{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,2]],"date-time":"2026-03-02T12:47:48Z","timestamp":1772455668073,"version":"3.50.1"},"reference-count":18,"publisher":"MDPI AG","issue":"3","license":[{"start":{"date-parts":[[2014,3,3]],"date-time":"2014-03-03T00:00:00Z","timestamp":1393804800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>To meet measurement needs in harsh environments, such as high temperature and rotating applications, a wireless passive Low Temperature Co-fired Ceramics (LTCC) temperature sensor based on ferroelectric dielectric material is presented in this paper. As a LC circuit which consists of electrically connected temperature sensitive capacitor and invariable planar spiral inductor, the sensor has its resonant frequency shift with the variation in temperature. Within near-filed coupling distance, the variation in resonant frequency of the sensor can be detected contactlessly by extracting the impedance parameters of an external antenna. Ferroelectric ceramic, which has temperature sensitive permittivity, is used as the dielectric. The fabrication process of the sensor, which differs from conventional LTCC technology, is described in detail. The sensor is tested three times from room temperature to 700 \u00b0C, and considerable repeatability and sensitivity are shown, thus the feasibility of high performance wireless passive temperature sensor realized by LTCC technology is demonstrated.<\/jats:p>","DOI":"10.3390\/s140304154","type":"journal-article","created":{"date-parts":[[2014,3,3]],"date-time":"2014-03-03T11:27:10Z","timestamp":1393846030000},"page":"4154-4166","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":51,"title":["A Harsh Environment-Oriented Wireless Passive Temperature Sensor Realized by LTCC Technology"],"prefix":"10.3390","volume":"14","author":[{"given":"Qiulin","family":"Tan","sequence":"first","affiliation":[{"name":"Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China"},{"name":"Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Tao","family":"Luo","sequence":"additional","affiliation":[{"name":"Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China"},{"name":"Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jijun","family":"Xiong","sequence":"additional","affiliation":[{"name":"Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China"},{"name":"Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Hao","family":"Kang","sequence":"additional","affiliation":[{"name":"Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China"},{"name":"Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xiaxia","family":"Ji","sequence":"additional","affiliation":[{"name":"Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China"},{"name":"Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yang","family":"Zhang","sequence":"additional","affiliation":[{"name":"Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China"},{"name":"Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Mingliang","family":"Yang","sequence":"additional","affiliation":[{"name":"Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China"},{"name":"Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xiaolong","family":"Wang","sequence":"additional","affiliation":[{"name":"Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China"},{"name":"Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, 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Eng."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"105","DOI":"10.1016\/j.sna.2013.06.016","article-title":"SAW-RFID enabled temperature sensor","volume":"201","author":"Kang","year":"2013","journal-title":"Sens. Actuator A Phys."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"1239","DOI":"10.1016\/j.proche.2009.07.309","article-title":"Monitoring of the temperature inside a lining of a metallurgical vessel using a SAW temperature sensor","volume":"1","author":"Fachberger","year":"2009","journal-title":"Procedia Chem."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"7982","DOI":"10.3390\/s8127982","article-title":"A passive wireless temperature sensor for harsh environment applications","volume":"8","author":"Wang","year":"2008","journal-title":"Sensors"},{"key":"ref_5","unstructured":"Zhao, C., Du, J., Wu, J., He, X., and Yan, M. Contactless Measurement of Temperature based on Transient Wireless Energy Transmission. Differentiation."},{"key":"ref_6","unstructured":"Dr\u00e4ger, T., and Bernhard, J. (, January May). Passive wireless temperature sensor for high temperature applications with conductive surrounding. Nuremberg, Germany."},{"key":"ref_7","first-page":"1","article-title":"Cascaded \u2018Triple Bent Beam\u2019 MEMS sensor for contactless temperature measurements in non accessible environments","volume":"60","author":"Trigona","year":"2011","journal-title":"IEEE Trans. Instrum. Meas."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"1353","DOI":"10.1109\/TIM.2009.2038026","article-title":"Passive hybrid MEMS for high-temperature telemetric measurements","volume":"59","author":"Marioli","year":"2010","journal-title":"IEEE Trans. Instrum. Meas."},{"key":"ref_9","doi-asserted-by":"crossref","unstructured":"Nabipoor, M., and Majlis, B. (2006). A new passive telemetry LC pressure and temperature sensor optimized for TPMS. J. Phys.: Conf. Ser.","DOI":"10.1088\/1742-6596\/34\/1\/127"},{"key":"ref_10","unstructured":"Unger, M., Smetana, W., Radosavljevi\u0107, G., \u017divanov, L., Na\u0111, L., and Mari\u0107, A. (2008, January 21\u201324). A Wireless Readout Temperature Sensor Realized in LTCC-Technology. Pultusk, Poland."},{"key":"ref_11","doi-asserted-by":"crossref","unstructured":"Unger, M., Radosavljevic, G., Smetana, W., Zivanov, L., and Koch, T. (2009, January 13\u201317). Parameters governing the sensor characteristic of capacitive temperature sensors built up in LTCC-technology. Brno, Czech.","DOI":"10.1109\/ISSE.2009.5207056"},{"key":"ref_12","first-page":"272","article-title":"Wireless LTCC sensors for monitoring of pressure, temperature and moisture","volume":"42","author":"Radosavljevic","year":"2012","journal-title":"Inform. Midem."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"33","DOI":"10.1016\/S0924-4247(01)00624-0","article-title":"Design and application of a wireless, passive, resonant-circuit environmental monitoring sensor","volume":"93","author":"Ong","year":"2001","journal-title":"Sens. Actuator A Phys."},{"key":"ref_14","unstructured":"Fonseca, M.A. (2007). Polymer\/Ceramic Wireless MEMS Pressure Sensors for Harsh Environments: High Temperature and Biomedical Applications. [Ph.D. Dissertation, Georgia Institute of Technology]."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"560","DOI":"10.1016\/j.sna.2005.12.009","article-title":"Processing of graphite-based sacrificial layer for microfabrication of low temperature co-fired ceramics (LTCC)","volume":"130","author":"Birol","year":"2006","journal-title":"Sens. Actuator A-Phys."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"215","DOI":"10.1016\/S0924-4247(98)00238-6","article-title":"The utilization of low temperature co-fired ceramics (LTCC-ML) technology for meso-scale EMS, a simple thermistor based flow sensor","volume":"73","author":"Moffett","year":"1999","journal-title":"Sens. Actuator A Phys."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"261","DOI":"10.1016\/j.sna.2003.07.003","article-title":"Thick-film resistors on various substrates as sensing elements for strain-gauge applications","volume":"107","author":"Hrovat","year":"2003","journal-title":"Sens. Actuator A Phys."},{"key":"ref_18","doi-asserted-by":"crossref","unstructured":"Unger, M., Fleig, J., Ahrens, M., Smetana, W., and Radosavljevic, G. (2010, January 12\u201316). Permittivity and conductivity of various LTCC-tapes at high temperature. Warsaw, Poland.","DOI":"10.1109\/ISSE.2010.5547263"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/14\/3\/4154\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T21:08:48Z","timestamp":1760216928000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/14\/3\/4154"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2014,3,3]]},"references-count":18,"journal-issue":{"issue":"3","published-online":{"date-parts":[[2014,3]]}},"alternative-id":["s140304154"],"URL":"https:\/\/doi.org\/10.3390\/s140304154","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2014,3,3]]}}}