{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,1,7]],"date-time":"2026-01-07T08:04:03Z","timestamp":1767773043259,"version":"build-2065373602"},"reference-count":31,"publisher":"MDPI AG","issue":"7","license":[{"start":{"date-parts":[[2014,7,22]],"date-time":"2014-07-22T00:00:00Z","timestamp":1405987200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"funder":[{"name":"MED-EL Elektromedizinische Gerate GmbH"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This paper presents an alternative approach for angular-rate sensing based on the way that the natural vestibular semicircular canals operate, whereby the inertial mass of a fluid is used to deform a sensing structure upon rotation. The presented gyro has been fabricated in a commercially available MEMS process, which allows for microfluidic channels to be implemented in etched glass layers, which sandwich a bulk-micromachined silicon substrate, containing the sensing structures. Measured results obtained from a proof-of-concept device indicate an angular rate sensitivity of less than 1 \u00b0\/s, which is similar to that of the natural vestibular system. By avoiding the use of a continually-excited vibrating mass, as is practiced in today\u2019s state-of-the-art gyroscopes, an ultra-low power consumption of 300 \u03bcW is obtained, thus making it suitable for implantation.<\/jats:p>","DOI":"10.3390\/s140713173","type":"journal-article","created":{"date-parts":[[2014,7,22]],"date-time":"2014-07-22T11:19:25Z","timestamp":1406027965000},"page":"13173-13185","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":21,"title":["Bio-Inspired Micro-Fluidic Angular-Rate Sensor for  Vestibular Prostheses"],"prefix":"10.3390","volume":"14","author":[{"given":"Charalambos","family":"Andreou","sequence":"first","affiliation":[{"name":"Department of Electrical and Computer Engineering, University of Cyprus, Nicosia 1678, Cyprus"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yiannis","family":"Pahitas","sequence":"additional","affiliation":[{"name":"Department of Electrical and Computer Engineering, University of Cyprus, Nicosia 1678, Cyprus"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Julius","family":"Georgiou","sequence":"additional","affiliation":[{"name":"Department of Electrical and Computer Engineering, University of Cyprus, Nicosia 1678, Cyprus"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2014,7,22]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"1016","DOI":"10.1109\/TBME.2007.894629","article-title":"A multichannel semicircular canal neural prosthesis using electrical stimulation to restore 3-d vestibular sensation","volume":"54","author":"Migliaccio","year":"2007","journal-title":"IEEE Trans. Biomed. Eng."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"95","DOI":"10.3233\/VES-2003-122-305","article-title":"Vestibular Prostheses: The Engineering and Biomedical Issues","volume":"12","author":"Wall","year":"2003","journal-title":"J. Vestibul. Res."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"830","DOI":"10.1109\/TNSRE.2013.2259261","article-title":"Development of a Multichannel Vestibular Prosthesis Prototype by Modification of a Commercially Available Cochlear Implant","volume":"21","author":"Valentin","year":"2013","journal-title":"IEEE Trans. Neural Syst. Rehabil. Eng."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"572","DOI":"10.1114\/1.293","article-title":"Prototype neural semicircular canal prosthesis using patterned electrical stimulation","volume":"28","author":"Gong","year":"2000","journal-title":"Ann. Biomed. Eng."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"106","DOI":"10.1109\/TBCAS.2008.927238","article-title":"A partial-current-steering biphasic stimulation driver for vestibular prostheses","volume":"2","author":"Constandinou","year":"2008","journal-title":"IEEE Trans. Biomed. Circuits Syst."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"147","DOI":"10.1109\/TBCAS.2011.2138139","article-title":"A stimulator ASIC featuring versatile management for vestibular prostheses","volume":"5","author":"Dai","year":"2011","journal-title":"IEEE Trans. Biomed. Circuits Syst."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"113","DOI":"10.1159\/000090684","article-title":"An Electronic Prosthesis Mimicking the Dynamic Vestibular Function","volume":"11","author":"Shkel","year":"2006","journal-title":"Audiol. Neurotol."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"638","DOI":"10.3390\/s110100638","article-title":"Sensing movement: Microsensors for body motion measurement","volume":"11","author":"Zeng","year":"2011","journal-title":"Sensors"},{"key":"ref_9","unstructured":"Shkel, A.M., Liu, J., Ikei, C., and Zeng, F. (2002, January 12\u201314). Feasibility Study on a Prototype of Vestibular Implant Using MEMS Gyroscopes. Orlando, FL, USA."},{"key":"ref_10","unstructured":"Vestibular System. Available online: http:\/\/en.wikipedia.org\/wiki\/Vestibular_system."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"588","DOI":"10.1109\/TNSRE.2011.2164937","article-title":"Design and performance of a multichannel vestibular prosthesis that restores semicircular canal sensation in rhesus monkey","volume":"19","author":"Chiang","year":"2011","journal-title":"IEEE Trans. Neural Syst. Rehabil. Eng."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"1394","DOI":"10.3390\/s140101394","article-title":"The Development of Micromachined Gyroscope Structure and Circuitry Technology","volume":"14","author":"Xia","year":"2014","journal-title":"Sensors"},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"9581","DOI":"10.3390\/s101109581","article-title":"Design and Implementation of a Digital Angular Rate Sensor","volume":"10","author":"Wu","year":"2010","journal-title":"Sensors"},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"2460","DOI":"10.1109\/JSEN.2012.2192497","article-title":"Design of Micromachined Vibratory Gyroscope with Two Degree-of-Freedom Drive-Mode and Sense-Mode","volume":"12","author":"Wang","year":"2012","journal-title":"IEEE Sens. J."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"1651","DOI":"10.3390\/s130201651","article-title":"Design of a novel MEMS gyroscope array","volume":"13","author":"Wang","year":"2013","journal-title":"Sensors"},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"1573","DOI":"10.3390\/s100301573","article-title":"A z-axis quartz cross-fork micromachined gyroscope based on shear stress detection","volume":"10","author":"Xie","year":"2010","journal-title":"Sensors"},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"10550","DOI":"10.3390\/s130810550","article-title":"Bandwidth Optimization Design of a Multi Degree of Freedom MEMS Gyroscope","volume":"13","author":"Si","year":"2013","journal-title":"Sensors"},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"12482","DOI":"10.3390\/s130912482","article-title":"A multi-fork z-axis quartz micromachined gyroscope","volume":"13","author":"Feng","year":"2013","journal-title":"Sensors"},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"1593","DOI":"10.1109\/JSSC.2009.2016996","article-title":"A Sub-0.2\u00b0\/hr bias drift micromechanical silicon gyroscope with automatic CMOS mode-matching","volume":"44","author":"Sharma","year":"2009","journal-title":"IEEE J. Solid-State Circuits"},{"key":"ref_20","doi-asserted-by":"crossref","unstructured":"Bagdahn, J., Schischka, J., Petzold, M., and Sharpe, W.N. (2001, January 22). Fracture toughness and fatigue investigations of polycrystalline silicon. San Francisco, CA, USA.","DOI":"10.1117\/12.442998"},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"593","DOI":"10.1109\/84.967383","article-title":"High-cycle fatigue of single-crystal silicon thin films","volume":"10","author":"Muhlstein","year":"2001","journal-title":"J. Microelectromech. Syst."},{"key":"ref_22","doi-asserted-by":"crossref","unstructured":"Constandinou, T.G., Georgiou, J., and Andreou, C. (2008, January 18\u201321). An ultra-low-power micro-optoelectromechanical tilt sensor. Seattle, WA, USA.","DOI":"10.1109\/ISCAS.2008.4542128"},{"key":"ref_23","unstructured":"Bhatti, P.T., and McClain, M.A. (September, January 30). Low-power sensing for vestibular prostheses. Boston, MA, USA."},{"key":"ref_24","doi-asserted-by":"crossref","unstructured":"Groenesteijn, J., Droogendijk, H., de Boer, M.J., Sanders, R.G.P., Wiegerink, R.J., and Krijnen, G.J.M. (2014, January 26\u201330). An angular acceleration sensor inspired by the vestibular system with a fully circular fluid-channel and thermal read-out. San Francisco, CA, USA.","DOI":"10.1109\/MEMSYS.2014.6765736"},{"key":"ref_25","doi-asserted-by":"crossref","unstructured":"Alrowais, H., Brand, O., and Bhatti, P.T. (2014, January 8\u201312). Design, simulation and fabrication of thermal angular accelerometers. Hilton Head, SC, USA.","DOI":"10.31438\/trf.hh2014.65"},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"358","DOI":"10.1016\/S1672-6529(08)60181-X","article-title":"Biomimetic cilia based on MEMS technology","volume":"5","author":"Zhou","year":"2008","journal-title":"J. Bionic Eng."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"999","DOI":"10.1109\/JMEMS.2007.902436","article-title":"Design and characterization of artificial haircell sensor for flow sensing with ultrahigh velocity and angular sensitivity","volume":"16","author":"Chen","year":"2007","journal-title":"IEEE J. Microelectromech. Syst."},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"10894","DOI":"10.3390\/s111110894","article-title":"Development of a new surface acoustic wave based gyroscope on a X-112\u00b0Y LiTaO3 substrate","volume":"11","author":"Wang","year":"2011","journal-title":"Sensors"},{"key":"ref_29","unstructured":"Andreou, C.M., Pahitas, Y., Pilavaki, E., and Georgiou, J. (November, January 31). Bio-mimetic Gyroscopic Sensor for Vestibular Prostheses. Rotterdam, The Netherlands."},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"87","DOI":"10.1017\/S0022112076002346","article-title":"The fluid mechanics of the semicircular canals","volume":"78","author":"Watts","year":"1976","journal-title":"J. Fluid Mech."},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"1565","DOI":"10.1113\/jphysiol.2013.267534","article-title":"Neuronal detection thresholds during vestibular compensation: Contributions of response variability and sensory substitution","volume":"592","author":"Jamali","year":"2014","journal-title":"J. Physiol."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/14\/7\/13173\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T21:13:55Z","timestamp":1760217235000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/14\/7\/13173"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2014,7,22]]},"references-count":31,"journal-issue":{"issue":"7","published-online":{"date-parts":[[2014,7]]}},"alternative-id":["s140713173"],"URL":"https:\/\/doi.org\/10.3390\/s140713173","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2014,7,22]]}}}