{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T21:41:34Z","timestamp":1760218894812,"version":"build-2065373602"},"reference-count":19,"publisher":"MDPI AG","issue":"2","license":[{"start":{"date-parts":[[2014,2,17]],"date-time":"2014-02-17T00:00:00Z","timestamp":1392595200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This paper will discuss the results obtained with a first prototype of a completely passive and wireless low pressure sensor. The device is a heat conductivity gauge, based on a wireless and passive SAW temperature sensor. The required heating energy is applied to the sensor using inductive coupling. The prototype was successfully tested in a vacuum chamber. Its equilibrium temperature changed drastically and in a reproducible way when pressure steps were applied. However, the response time was very long. A model is provided to account for the sensor\u2019s behavior. It is then used to show that the response time could be strongly improved using basic design improvements. Further possible improvements are discussed.<\/jats:p>","DOI":"10.3390\/s140203065","type":"journal-article","created":{"date-parts":[[2014,2,17]],"date-time":"2014-02-17T13:44:35Z","timestamp":1392644675000},"page":"3065-3076","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":15,"title":["A Wireless and Passive Low-Pressure Sensor"],"prefix":"10.3390","volume":"14","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-0575-1079","authenticated-orcid":false,"given":"Pascal","family":"Nicolay","sequence":"first","affiliation":[{"name":"Carinthian Tech Research (CTR AG), Villach\/St. Magdalen 9524, Austria"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Martin","family":"Lenzhofer","sequence":"additional","affiliation":[{"name":"Carinthian Tech Research (CTR AG), Villach\/St. Magdalen 9524, Austria"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2014,2,17]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"300","DOI":"10.1016\/j.sna.2005.10.016","article-title":"A micro-Pirani vacuum gauge based on micro-hotplate technology","volume":"126","author":"Zhang","year":"2006","journal-title":"Sens. Actuators A Phys."},{"key":"ref_2","first-page":"420","article-title":"Microstructured vacuum gauges and their future perspectives","volume":"82","author":"Meier","year":"2008","journal-title":"Vacuum"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"1419","DOI":"10.1016\/j.vacuum.2009.05.003","article-title":"Miniature and MEMS-type vacuum sensors and pumps","volume":"83","year":"2009","journal-title":"Vacuum"},{"key":"ref_4","unstructured":"MKS Instruments Datasheet Series 905 MicroPirani\u2122\u2013Sensor Kit. Available online: http:\/\/www.mksinst.com\/docs\/UR\/905DS.pdf."},{"key":"ref_5","unstructured":"HEIMANN Sensor Datasheet HVS Series MEMS Type Pirani Vacuum Sensor. Available online: http:\/\/www.heimannsensor.com\/HVS_Vac_03_04_Rev8.pdf."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"317","DOI":"10.1109\/58.827416","article-title":"A review of wireless SAW sensors","volume":"47","author":"Pohl","year":"2000","journal-title":"IEEE Trans. Ultrason. 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Lett."},{"key":"ref_14","doi-asserted-by":"crossref","unstructured":"Nicolay, P., Elmazria, O., and Perois, X. (2012, January 7\u201310). A Miniaturized SAW-PIRANI Sensor. Dresden Germany.","DOI":"10.1109\/ULTSYM.2012.0385"},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"41","DOI":"10.1016\/j.sna.2012.01.039","article-title":"Characterization of a SAW-Pirani vacuum sensor for two different operating modes","volume":"188","author":"Mercier","year":"2012","journal-title":"Sens. Actuators A Phy."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"1458","DOI":"10.1109\/JSEN.2010.2086055","article-title":"Enhanced sensitivity of SAW-based pirani vacuum pressure sensor","volume":"11","author":"Singh","year":"2011","journal-title":"IEEE Sens."},{"key":"ref_17","unstructured":"Fachberger, R., Bruckner, G., Hauser, R., and Reindl, L. (, January June). Wireless SAW Based High-Temperature Measurement Systems. Miami, FL, USA."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"661","DOI":"10.1016\/j.proeng.2010.09.196","article-title":"Phase stability comparison of SAW sensor evaluation with various CW type radars","volume":"24","author":"Binder","year":"2010","journal-title":"Procedia Engineering"},{"key":"ref_19","unstructured":"FEMM. 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