axis micromachined gyroscope","volume":"154","author":"Liu","year":"2009","journal-title":"Sens. Actuators A: Phys."},{"key":"ref_31","doi-asserted-by":"crossref","unstructured":"Cui, J., Liu, Q., Zhao, Q., Lin, L.T., Chi, X.Z., Yang, Z.C., and Yan, G.Z. (2009, January 21\u201325). An Investigation of Decoupling Performance for a Novel Lateral Axis Gyroscope with Varying Environmental Parameters. Denver, CO, USA.","DOI":"10.1109\/SENSOR.2009.5285507"},{"key":"ref_32","unstructured":"Braxmaier, M., GaiBer, A., and Link, T. (2003, January 8\u201312). Cross-Coupling of the Oscillation Modes of Vibratory Gyroscopes. Boston, MA, USA."},{"key":"ref_33","doi-asserted-by":"crossref","first-page":"1092","DOI":"10.1088\/0960-1317\/15\/5\/028","article-title":"Structurally decoupled micromachined gyroscopes with post-release capacitance enhancement","volume":"15","author":"Acar","year":"2005","journal-title":"J. Micromech. Microeng."},{"key":"ref_34","doi-asserted-by":"crossref","first-page":"347","DOI":"10.1016\/S0924-4247(01)00860-3","article-title":"A symmetric surface micromachined gyroscope with decoupled oscillation modes","volume":"97\u201398","author":"Alper","year":"2002","journal-title":"Sens. Actuators A: Phys."},{"key":"ref_35","doi-asserted-by":"crossref","first-page":"336","DOI":"10.1016\/j.sna.2004.04.041","article-title":"Symmetrical and decoupled nickel microgyroscope on insulating substrate","volume":"115","author":"Alper","year":"2004","journal-title":"Sens. Actuators A: Phys."},{"key":"ref_36","doi-asserted-by":"crossref","first-page":"707","DOI":"10.1109\/JMEMS.2005.845400","article-title":"A single-crystal silicon symmetrical and decoupled MEMS gyroscope on an insulating substrate","volume":"14","author":"Alper","year":"2005","journal-title":"J. Microelectromechanical Syst."},{"key":"ref_37","unstructured":"Alper, S.E., Azgin, K., and Akin, T. (2006, January 22\u201326). High-performance SOI-MEMS Gyroscope with Decoupled Oscillation Modes. Istanbul, Turkey."},{"key":"ref_38","doi-asserted-by":"crossref","first-page":"34","DOI":"10.1016\/j.sna.2006.06.043","article-title":"A high-performance silicon-on-insulator MEMS gyroscope operating at atmospheric pressure","volume":"135","author":"Alper","year":"2007","journal-title":"Sens. Actuators A: Phys."},{"key":"ref_39","doi-asserted-by":"crossref","first-page":"1418","DOI":"10.1109\/JMEMS.2008.2007274","article-title":"A compact angular rate sensor system using a fully decoupled silicon-on-glass MEMS gyroscope","volume":"17","author":"Alper","year":"2008","journal-title":"J. Microelectromechanical Syst."},{"key":"ref_40","doi-asserted-by":"crossref","first-page":"3706","DOI":"10.3390\/s8063706","article-title":"Dynamic characteristics of vertically coupled structures and the design of a decoupled micro gyroscope","volume":"8","author":"Choi","year":"2008","journal-title":"Sensors"},{"key":"ref_41","doi-asserted-by":"crossref","first-page":"8","DOI":"10.1088\/0960-1317\/13\/1\/302","article-title":"Robust design of a vibratory gyroscope with an unbalanced inner torsion gimbal using axiomatic design","volume":"13","author":"Hwang","year":"2003","journal-title":"J. Micromech. Microeng."},{"key":"ref_42","doi-asserted-by":"crossref","first-page":"4921","DOI":"10.1109\/TIE.2011.2177612","article-title":"A MEMS doubly decoupled gyroscope with wide driving frequency range","volume":"59","author":"Tsai","year":"2012","journal-title":"IEEE Trans. Ind. Electron."},{"key":"ref_43","doi-asserted-by":"crossref","first-page":"206","DOI":"10.1109\/JMEMS.2011.2170816","article-title":"Decoupled surface micromachined gyroscope with single-point suspension","volume":"21","author":"Kulygin","year":"2012","journal-title":"J. Microelectromechanical Syst."},{"key":"ref_44","unstructured":"Greiff, P., Boxenhom, B., and Niles, L. (1991, January 24\u201327). Silicon Monolithic Micromechanical Gyroscope. San Francisco, CA, USA."},{"key":"ref_45","unstructured":"Niu, M., Xue, W., Wang, X., Xie, J.F., Yang, G.Q., and Wang, W.Y. (1997, January 6\u201319). Design and Characteristics of Two-Gimbals Micro-Gyroscopes Fabricated with Quasi-LIGA Process. Chicago, IL, USA."},{"key":"ref_46","doi-asserted-by":"crossref","first-page":"45","DOI":"10.1016\/S0924-4247(98)00253-2","article-title":"A new silicon rate gyroscope","volume":"73","author":"Geiger","year":"1999","journal-title":"Sens. Actuators A: Phys."},{"key":"ref_47","unstructured":"Che, L., Xiong, B., and Wang, Y. (2002, January 12\u201314). Simulation of Characteristic of Comb-gimbal Micromachined Gyroscope. Orlando, FL, USA."},{"key":"ref_48","unstructured":"Maenaka, K., Saws, N., Ioku, S., Sugimoto, H., Suzuki, H., Fujita, T., and Takayama, Y. (2003, January 8\u201312). MEMS Gyroscope with Double Gimbal Structure. Boston, MA, USA."},{"key":"ref_49","unstructured":"Ayazi, F., and Najafi, K. (1998, January 25\u201329). Design and Fabrication of A High-Performance Polysilicon Vibrating Ring Gyroscope. Heidelberg, Germany."},{"key":"ref_50","doi-asserted-by":"crossref","first-page":"169","DOI":"10.1109\/84.925732","article-title":"A HARPSS polysilicon vibrating ring gyroscope","volume":"10","author":"Ayazi","year":"2001","journal-title":"J. Microelectromechanical Syst."},{"key":"ref_51","unstructured":"He, G., and Najafi, K. (2002, January 20\u201324). A Single-Crystal Silicon Vibrating Ring Gyroscope. Las Vegas, NV, USA."},{"key":"ref_52","unstructured":"Wang, J., Chen, L., Zhang, M., and Chen, D. (2010, January 20\u201323). A Micromachined Vibrating Ring Gyroscope with Highly Symmetric Structure for Harsh Environment. Xiamen, China."},{"key":"ref_53","doi-asserted-by":"crossref","first-page":"1234","DOI":"10.1049\/mnl.2012.0550","article-title":"Regulating parameters of electromagnetic micromachined vibrating ring gyroscope by feedback control","volume":"7","author":"Liu","year":"2012","journal-title":"Micro Nano Lett."},{"key":"ref_54","unstructured":"Chen, D., Zhang, M., and Wang, J. (2010, January 1\u20134). An Electrostatically Actuated Micromachined Vibrating Ring Gyroscope with Highly Symmetric Support Beams. Kona, HI, USA."},{"key":"ref_55","unstructured":"Zaman, F.M., Sharma, A., Amini, V.B., and Ayazi, F. (February, January 30). The Resonating Star Gyroscope. Miami, FL, USA."},{"key":"ref_56","doi-asserted-by":"crossref","first-page":"221","DOI":"10.1109\/JMEMS.2004.839325","article-title":"Electrostatic Correction of Structural Imperfections Present in a Microring Gyroscope","volume":"14","author":"Gallacher","year":"2005","journal-title":"J. Microelectromechanical Syst."},{"key":"ref_57","doi-asserted-by":"crossref","first-page":"249","DOI":"10.1016\/j.sna.2011.02.018","article-title":"A parametrically amplified MEMS rate gyroscope","volume":"167","author":"Hu","year":"2011","journal-title":"Sens. Actuators A: Phys."},{"key":"ref_58","unstructured":"Acar, C., and Shkel, A.M. (2001, January 19\u201321). A Design Approach for Robustness Improvement of Rate Gyroscopes. Hilton Head Island, CA, USA."},{"key":"ref_59","doi-asserted-by":"crossref","first-page":"380","DOI":"10.1109\/JMEMS.2006.872224","article-title":"Inherently robust micromachined gyroscopes with 2-DoF sense-mode oscillator","volume":"15","author":"Acar","year":"2006","journal-title":"J. Microelectromechanical Syst."},{"key":"ref_60","doi-asserted-by":"crossref","first-page":"35","DOI":"10.1016\/j.sna.2010.04.015","article-title":"Micromachined gyroscope concept allowing interchangeable operation in both robust and precision modes","volume":"165","author":"Trusovs","year":"2011","journal-title":"Sens. Actuators A: Phys."},{"key":"ref_61","doi-asserted-by":"crossref","unstructured":"Trusovs, A.A., Schofield, A.R., and Shkel, A.M. (2008, January 1\u20135). New Architectural Design of a Temperature Robust MEMS Gyroscope with Improved Gain-Bandwidth Characteristics. Hilton Head Island, SC, USA.","DOI":"10.31438\/trf.hh2008.4"},{"key":"ref_62","doi-asserted-by":"crossref","first-page":"16","DOI":"10.1016\/j.sna.2008.11.003","article-title":"Performance characterization of a new temperature-robust gain-bandwidth improved MEMS gyroscope operated in air","volume":"155","author":"Trusovs","year":"2009","journal-title":"Sens. Actuators A: Phys."},{"key":"ref_63","doi-asserted-by":"crossref","first-page":"26","DOI":"10.1016\/j.sna.2010.01.007","article-title":"Micromachined rate gyroscope architecture with ultra-high quality factor and improved mode ordering","volume":"165","author":"Trusovs","year":"2011","journal-title":"Sens. Actuators A: Phys."},{"key":"ref_64","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1088\/0960-1317\/19\/7\/074004","article-title":"A wide-bandwidth and high-sensitivity robust microgyroscope","volume":"19","author":"Sahin","year":"2009","journal-title":"J. Micromech. Microeng."},{"key":"ref_65","doi-asserted-by":"crossref","unstructured":"Schofield, R.A., Trusovs, A.A., and Shkel, A.M. (2007, January 10\u201314). Anti-Phase Driven Rate Gyroscope with Multi-Degree of Freedom Sense Mode. Lyon, Frace.","DOI":"10.1109\/SENSOR.2007.4300351"},{"key":"ref_66","doi-asserted-by":"crossref","first-page":"2460","DOI":"10.1109\/JSEN.2012.2192497","article-title":"Design of micromachined vibratory gyroscope with two degree-of-freedom drive-mode and sense-mode","volume":"12","author":"Wang","year":"2012","journal-title":"IEEE Sens. J"},{"key":"ref_67","doi-asserted-by":"crossref","first-page":"523","DOI":"10.1016\/j.sna.2011.09.032","article-title":"Design, damping estimation and experimental characterization of decoupled 3-DoF robust MEMS gyroscope","volume":"172","author":"Riaz","year":"2011","journal-title":"Sens. Actuators A: Phys."},{"key":"ref_68","unstructured":"Juneau, T., Pisam, A.P., and Smith, J.H. (1997, January 16\u201319). Dual Axis Operation of a Micromachined Rate Gyroscope. Chicago, IL, USA."},{"key":"ref_69","doi-asserted-by":"crossref","unstructured":"Sung, K.W., Dalal, M., and Ayazi, F. (2011, January 5\u20139). A Mode-Matched 0.9 MHZ Single Proof-Mass Dual-Axis Gyroscope. Beijing, China.","DOI":"10.1109\/TRANSDUCERS.2011.5969229"},{"key":"ref_70","doi-asserted-by":"crossref","first-page":"33","DOI":"10.1016\/j.sna.2005.09.004","article-title":"Design and simulation of a dual-axis sensing decoupled vibratory wheel gyroscope","volume":"126","author":"Tsai","year":"2006","journal-title":"Sens. Actuators A: Phys."},{"key":"ref_71","doi-asserted-by":"crossref","unstructured":"Chiu, S., Sue, C., Lin, C., Lin, S., Lin, S., Hsu, Y., and Su, Y. (2012, January 28\u201331). Design, Fabrication and Performance Characterizations of an Integrated Dual-Axis Tuning Fork Gyroscope. Taipei, Taiwan.","DOI":"10.1109\/ICSENS.2012.6411139"},{"key":"ref_72","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1088\/0960-1317\/18\/11\/115014","article-title":"Fabrication and analysis of a micro-machined tri-axis gyroscope","volume":"18","author":"Tsai","year":"2008","journal-title":"J. Micromech. Microeng."},{"key":"ref_73","doi-asserted-by":"crossref","first-page":"1933","DOI":"10.1109\/JSEN.2008.2006450","article-title":"Design and analysis of a tri-axis gyroscope micromachined by surface fabrication","volume":"8","author":"Tsai","year":"2008","journal-title":"IEEE Sens. J."},{"key":"ref_74","doi-asserted-by":"crossref","first-page":"231","DOI":"10.1016\/j.sna.2010.01.005","article-title":"Experimental analysis and characterization of electrostatic-drive tri-axis micro-gyroscope","volume":"158","author":"Tsai","year":"2010","journal-title":"Sens. Actuators A: Phys."},{"key":"ref_75","unstructured":"Shkel, A.M. (2006, January 25\u201327). Type I and Type II Micromachined Vibratory Gyroscopes. San Diego, CA, USA."},{"key":"ref_76","doi-asserted-by":"crossref","first-page":"8478","DOI":"10.3390\/s100908478","article-title":"Adaptive control of a vibratory angle measuring gyroscope","volume":"10","author":"Park","year":"2010","journal-title":"Sensors"},{"key":"ref_77","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1088\/0957-0233\/22\/5\/055201","article-title":"Single-stage vibratory gyroscope control methods for direct angle measurements","volume":"22","author":"Chi","year":"2011","journal-title":"Meas. Sci. Technol."},{"key":"ref_78","doi-asserted-by":"crossref","first-page":"185","DOI":"10.1109\/TCST.2004.839568","article-title":"The development of a MEMS gyroscope for absolute angle measurement","volume":"13","author":"Piyabongkarn","year":"2005","journal-title":"IEEE Transactions on Control Systems Technology"},{"key":"ref_79","doi-asserted-by":"crossref","unstructured":"Shao, P., Sorenson, L.D., Gao, X., and Ayazi, F. (2012, January 3\u20137). Wineglass-On-a-Chip. Hilton Head Island, CA, USA.","DOI":"10.31438\/trf.hh2012.74"},{"key":"ref_80","doi-asserted-by":"crossref","unstructured":"Cho, J., Yan, J., Gregory, J.A., Eberhart, H., Peterson, R.L., and Najafi, K. (2013, January 20\u201324). High-Q Fused Silica Birdbath and Hemispherical 3-D Resonators made by Blow Torch Molding. Taipei, Taiwan, China.","DOI":"10.1109\/MEMSYS.2013.6474206"},{"key":"ref_81","doi-asserted-by":"crossref","unstructured":"Maenaka, K., Kohara, H., and Nishimura, M. (2006, January 22\u201326). Novel Solid Micro-Gyroscope. Istanbul, Turkey.","DOI":"10.1109\/MEMSYS.2006.1627879"},{"key":"ref_82","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1088\/0960-1317\/19\/12\/125008","article-title":"Vibration analysis of a piezoelectric micromachined modal gyroscope(PMMG)","volume":"19","author":"Wu","year":"2009","journal-title":"J. Micromech. Microeng."},{"key":"ref_83","doi-asserted-by":"crossref","first-page":"571","DOI":"10.1007\/s00542-009-0963-6","article-title":"Optimization and analysis of novel piezoelectric solid micro-gyroscope with high resistance to shock","volume":"16","author":"Lu","year":"2010","journal-title":"Microsyst. Technol."},{"key":"ref_84","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1088\/0960-1317\/20\/7\/075039","article-title":"Research on reference vibration for a two-axis piezoelectric micro-machined gyroscope","volume":"20","author":"Lu","year":"2010","journal-title":"J. Micromech. Microeng."},{"key":"ref_85","doi-asserted-by":"crossref","first-page":"1442","DOI":"10.1016\/j.proeng.2010.09.387","article-title":"GaAs 3-axis Coriolis vibrating micro rate gyro: Concept and preliminary characterization","volume":"5","author":"Roland","year":"2010","journal-title":"Procedia Eng."},{"key":"ref_86","doi-asserted-by":"crossref","first-page":"204","DOI":"10.1016\/j.sna.2011.07.006","article-title":"GaAs-based tuning fork microresonators: A first step towards a GaAs-based Coriolis 3-axis micro-vibrating rate gyro (GaAs 3-axis \u03bcCVG)","volume":"172","author":"Roland","year":"2011","journal-title":"Sens. Actuators A: Phys."},{"key":"ref_87","doi-asserted-by":"crossref","unstructured":"Oh, H., Lee, K., and Yang, S. (2009, January 21\u201325). The Development of Novel Surface Acoustic Wave MEMS-IDT Gyroscope Based on Standing Wave Mode. Denver, CO, USA.","DOI":"10.1117\/12.809991"},{"key":"ref_88","doi-asserted-by":"crossref","unstructured":"Oh, H., Lee, K., and Yang, S. (2011, January 23\u201327). Development of Passive Surface Acoustic Wave Gyroscope with Standing Wave Mode. Cancun, Mexico.","DOI":"10.1109\/MEMSYS.2011.5734487"},{"key":"ref_89","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1088\/0960-1317\/22\/4\/045007","article-title":"A novel shock and heat tolerant gyrosensor utilizing a one-port surface acoustic wave reflective delay line","volume":"22","author":"Oh","year":"2012","journal-title":"J. Micromech. Microeng."},{"key":"ref_90","doi-asserted-by":"crossref","unstructured":"Wang, W., He, S., Li, S., and Liu, M. (2010, January 11\u201314). Design of A New Wireless SAW Gyroscope Based on Standing Wave Mode. San Diego, CA, USA.","DOI":"10.1109\/ULTSYM.2010.5935692"},{"key":"ref_91","doi-asserted-by":"crossref","first-page":"259","DOI":"10.1016\/j.mee.2012.02.022","article-title":"Development of novel dual-axis sensing gyroscope using surface acoustic wave","volume":"97","author":"Oh","year":"2012","journal-title":"Microelectron. Eng."},{"key":"ref_92","unstructured":"Liu, Q.H., Wu, X.Z., Di, D., Dong, P.T., and Fan, D.P. (2009, January 5\u20138). Design of A Novel MEMS IDT Dual Axes Surface Acoustic Wave Gyroscope. Shenzhen, China."},{"key":"ref_93","doi-asserted-by":"crossref","first-page":"8","DOI":"10.1016\/j.sna.2010.02.013","article-title":"Development of SAW based gyroscope with high shock and thermal stability","volume":"165","author":"Oh","year":"2011","journal-title":"Sens. Actuators A: Phys."},{"key":"ref_94","doi-asserted-by":"crossref","unstructured":"Johari, H., and Ayazi, F. (2006, January 11\u201313). Capacitive Bulk Acoustic Wave Silicon Disk Gyroscopes. San Francisco, CA, USA.","DOI":"10.1109\/IEDM.2006.346827"},{"key":"ref_95","unstructured":"Johari, H., and Ayazi, F. (2007, January 21\u201325). High-Frequency Capacitive Disk Gyroscope in (100) and (111) Silicon. Kobe, Japan."},{"key":"ref_96","doi-asserted-by":"crossref","unstructured":"Shah, J., Johari, H., Sharma, A., and Ayazi, F. (2008, January 18\u201321). CMOS ASIC for MHz Silicon BAW Gyroscope. Seattle, WA, USA.","DOI":"10.1109\/ISCAS.2008.4541953"},{"key":"ref_97","doi-asserted-by":"crossref","unstructured":"Sung, W., Dalal, M., and Ayazi, F. (2010, January 24\u201328). A 3MHZ Spoke Gyroscope with Wide Bandwidth and Large Dynamic Range. Wanchai, Hong Kong.","DOI":"10.1109\/MEMSYS.2010.5442554"},{"key":"ref_98","doi-asserted-by":"crossref","first-page":"1007","DOI":"10.1109\/JMEMS.2013.2273031","article-title":"High-frequency AlN-on-silicon resonant square gyroscopes","volume":"22","author":"Tabrizian","year":"2013","journal-title":"J. Microelectromechanical Syst."},{"key":"ref_99","doi-asserted-by":"crossref","unstructured":"Nitzan, S., Ahn, C.H., Su, T.H., Li, M., Ng, E.J., Wang, S., Yang, Z.M., O'Brien, G., Boser, B.E., Kenny, T.W., and Horsley, D.A. (2013, January 20\u201324). Epitaxially-Encapsulated Polysilicon Disk Resonator Gyroscope. Taipei, Taiwan, China.","DOI":"10.1109\/MEMSYS.2013.6474319"},{"key":"ref_100","doi-asserted-by":"crossref","first-page":"2468","DOI":"10.1143\/JJAP.42.2468","article-title":"Electrostatically levitated ring-shaped rotational-gyro\/accelerometer","volume":"42","author":"Murakoshi","year":"2003","journal-title":"Jpn. J. Appl. Phys."},{"key":"ref_101","unstructured":"Damrongsak, B., and Kraft, M. (November, January 31). A Micromachined Electrostatically Suspended Gyroscope with Digital Force Feedback. Irvine, CA, USA."},{"key":"ref_102","doi-asserted-by":"crossref","unstructured":"Damrongsak, B., and Kraft, M. (2006, January 26\u201329). Design and Simulation of a Micromachined Electrostatically Suspended Gyroscope. Shanghai, China.","DOI":"10.1049\/ic:20060468"},{"key":"ref_103","doi-asserted-by":"crossref","first-page":"423","DOI":"10.1088\/0960-1317\/11\/4\/324","article-title":"Modelling and design of an electrostatically levitated disc for inertial sensing applications","volume":"11","author":"Kraft","year":"2001","journal-title":"J. Micromech. Microeng."},{"key":"ref_104","doi-asserted-by":"crossref","unstructured":"Xiao, Q.J., Chen, W.Y., Li, S.Y., and Zhang, W.P. (2009, January 5\u20138). Simulation of Levitation Control for A Micromachined Electrostatically Levitated Gyroscope. Shenzhen, China.","DOI":"10.1109\/NEMS.2009.5068549"},{"key":"ref_105","doi-asserted-by":"crossref","first-page":"357","DOI":"10.1007\/s00542-009-0927-x","article-title":"Modeling and simulation of levitation control for a micromachined electrostatically suspended gyroscope","volume":"16","author":"Xiao","year":"2010","journal-title":"Microsyst. Technol."},{"key":"ref_106","doi-asserted-by":"crossref","first-page":"818","DOI":"10.1049\/el.2009.0874","article-title":"Fuzzy tuning PI control for initial levitation of micromachined electrostatically levitated gyroscope","volume":"45","author":"Xiao","year":"2009","journal-title":"Electron. Lett."},{"key":"ref_107","doi-asserted-by":"crossref","first-page":"222","DOI":"10.1016\/j.isatra.2009.11.003","article-title":"Compact H\u221e robust rebalance loop controller design for a micromachined electrostatically suspended gyroscope","volume":"49","author":"Ma","year":"2010","journal-title":"ISA Trans."},{"key":"ref_108","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1088\/0960-1317\/22\/10\/105032","article-title":"Micromachined electrostatically suspended gyroscope with a spinning ring-shaped rotor","volume":"22","author":"Han","year":"2012","journal-title":"J. Micromech. Microeng."},{"key":"ref_109","doi-asserted-by":"crossref","first-page":"469","DOI":"10.1016\/S0924-4247(97)80307-X","article-title":"Modelling and testing of a frictionless levitated micromotor","volume":"67","author":"Williams","year":"1997","journal-title":"Sens. Actuators"},{"key":"ref_110","doi-asserted-by":"crossref","first-page":"85","DOI":"10.1016\/S0924-4247(00)00292-2","article-title":"Development of a levitated micromotor for application as a gyroscope","volume":"83","author":"Shearwood","year":"2000","journal-title":"Sens. Actuators"},{"key":"ref_111","doi-asserted-by":"crossref","first-page":"651","DOI":"10.1016\/j.sna.2006.03.002","article-title":"The study of an electromagnetic levitating micromotor for application in a rotating gyroscope","volume":"132","author":"Zhang","year":"2006","journal-title":"Sens. Actuators"},{"key":"ref_112","doi-asserted-by":"crossref","first-page":"681","DOI":"10.1049\/el:20080528","article-title":"Variable-capacitance micromotor with levitated diamagnetic rotor","volume":"44","author":"Liu","year":"2008","journal-title":"Electron. Lett."},{"key":"ref_113","doi-asserted-by":"crossref","first-page":"431","DOI":"10.1007\/s00542-009-0935-x","article-title":"An innovative micro-diamagnetic levitation system with coils applied in micro-gyroscope","volume":"16","author":"Liu","year":"2010","journal-title":"Microsyst. Technol."},{"key":"ref_114","doi-asserted-by":"crossref","unstructured":"Xue, G., Zhang, X.T., and Zhang, H.W. (2009, January 25\u201327). Electromagnetic Design of a Magnetically Suspended Gyroscope Prototype. Chengdu, China.","DOI":"10.1109\/ASEMD.2009.5306616"},{"key":"ref_115","doi-asserted-by":"crossref","first-page":"493","DOI":"10.1007\/s00542-008-0769-y","article-title":"Magnetic actuator design for single-axis micro-gyroscopes","volume":"15","author":"Tsai","year":"2009","journal-title":"Microsyst. Technol."},{"key":"ref_116","doi-asserted-by":"crossref","first-page":"1476","DOI":"10.1109\/50.956135","article-title":"Modeling and design of a novel miniaturized integrated optical sensor for gyroscope systems","volume":"19","author":"Armenise","year":"2001","journal-title":"J. Light. Technol."},{"key":"ref_117","doi-asserted-by":"crossref","first-page":"041101:1","DOI":"10.1063\/1.1853532","article-title":"Frequency beating between monolithically integrated semiconductor ring lasers","volume":"86","author":"Cao","year":"2005","journal-title":"Appl. Phys. Lett."},{"key":"ref_118","doi-asserted-by":"crossref","first-page":"2266","DOI":"10.1109\/LPT.2004.834518","article-title":"Laterally coupled buried heterostructure high-Q ring resonators","volume":"16","author":"Choi","year":"2004","journal-title":"IEEE Photonics Technol. Lett."},{"key":"ref_119","doi-asserted-by":"crossref","first-page":"1","DOI":"10.2971\/jeos.2009.09015","article-title":"Three-dimensional modelling of scattering loss in InGaAsP\/InP and silica-on-silicon bent waveguides","volume":"4","author":"Ciminelli","year":"2009","journal-title":"J. Eur. Opt. Soc."},{"key":"ref_120","first-page":"1","article-title":"Theoretical investigation of indium phosphide buried ring resonators for new angular velocity sensors","volume":"52","author":"Ciminelli","year":"2013","journal-title":"Opt. Eng."},{"key":"ref_121","doi-asserted-by":"crossref","first-page":"2609","DOI":"10.1109\/JSEN.2012.2198640","article-title":"Micro-optical gyroscope using a PANDA ring resonator","volume":"12","author":"Sirawattananon","year":"2012","journal-title":"IEEE Sens. J."},{"key":"ref_122","doi-asserted-by":"crossref","first-page":"2705","DOI":"10.1109\/JSEN.2013.2259591","article-title":"Four point probe micro-optical gyroscope with self calibration control","volume":"13","author":"Mitatha","year":"2013","journal-title":"IEEE Sens. J."},{"key":"ref_123","doi-asserted-by":"crossref","first-page":"657","DOI":"10.1038\/nature01849","article-title":"Low-loss hollow-core silica\/air photonic bandgap fibre","volume":"424","author":"Smith","year":"2003","journal-title":"Nature"},{"key":"ref_124","doi-asserted-by":"crossref","first-page":"3169","DOI":"10.1109\/JLT.2006.880689","article-title":"Air-core photonic-bandgap fiber-optic gyroscope","volume":"24","author":"Kim","year":"2006","journal-title":"J. Light. Technol."},{"key":"ref_125","doi-asserted-by":"crossref","first-page":"861","DOI":"10.1109\/JLT.2006.889658","article-title":"Reduced thermal sensitivity of a fiber-optic gyroscope using an air-core photonic-bandgap fiber","volume":"25","author":"Blin","year":"2007","journal-title":"J. Light. Technol."},{"key":"ref_126","doi-asserted-by":"crossref","first-page":"2079","DOI":"10.1109\/JLT.2013.2261285","article-title":"Experimental observation of low noise and low drift in a laser-driven fiber optic gyroscope","volume":"31","author":"Lloyd","year":"2013","journal-title":"J. Light. Technol."},{"key":"ref_127","doi-asserted-by":"crossref","first-page":"85","DOI":"10.1109\/JLT.2010.2092751","article-title":"Reduction of backscattering induced noise by carrier suppression in waveguide-type optical ring resonator gyro","volume":"29","author":"Ma","year":"2011","journal-title":"J. Light. Technol."},{"key":"ref_128","doi-asserted-by":"crossref","first-page":"198","DOI":"10.1109\/LPT.2012.2233727","article-title":"Low-noise low-delay digital signal processor for resonant micro optic gyro","volume":"25","author":"Ma","year":"2013","journal-title":"IEEE Photonics Technol. Lett."},{"key":"ref_129","doi-asserted-by":"crossref","first-page":"307","DOI":"10.1364\/AO.52.000307","article-title":"Current modulation technique used in resonator micro-optic gyro","volume":"52","author":"Lei","year":"2013","journal-title":"Appl. Opt."},{"key":"ref_130","doi-asserted-by":"crossref","first-page":"1749","DOI":"10.1109\/JSEN.2011.2157679","article-title":"Atomic sensors\u2014A review","volume":"11","author":"Kitching","year":"2011","journal-title":"IEEE Sens. J."},{"key":"ref_131","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1103\/PhysRevLett.95.230801","article-title":"Nuclear spin gyroscope based on an atomic comagnetometer","volume":"95","author":"Kornack","year":"2005","journal-title":"Phys. Rev. Lett."},{"key":"ref_132","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1103\/PhysRevA.86.062104","article-title":"Stable three-axis nuclear-spin gyroscope in diamond","volume":"86","author":"Ajoy","year":"2012","journal-title":"Phys. Rev."},{"key":"ref_133","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1088\/0953-4075\/43\/11\/115302","article-title":"Atom gyroscope with disordered arrays of quantum rings","volume":"43","author":"Dayon","year":"2010","journal-title":"J. Phys. B: At. Mol. Opt. Phys."},{"key":"ref_134","doi-asserted-by":"crossref","unstructured":"Yokota, S., Suzuki, M., Takemura, K., Edamura, K., Kumagai, H., and Imamura, T. (2008, January 19\u201323). Concept of a Liquid Rate Gyroscope using an Electro-conjugate Fluid. Pasadena, CA, USA.","DOI":"10.1109\/IROS.2008.4651249"},{"key":"ref_135","doi-asserted-by":"crossref","first-page":"173","DOI":"10.1016\/j.sna.2008.12.004","article-title":"A liquid rate gyroscope using electro-conjugate fluid","volume":"149","author":"Takemura","year":"2009","journal-title":"Sens. Actuators A: Phys."},{"key":"ref_136","unstructured":"Shiozawa, T., van Dau, T., Dao, D.V., Kumagai, H., and Sugiyama, S. (November, January 31). A Dual Axis Thermal Convective Silicon Gyroscope. Nagoya, Japan."},{"key":"ref_137","doi-asserted-by":"crossref","first-page":"61","DOI":"10.1016\/j.sna.2012.10.001","article-title":"Design and simulation of MEMS-based dual-axis fluidic angular velocity sensor","volume":"189","author":"Dinh","year":"2013","journal-title":"Sens. Actuators A: Phys."},{"key":"ref_138","doi-asserted-by":"crossref","unstructured":"Ai, Y., Luo, X.B., and Liu, S. (2006, January 26\u201329). Design of A Novel Micro Thermo-Fluidic Gyroscope. Shanghai, China.","DOI":"10.1109\/ICEPT.2006.359811"},{"key":"ref_139","doi-asserted-by":"crossref","first-page":"413","DOI":"10.1016\/j.sna.2013.09.017","article-title":"MEMS Thermal gyroscope with self-compensation of the linear acceleration effect","volume":"203","author":"Feng","year":"2013","journal-title":"Sens. Actuators A: Phys."},{"key":"ref_140","doi-asserted-by":"crossref","unstructured":"Bahari, J., Feng, R., and Leung, A.M. (2013). Robust MEMS gyroscope based on thermal principles. J. Microelectromechanical Syst., In Press.","DOI":"10.1109\/JMEMS.2013.2262584"},{"key":"ref_141","doi-asserted-by":"crossref","first-page":"1100","DOI":"10.1109\/JMEMS.2013.2271862","article-title":"Theoretical modeling for a six-DOF vortex inertial sensor and experimental verification","volume":"22","author":"Chang","year":"2013","journal-title":"J. Microelectromechanical Syst."},{"key":"ref_142","doi-asserted-by":"crossref","first-page":"24845","DOI":"10.1021\/jp308974j","article-title":"Theoretical investigation of the structures and dynamics of crystalline molecular gyroscopes","volume":"116","author":"Marahatta","year":"2012","journal-title":"J. Phys. Chem. C"},{"key":"ref_143","doi-asserted-by":"crossref","first-page":"137","DOI":"10.1016\/S0924-4247(03)00296-6","article-title":"A novel bulk micromachined gyroscope with slots structure working at atmosphere","volume":"107","author":"Xiong","year":"2003","journal-title":"Sens. Actuators"},{"key":"ref_144","doi-asserted-by":"crossref","first-page":"909","DOI":"10.1109\/JMEMS.2013.2250485","article-title":"A slot-structure MEMS gyroscope working at atmosphere with tunable electrostatic spring constant","volume":"22","author":"Hu","year":"2013","journal-title":"J. Microelectromechanical Syst."},{"key":"ref_145","doi-asserted-by":"crossref","first-page":"146","DOI":"10.1016\/j.jsv.2006.09.026","article-title":"Dynamic modeling and performance evaluation of a vibrating beam microgyroscope under general support motion","volume":"301","author":"Esmaeili","year":"2007","journal-title":"J. Sound Vib."},{"key":"ref_146","doi-asserted-by":"crossref","first-page":"4970","DOI":"10.1016\/j.jsv.2010.06.009","article-title":"Modeling and performance study of a beam microgyroscope","volume":"329","author":"Ghommem","year":"2010","journal-title":"J. Sound Vib."},{"key":"ref_147","first-page":"319","article-title":"Analysis of high shocking resistance of an improved node-plane supporting vibration beam gyroscope","volume":"16","author":"Liu","year":"2012","journal-title":"Int. J. Digit. Content Technol. Appl."},{"key":"ref_148","doi-asserted-by":"crossref","first-page":"691","DOI":"10.1109\/JMEMS.2011.2127453","article-title":"Microscale glass-blown three-dimensional spherical shell resonators","volume":"3","author":"Prikhodko","year":"2011","journal-title":"J. Microelectromechanical Syst."},{"key":"ref_149","doi-asserted-by":"crossref","first-page":"509","DOI":"10.1109\/JMEMS.2012.2189364","article-title":"Three-dimensional spherical shell resonator gyroscope fabricated using wafer-scale glassblowing","volume":"3","author":"Zotov","year":"2012","journal-title":"J. Microelectromechanical Syst."},{"key":"ref_150","doi-asserted-by":"crossref","unstructured":"Yang, B., Wang, S., Li, K., Zhu, X., and Cao, H. (2010, January 20\u201323). Research on a New Microelectromechanical Hybrid Gyroscope. Harbin, China.","DOI":"10.1109\/ICINFA.2010.5512270"},{"key":"ref_151","doi-asserted-by":"crossref","first-page":"2176","DOI":"10.3390\/s130202176","article-title":"A micro dynamically tuned gyroscope with adjustable static capacitance","volume":"13","author":"Xia","year":"2013","journal-title":"Sensors"},{"key":"ref_152","doi-asserted-by":"crossref","unstructured":"Yang, Z., Nakajima, M., Shen, Y., and Fukuda, T. (2012, January 4\u20137). Nano-gyroscope device using field emission of isolated carbon nanotube. Nagoya, Japan.","DOI":"10.1109\/MHS.2012.6492418"},{"key":"ref_153","doi-asserted-by":"crossref","first-page":"398","DOI":"10.1109\/JMEMS.2011.2178116","article-title":"High-range angular rate sensor based on mechanical frequency modulation","volume":"21","author":"Zotov","year":"2012","journal-title":"J. Microelectromechanical Syst."},{"key":"ref_154","doi-asserted-by":"crossref","unstructured":"Zotov, S.A., Prikhodko, I.P., Trusov, A.A., and Shkel, A.M. (2011, January 23\u201327). Frequency Modulation Based Angular Rate Sensor. Cancun, Mexico.","DOI":"10.1109\/MEMSYS.2011.5734490"},{"key":"ref_155","doi-asserted-by":"crossref","first-page":"543","DOI":"10.1007\/s00542-009-0998-8","article-title":"Structure design and fabrication of a novel dual-mass resonant output micromechanical gyroscope","volume":"16","author":"Li","year":"2010","journal-title":"Microsyst. Technol."},{"key":"ref_156","doi-asserted-by":"crossref","first-page":"465","DOI":"10.1007\/s10470-009-9395-6","article-title":"An analog drive loop for a capacitive MEMS gyroscope","volume":"63","author":"Aaltonen","year":"2010","journal-title":"Analog. Integr. Circuit Signal"},{"key":"ref_157","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1088\/0960-1317\/18\/5\/055028","article-title":"Development of a lateral velocity-controlled MEMS vibratory gyroscope and its performance test","volume":"18","author":"Sung","year":"2008","journal-title":"J. Micromech. Microeng."},{"key":"ref_158","first-page":"1","article-title":"Transient response and stability of the AGC-PI closed-loop controlled MEMS vibratory gyroscopes","volume":"12","author":"Cui","year":"2009","journal-title":"J. Micromech. Microeng."},{"key":"ref_159","doi-asserted-by":"crossref","first-page":"4586","DOI":"10.3390\/s90604586","article-title":"Development of a prototype miniature silicon microgyroscope","volume":"9","author":"Xia","year":"2009","journal-title":"Sensors"},{"key":"ref_160","doi-asserted-by":"crossref","first-page":"57","DOI":"10.1088\/1742-6596\/34\/1\/010","article-title":"A precision closed-loop driving scheme of silicon micromachined vibratory gyroscope","volume":"34","author":"Yang","year":"2006","journal-title":"J. Phys. Conf. Series"},{"key":"ref_161","doi-asserted-by":"crossref","first-page":"3357","DOI":"10.3390\/s90503357","article-title":"Mechanical-thermal noise in drive-mode of a silicon micro-gyroscope","volume":"9","author":"Yang","year":"2009","journal-title":"Sensors"},{"key":"ref_162","doi-asserted-by":"crossref","unstructured":"Mo, B., Liu, X.W., Ding, X.W., and Tan, X.Y. (2007, January 5\u20138). A Novel Closed-Loop Drive Circuit for the Micromechined Gyroscope. Harbin, China.","DOI":"10.1109\/ICMA.2007.4304106"},{"key":"ref_163","doi-asserted-by":"crossref","first-page":"1309","DOI":"10.1016\/j.proeng.2011.12.323","article-title":"An optimized analog drive-mode controller for vibratory MEMS gyroscopes","volume":"25","author":"Eminoglu","year":"2011","journal-title":"Procedia Eng."},{"key":"ref_164","unstructured":"Fang, R., Lu, W.G., Tao, T.T., Wang, G.N., Chen, Z.J., Zhang, Y.C., and Yu, D.S. (November, January 29). A Control and Readout Circuit with Capacitive Mismatch Auto-Compensation for MEMS Vibratory Gyroscope. Xi'an, China."},{"key":"ref_165","doi-asserted-by":"crossref","first-page":"999","DOI":"10.1016\/j.proeng.2011.08.185","article-title":"Differential pickup circuit design of a kind of Z-axis MEMS quartz gyroscope","volume":"15","author":"Feng","year":"2011","journal-title":"Procedia Eng."},{"key":"ref_166","doi-asserted-by":"crossref","first-page":"417","DOI":"10.1006\/jsvi.2001.4163","article-title":"The influence of control system design on the performance of vibratory gyroscopes","volume":"255","author":"Loveday","year":"2002","journal-title":"J. Sound Vib."},{"key":"ref_167","doi-asserted-by":"crossref","first-page":"1382","DOI":"10.1109\/JMEMS.2011.2167663","article-title":"Force rebalance controller synthesis for a micromachined vibratory gyroscope based on sensitivity margin specifications","volume":"20","author":"Cui","year":"2011","journal-title":"J. Microelectromechanical Syst."},{"key":"ref_168","doi-asserted-by":"crossref","first-page":"364","DOI":"10.1109\/TMECH.2005.852437","article-title":"Control of a Z-axis MEMS vibrational gyroscope","volume":"10","author":"Oboe","year":"2005","journal-title":"IEEE-ASME Trans. Mechatron."},{"key":"ref_169","doi-asserted-by":"crossref","unstructured":"Wu, H.M., Yang, H.G., Yin, T., and Zhang, H. (2011, January 6\u20137). Stability Analysis of MEMS Gyroscope Drive Loop Based on CPPLL. Macao, China.","DOI":"10.1109\/PrimeAsia.2011.6075067"},{"key":"ref_170","doi-asserted-by":"crossref","first-page":"5952","DOI":"10.3390\/s90805952","article-title":"Oscillation control algorithms for resonant sensors with applications to vibratory gyroscopes","volume":"8","author":"Park","year":"2009","journal-title":"Sensors"},{"key":"ref_171","unstructured":"Niu, S.H., Gao, S.Q., and Liu, H.P. (2009, January 16\u201319). A Digital Control System for Micro-Comb Gyroscope. Beijing, China."},{"key":"ref_172","doi-asserted-by":"crossref","first-page":"533","DOI":"10.1016\/S1007-0214(06)70230-9","article-title":"Scale factor determination of micro-machined angular rate sensors without a turntable","volume":"11","author":"Alexander","year":"2006","journal-title":"Tsinghua Sci. Technol."},{"key":"ref_173","first-page":"557","article-title":"New digital readout electronics for capacitive sensors by the example of micromachined gyroscopes","volume":"97\u201398","author":"Gaiber","year":"2002","journal-title":"Sens. Actuators"},{"key":"ref_174","unstructured":"Trusov, A.A., Chepurko, I., Schofield, A.R., and Shkel, A.M. (2007, January 28\u201331). A Standalone Programmable Signal. Atlanta, Georgia, USA."},{"key":"ref_175","doi-asserted-by":"crossref","first-page":"286","DOI":"10.1109\/TCST.2004.839558","article-title":"A control and signal processing integrated circuit for the JPL-boeing micromachined gyroscopes","volume":"13","author":"Chen","year":"2005","journal-title":"IEEE Trans. Control Syst. Techn."},{"key":"ref_176","unstructured":"Keymeulen, D., Ferguson, M.I., Breuer, L., Peay, C., Oks, B., Kim, D., MacDonald, E., Foor, D., Terrile, R., and Yee, K. (2006, January 4\u201311). Tuning of MEMS Gyroscope Using Evolutionary Algorithm and \u201cSwitched Drive-Angle\u201d Method. Big Sky, MT, USA."},{"key":"ref_177","unstructured":"Liu, D.C., Lu, N.N., Cui, J., Lin, L.T., Ding, H.T., Yang, Z.C., Hao, Y.L., and Yan, G.Z. (2010, January 1\u20134). Digital Closed-Loop Control Based on Adaptive Filter for Drive Mode of A MEMS Gyroscope. Limerick, Ireland."},{"key":"ref_178","doi-asserted-by":"crossref","first-page":"13150","DOI":"10.3390\/s121013150","article-title":"A digitalized silicon microgyroscope based on embedded FPGA","volume":"12","author":"Xia","year":"2012","journal-title":"Sensors"},{"key":"ref_179","doi-asserted-by":"crossref","first-page":"328","DOI":"10.1016\/j.yofte.2009.02.004","article-title":"CORDIC algorithm based digital detection technique applied in resonator fiber","volume":"15","author":"Yang","year":"2009","journal-title":"Opt. Fiber Technol."},{"key":"ref_180","unstructured":"Fu, Q., Chen, S., Liu, L., Wang, P.F., Chen, W.P., and Liu, X.W. (2012, January 4\u20137). A High Bandwidth Sigma-Delta Modulator Applied in Micro-Gyroscope. Hangzhou, China."},{"key":"ref_181","doi-asserted-by":"crossref","first-page":"297","DOI":"10.1109\/JSEN.2008.2012237","article-title":"A closed-loop digitally controlled MEMS gyroscope with unconstrained sigma-delta force-feedback","volume":"9","author":"Raman","year":"2009","journal-title":"IEEE Sens. J."},{"key":"ref_182","unstructured":"Raman, J., Cretu, E., Rombouts, P., and Weyten, L. (2006, January 22\u201326). A Digitally Controlled MEMS Gyroscope with Unconstrained Sigma-Delta Force-Feedback Architecture. Istanbul, Turkey."},{"key":"ref_183","doi-asserted-by":"crossref","first-page":"1601","DOI":"10.1109\/TCSI.2008.917998","article-title":"An Unconstrained architecture for systematic design of higher order \u03a3\u0394 force-feedback loops","volume":"55","author":"Raman","year":"2008","journal-title":"IEEE Trans. Circuit Syst."},{"key":"ref_184","doi-asserted-by":"crossref","unstructured":"Saukoski, M., Aaltonen, L., and Halonen, K. (2006, January 19\u201321). Integrated Readout and Control Electronics for a Microelectromechanical Angular Velocity Sensor. Montreux, Switzerland.","DOI":"10.1109\/IMTC.2006.328223"},{"key":"ref_185","doi-asserted-by":"crossref","first-page":"183","DOI":"10.1016\/j.sna.2008.03.023","article-title":"Interface and control electronics for a bulk micromachined capacitive gyroscope","volume":"147","author":"Saukoski","year":"2008","journal-title":"Sens. Actuators A: Phys."},{"key":"ref_186","doi-asserted-by":"crossref","first-page":"388","DOI":"10.1016\/j.sna.2010.05.034","article-title":"A Digital interface for gyroscopes controlling the primary and secondary mode using bandpass sigma-delta modulation","volume":"162","author":"Northemann","year":"2010","journal-title":"Sens. Actuators A"},{"key":"ref_187","doi-asserted-by":"crossref","first-page":"1183","DOI":"10.1016\/j.proche.2009.07.295","article-title":"Excess loop delay compensated electro-mechanical bandpass sigma-delta modulator for gyroscopes","volume":"1","author":"Northemann","year":"2009","journal-title":"Procedia Chem."},{"key":"ref_188","doi-asserted-by":"crossref","first-page":"9217","DOI":"10.3390\/s111009217","article-title":"Genetic algorithm for the design of electro-mechanical sigma delta modulator MEMS sensors","volume":"11","author":"Wilcock","year":"2011","journal-title":"Sensors"},{"key":"ref_189","doi-asserted-by":"crossref","first-page":"299","DOI":"10.1016\/j.sna.2007.10.057","article-title":"Microgyroscope control system using a high-order band-pass continuous-time sigma-delta modulator","volume":"145\u2013146","author":"Donga","year":"2008","journal-title":"Sens. Actuators"},{"key":"ref_190","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1088\/0960-1317\/22\/10\/105006","article-title":"Parameter optimization for a high-order band-pass continuous-time sigma-delta modulator MEMS gyroscope using a genetic algorithm approach","volume":"22","author":"Chen","year":"2012","journal-title":"J. Micromech. Microeng."},{"key":"ref_191","doi-asserted-by":"crossref","first-page":"446","DOI":"10.1109\/TMECH.2009.2023985","article-title":"On the mode-matched control of MEMS vibratory gyroscope via phase-domain analysis and design","volume":"14","author":"Sung","year":"2009","journal-title":"IEEE-ASME Trans. Mechatron."},{"key":"ref_192","unstructured":"Sung, W.T., Lee, J.Y., Lee, J.G., and Kang, T. (2006, January 22\u201326). Design and Fabrication of An Automatic Mode Controlled Vibratory Gyroscope. Istanbul, Turkey."},{"key":"ref_193","doi-asserted-by":"crossref","first-page":"3880","DOI":"10.1109\/TIE.2009.2020707","article-title":"Automatic mode matching in MEMS vibrating gyroscopes using extremum-seeking control","volume":"56","author":"Antonello","year":"2009","journal-title":"IEEE Trans. Ind. Electron."},{"key":"ref_194","unstructured":"Shchedov, K., Evans, C., Gutierrez, R., and Tang, T.K. (2000, January 18\u201325). Temperature Dependent Characteristics of the JPL Silicon MEMS Gyroscope. Big Sky, MT, USA."},{"key":"ref_195","doi-asserted-by":"crossref","first-page":"479","DOI":"10.1109\/JMEMS.2006.876779","article-title":"Error sources in in-plane silicon tuning-fork MEMS gyroscopes","volume":"15","author":"Weinberg","year":"2006","journal-title":"J. Microelectromechanical Syst."},{"key":"ref_196","doi-asserted-by":"crossref","first-page":"1409","DOI":"10.1109\/JMEMS.2009.2030074","article-title":"Temperature-insensitive composite micromechanical resonators","volume":"18","author":"Melamud","year":"2009","journal-title":"J. Microelectromechanical Syst."},{"key":"ref_197","doi-asserted-by":"crossref","first-page":"755","DOI":"10.1109\/JMEMS.2008.924253","article-title":"Temperature dependence of quality factor in MEMS resonators","volume":"17","author":"Kim","year":"2008","journal-title":"J. Microelectromechanical Syst."},{"key":"ref_198","unstructured":"Hsu, W.T., Clark, J.R., and Nguyen, C.T.C. (2000, January 10\u201313). Mechanically Temperature-Compensated Flexural-Mode Micromechanical Resonators. San Francisco, CA, USA."},{"key":"ref_199","doi-asserted-by":"crossref","unstructured":"Lee, S.H., Cho, J., Lee, S.W., Zaman, M.F., Ayazi, F., and Najafi, K. (2009, January 25\u201329). A Low-Power Oven-Controlled Vacuum Package Technology for High-Performance MEMS. Sorrento, Italy.","DOI":"10.1109\/MEMSYS.2009.4805492"},{"key":"ref_200","doi-asserted-by":"crossref","first-page":"1995","DOI":"10.1109\/20.951032","article-title":"Novel methods of temperature compensation for permanent magnet sensors and actuators","volume":"37","author":"Rajagopal","year":"2001","journal-title":"IEEE Trans. Magn."},{"key":"ref_201","doi-asserted-by":"crossref","unstructured":"Zhang, Q.T., Tan, Z.F., and Guo, L.D. (2009, January 19\u201320). Compensation of Temperature Drift of MEMS Gyroscope Using BP Neural Network. Wuhan, China.","DOI":"10.1109\/ICIECS.2009.5365140"},{"key":"ref_202","doi-asserted-by":"crossref","first-page":"8349","DOI":"10.3390\/s91008349","article-title":"Microgyroscope temperature effects and compensation-control methods","volume":"9","author":"Xia","year":"2009","journal-title":"Sensors"},{"key":"ref_203","unstructured":"Liu, D.C., Chi, X.Z., Cui, J., Lin, L.T., Zhao, Q.C., Yang, Z.C., and Yan, G.Z. (December, January 30). Research on Temperature Dependent Characteristics and Compensation Methods for Digital Gyroscope. Tainan, Taiwan."},{"key":"ref_204","doi-asserted-by":"crossref","first-page":"6434","DOI":"10.3390\/s120506434","article-title":"Temperature drift compensation for hemispherical resonator gyro based on natural frequency","volume":"12","author":"Wang","year":"2012","journal-title":"Sensors"},{"key":"ref_205","doi-asserted-by":"crossref","first-page":"517","DOI":"10.1016\/j.sna.2012.12.024","article-title":"Compensation of drifts in high-Q MEMS gyroscopes using temperature self-sensing","volume":"201","author":"Prikhodko","year":"2013","journal-title":"Sens. Actuators"},{"key":"ref_206","first-page":"1","article-title":"Online self-compensation for enhanced the scale factor stability of a micromachined gyroscope","volume":"188","author":"Zhou","year":"2009","journal-title":"J. Phys."},{"key":"ref_207","doi-asserted-by":"crossref","unstructured":"Niu, S.H., and Gao, S.Q. (2010, January 13\u201314). Analysis of Nonlinearities in Force-to-Voltage Conversion in Vibratory Microgyroscope. Changsha, China.","DOI":"10.1109\/ICMTMA.2010.59"},{"key":"ref_208","doi-asserted-by":"crossref","first-page":"1144","DOI":"10.1109\/JSEN.2006.881432","article-title":"Modal coupling in micromechanical vibratory rate gyroscopes","volume":"6","author":"Phani","year":"2006","journal-title":"IEEE Sens. J."},{"key":"ref_209","first-page":"157","article-title":"Identification of anisoelasticity for electrostatic \u201ctrimming\u201d of rate integrating gyroscopes","volume":"4700","author":"Painter","year":"2002","journal-title":"Smart Struct. Mater."},{"key":"ref_210","doi-asserted-by":"crossref","unstructured":"Antonello, R., Oboe, R., Prandi, L., Caminada, C., and Biganzoli, F. (2009, January 3\u20136). Open Loop Compensation of the Quadrature Error in MEMS Vibrating Gyroscopes. Porto, Portugal.","DOI":"10.1109\/IECON.2009.5415319"},{"key":"ref_211","doi-asserted-by":"crossref","first-page":"656","DOI":"10.1109\/JMEMS.2012.2189356","article-title":"Quadrature-error compensation and corresponding effects on the performance of fully decoupled MEMS gyroscopes","volume":"21","author":"Tatar","year":"2012","journal-title":"J. Microelectromech. Syst."},{"key":"ref_212","doi-asserted-by":"crossref","first-page":"1589","DOI":"10.1016\/j.proeng.2011.12.393","article-title":"Quadrature compensation for gyroscopes in electromechanical bandpass \u03a3\u0394-modulators beyond full-scale limits using pattern recognition","volume":"25","author":"Maurer","year":"2011","journal-title":"Procedia Eng."},{"key":"ref_213","doi-asserted-by":"crossref","first-page":"1651","DOI":"10.3390\/s130201651","article-title":"Design of a novel MEMS gyroscope array","volume":"13","author":"Wang","year":"2013","journal-title":"Sensors"},{"key":"ref_214","doi-asserted-by":"crossref","first-page":"1720","DOI":"10.3390\/s120201720","article-title":"Signal processing of MEMS gyroscope arrays to improve accuracy using a 1st order markov for rate signal modeling","volume":"12","author":"Jiang","year":"2012","journal-title":"Sensors"},{"key":"ref_215","unstructured":"Casinovi, G., Sung, W.K., Dalal, M., Shirazi, A.N., and Ayazi, F. (February, January 29). Electrostatic self-calibration of vibratory gyroscopes. Paris, France."},{"key":"ref_216","doi-asserted-by":"crossref","unstructured":"Li, J., Broas, M., Makkonen, J., Mattila, T.T., Hokka, J., and Paulasto-Krockel, M. (2013). Shock impact reliability and failure analysis of a three-axis MEMS gyroscope. J. Microelectromechanical Syst., In Press.","DOI":"10.1109\/JMEMS.2013.2273802"},{"key":"ref_217","doi-asserted-by":"crossref","first-page":"143","DOI":"10.1016\/S0924-4247(99)00241-1","article-title":"Compensation of nonlinear thermal bias drift of resonant rate sensor using fuzzy logic","volume":"78","author":"Hong","year":"1999","journal-title":"Sens. Actuators"},{"key":"ref_218","doi-asserted-by":"crossref","first-page":"2591","DOI":"10.1109\/TIE.2010.2070772","article-title":"A characterization of the performance of a MEMS gyroscope in acoustically harsh environments","volume":"58","author":"Dean","year":"2011","journal-title":"IEEE Trans. Ind. Electr."},{"key":"ref_219","unstructured":"Yole Development (2012, January 20). The growth of the MEMS Market. Day Italy, Milano, Italy."},{"key":"ref_220","unstructured":"MEMS and Sensors. Available online: http:\/\/www.st.com."},{"key":"ref_221","unstructured":"InvenSense Product Overview. Available online: http:\/\/www.invensense.com."},{"key":"ref_222","unstructured":"Analog Devices. Available online: http:\/\/www.analog.com."},{"key":"ref_223","unstructured":"Silicon Sensing. Available online: http:\/\/www.siliconsensing.com."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/14\/1\/1394\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T21:07:21Z","timestamp":1760216841000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/14\/1\/1394"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2014,1,14]]},"references-count":223,"journal-issue":{"issue":"1","published-online":{"date-parts":[[2014,1]]}},"alternative-id":["s140101394"],"URL":"https:\/\/doi.org\/10.3390\/s140101394","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2014,1,14]]}}}