{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,28]],"date-time":"2026-05-28T01:18:06Z","timestamp":1779931086168,"version":"3.53.1"},"reference-count":156,"publisher":"MDPI AG","issue":"10","license":[{"start":{"date-parts":[[2014,10,17]],"date-time":"2014-10-17T00:00:00Z","timestamp":1413504000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Femtosecond lasers have revolutionized the processing of materials, since their ultrashort pulse width and extremely high peak intensity allows high-quality micro- and nanofabrication of three-dimensional (3D) structures. This unique capability opens up a new route for fabrication of microfluidic sensors for biochemical applications. The present paper presents a comprehensive review of recent advancements in femtosecond laser processing of glass for a variety of microfluidic sensor applications. These include 3D integration of micro-\/nanofluidic, optofluidic, electrofluidic, surface-enhanced Raman-scattering devices, in addition to fabrication of devices for microfluidic bioassays and lab-on-fiber sensors. This paper describes the unique characteristics of femtosecond laser processing and the basic concepts involved in femtosecond laser direct writing. Advanced spatiotemporal beam shaping methods are also discussed. Typical examples of microfluidic sensors fabricated using femtosecond lasers are then highlighted, and their applications in chemical and biological sensing are described. Finally, a summary of the technology is given and the outlook for further developments in this field is considered.<\/jats:p>","DOI":"10.3390\/s141019402","type":"journal-article","created":{"date-parts":[[2014,10,17]],"date-time":"2014-10-17T10:27:19Z","timestamp":1413541639000},"page":"19402-19440","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":97,"title":["Femtosecond Laser Fabrication of Monolithically Integrated Microfluidic Sensors in Glass"],"prefix":"10.3390","volume":"14","author":[{"given":"Fei","family":"He","sequence":"first","affiliation":[{"name":"State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, Shanghai 201800, China"},{"name":"RIKEN Center for Advanced Photonics, Hirosawa 2-1, Wako, Saitama 351-0198, Japan"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yang","family":"Liao","sequence":"additional","affiliation":[{"name":"State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, Shanghai 201800, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jintian","family":"Lin","sequence":"additional","affiliation":[{"name":"State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, Shanghai 201800, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jiangxin","family":"Song","sequence":"additional","affiliation":[{"name":"State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, Shanghai 201800, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Lingling","family":"Qiao","sequence":"additional","affiliation":[{"name":"State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, Shanghai 201800, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-8269-5907","authenticated-orcid":false,"given":"Ya","family":"Cheng","sequence":"additional","affiliation":[{"name":"State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, Shanghai 201800, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Koji","family":"Sugioka","sequence":"additional","affiliation":[{"name":"RIKEN Center for Advanced Photonics, Hirosawa 2-1, Wako, Saitama 351-0198, Japan"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2014,10,17]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"368","DOI":"10.1038\/nature05058","article-title":"The origins and the future of microfluidics","volume":"442","author":"Whitesides","year":"2006","journal-title":"Nature"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"181","DOI":"10.1038\/nature13118","article-title":"The present and future role of microfluidics in biomedical research","volume":"507","author":"Sackmann","year":"2014","journal-title":"Nature"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"381","DOI":"10.1038\/nature05060","article-title":"Developing optofluidic technology through the fusion of microfluidics and optics","volume":"442","author":"Psaltis","year":"2006","journal-title":"Nature"},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"598","DOI":"10.1038\/nphoton.2011.163","article-title":"The photonic integration of non-solid media using optofluidics","volume":"5","author":"Schmidt","year":"2011","journal-title":"Nat. Photon."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"219","DOI":"10.1038\/nphoton.2008.47","article-title":"Femtosecond laser micromachining in transparent materials","volume":"2","author":"Gattass","year":"2008","journal-title":"Nat. Photon."},{"key":"ref_6","doi-asserted-by":"crossref","unstructured":"Sugioka, K., and Cheng, Y. (2014). Ultrafast lasers\u2014reliable tools for advanced materials processing. Light Sci. Appl.","DOI":"10.1038\/lsa.2014.30"},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"2044","DOI":"10.1364\/OL.18.002044","article-title":"Chirped-pulse amplification of 55-fs pulses at a 1-kHz repetition rate in a Ti-Al2O3 regenerative amplifier","volume":"18","author":"Rudd","year":"1993","journal-title":"Opt. Lett."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"1285","DOI":"10.1063\/1.99001","article-title":"Ablation and etching of polymethylmethacrylate by very short (160 fs) ultraviolet (308 nm) laser pulses","volume":"51","author":"Srinivasan","year":"1987","journal-title":"Appl. Phys. Lett."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"199","DOI":"10.1007\/BF00692122","article-title":"Femtosecond UV excimer laser ablation","volume":"44","author":"Stuke","year":"1987","journal-title":"Appl. Phys. B"},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"109","DOI":"10.1007\/BF01567637","article-title":"Femtosecond, picosecond and nanosecond laser ablation of solids","volume":"63","author":"Chichkov","year":"1996","journal-title":"Appl. Phys. A."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"1729","DOI":"10.1364\/OL.21.001729","article-title":"Writing waveguides in glass with a femtosecond laser","volume":"21","author":"Davis","year":"1996","journal-title":"Opt. Lett."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"2023","DOI":"10.1364\/OL.21.002023","article-title":"Three-dimensional optical storage inside transparent materials","volume":"21","author":"Glezer","year":"1996","journal-title":"Opt. Lett."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"1","DOI":"10.2961\/jlmn.2012.01.0001","article-title":"The femtoprint project","volume":"7","author":"Bellouard","year":"2012","journal-title":"J. Laser Micro Nanoeng."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"115","DOI":"10.2961\/jlmn.2013.02.0001","article-title":"Applications of Ultrafast Lasers in Microfabrication","volume":"8","author":"Mielke","year":"2013","journal-title":"J. Laser Micro Nanoeng."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"15","DOI":"10.2961\/jlmn.2013.01.0004","article-title":"Microcutting and hollow 3D microstructures in glasses by in-volume selective laser-induced etching (ISLE)","volume":"8","author":"Gottmann","year":"2013","journal-title":"J. Laser Micro Nanoeng."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"217","DOI":"10.1038\/nmat767","article-title":"Inducing and probing non-thermal transitions in semiconductors using femtosecond laser pulses","volume":"1","author":"Sundaram","year":"2002","journal-title":"Nat. Mater."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"1749","DOI":"10.1103\/PhysRevB.53.1749","article-title":"Nanosecond-to-femtosecond laser-induced breakdown in dielectrics","volume":"53","author":"Stuart","year":"1996","journal-title":"Phys. Rev. B"},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"R153","DOI":"10.1088\/0022-3727\/38\/9\/R01","article-title":"Thermal plasma modelling","volume":"38","author":"Gleizes","year":"2005","journal-title":"J. Phys. D Appl. Phys."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"5856","DOI":"10.1073\/pnas.0307470101","article-title":"Optics at critical intensity: Applications to nanomorphing","volume":"101","author":"Joglekar","year":"2004","journal-title":"Proc. Natl. Acad. Sci. USA"},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"187","DOI":"10.1364\/OL.38.000187","article-title":"Femtosecond laser nanostructuring in porous glass with sub-50 nm feature sizes","volume":"38","author":"Liao","year":"2013","journal-title":"Opt. Lett."},{"key":"ref_21","doi-asserted-by":"crossref","unstructured":"Tan, D., Li, Y., Qi, F., Yang, H., Gong, Q., Dong, X., and Duan, X. (2007). Reduction in feature size of two-photon polymerization using SCR500. Appl. Phys. Lett.","DOI":"10.1063\/1.2535504"},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"4039","DOI":"10.1002\/adma.201000921","article-title":"Ultrafast Manipulation of Self-Assembled Form Birefringence in Glass","volume":"22","author":"Shimotsuma","year":"2010","journal-title":"Adv. Mater."},{"key":"ref_23","doi-asserted-by":"crossref","unstructured":"Sansoni, L., Sciarrino, F., Vallone, G., Mataloni, P., Crespi, A., Ramponi, R., and Osellame, R. (2010). Polarization entangled state measurement on a chip. Phys. Rev. Lett.","DOI":"10.1117\/12.886485"},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"442","DOI":"10.1002\/lpor.201000031","article-title":"Femtosecond laser microstructuring: An enabling tool for optofluidic lab-on-chips","volume":"5","author":"Osellame","year":"2011","journal-title":"Laser Photon. Rev."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"3576","DOI":"10.1039\/c2lc40366h","article-title":"Femtosecond laser processing for optofluidic fabrication","volume":"12","author":"Sugioka","year":"2012","journal-title":"Lab Chip"},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"1591","DOI":"10.1021\/nl0510154","article-title":"Periodic nanovoid structures via femtosecond laser irradiation","volume":"5","author":"Kanehira","year":"2005","journal-title":"Nano Lett."},{"key":"ref_27","doi-asserted-by":"crossref","unstructured":"Shimotsuma, Y., Kazansky, P.G., Qiu, J., and Hirao, K. (2003). Self-organized nanogratings in glass irradiated by ultrashort light pulses. Phys. Rev. Lett.","DOI":"10.1103\/PhysRevLett.91.247405"},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"136","DOI":"10.1364\/OL.34.000136","article-title":"Micromodification of element distribution in glass using femtosecond laser irradiation","volume":"34","author":"Liu","year":"2009","journal-title":"Opt. Lett."},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"1809","DOI":"10.1364\/OE.11.001809","article-title":"Optical gratings embedded in photosensitive glass by photochemical reaction using a femtosecond laser","volume":"11","author":"Cheng","year":"2003","journal-title":"Opt. Express"},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"99","DOI":"10.1038\/nphoton.2007.276","article-title":"Non-reciprocal ultrafast laser writing","volume":"2","author":"Yang","year":"2008","journal-title":"Nat. Photon."},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"620","DOI":"10.1557\/mrs2006.159","article-title":"Ultrafast processes for bulk modification of transparent materials","volume":"31","author":"Itoh","year":"2006","journal-title":"MRS Bull."},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"1706","DOI":"10.1109\/3.631270","article-title":"Laser ablation and micromachining with ultrashort laser pulses","volume":"33","author":"Liu","year":"1997","journal-title":"IEEE J. Quantum Electron."},{"key":"ref_33","doi-asserted-by":"crossref","first-page":"18","DOI":"10.2351\/1.521827","article-title":"A review of ultrashort pulsed laser ablation of materials","volume":"10","author":"Shirk","year":"1998","journal-title":"J. Laser. Appl."},{"key":"ref_34","doi-asserted-by":"crossref","first-page":"435","DOI":"10.1002\/lpor.200810044","article-title":"Femtosecond laser near field ablation","volume":"3","author":"Plech","year":"2009","journal-title":"Laser. Photon. Rev."},{"key":"ref_35","doi-asserted-by":"crossref","first-page":"353","DOI":"10.1515\/aot-2012-0033","article-title":"A tutorial on optics for ultrafast laser materials processing: Basic microprocessing system to beam shaping and advanced focusing methods","volume":"1","author":"Sugioka","year":"2012","journal-title":"Adv. Opt. Technol."},{"key":"ref_36","doi-asserted-by":"crossref","first-page":"607","DOI":"10.1002\/lpor.201100031","article-title":"Bessel and annular beams for materials processing","volume":"6","author":"Duocastella","year":"2012","journal-title":"Laser Photon. Rev."},{"key":"ref_37","doi-asserted-by":"crossref","first-page":"22","DOI":"10.1002\/lpor.201100046","article-title":"Three-dimensional optical laser lithography beyond the diffraction limit","volume":"7","author":"Fischer","year":"2013","journal-title":"Laser Photon. Rev."},{"key":"ref_38","doi-asserted-by":"crossref","unstructured":"Della Valle, G., Osellame, R., and Laporta, P. (2009). Micromachining of photonic devices by femtosecond laser pulses. J. Opt. A Pure Appl. Opt.","DOI":"10.1088\/1464-4258\/11\/4\/049801"},{"key":"ref_39","doi-asserted-by":"crossref","unstructured":"Juodkazis, S., Mizeikis, V., and Misawa, H. (2009). Three-dimensional microfabrication of materials by femtosecond lasers for photonics applications. J. Appl. Phys.","DOI":"10.1063\/1.3216462"},{"key":"ref_40","doi-asserted-by":"crossref","first-page":"1370","DOI":"10.1109\/JSTQE.2008.925809","article-title":"Investigation of ultrafast laser\u2013photonic material interactions: Challenges for directly written glass photonics","volume":"14","author":"Ams","year":"2008","journal-title":"IEEE J. Sel. Top. Quantum Electron."},{"key":"ref_41","doi-asserted-by":"crossref","first-page":"535","DOI":"10.1002\/lpor.200810050","article-title":"Ultrafast laser written active devices","volume":"3","author":"Ams","year":"2009","journal-title":"Laser Photon. Rev."},{"key":"ref_42","doi-asserted-by":"crossref","unstructured":"Szameit, A., and Nolte, S. (2010). Discrete optics in femtosecond-laser-written photonic structures. J. Phys. B Atom. Mol. Opt. Phys.","DOI":"10.1088\/0953-4075\/43\/16\/163001"},{"key":"ref_43","doi-asserted-by":"crossref","first-page":"709","DOI":"10.1002\/lpor.201100033","article-title":"Femtosecond pulse written fiber gratings: A new avenue to integrated fiber technology","volume":"6","author":"Thomas","year":"2012","journal-title":"Laser Photon. Rev."},{"key":"ref_44","doi-asserted-by":"crossref","first-page":"251","DOI":"10.1002\/lpor.201300025","article-title":"Optical waveguides in crystalline dielectric materials produced by femtosecond-laser micromachining","volume":"8","author":"Chen","year":"2013","journal-title":"Laser Photon. Rev."},{"key":"ref_45","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1007\/s00339-005-3225-1","article-title":"Three-dimensional micromachining of glass using femtosecond laser for lab-on-a-chip device manufacture","volume":"81","author":"Sugioka","year":"2005","journal-title":"Applied Physics A."},{"key":"ref_46","doi-asserted-by":"crossref","first-page":"386","DOI":"10.1002\/lpor.200810074","article-title":"Three-dimensional femtosecond laser micromachining of photosensitive glass for biomicrochips","volume":"4","author":"Sugioka","year":"2010","journal-title":"Laser Photon. Rev."},{"key":"ref_47","doi-asserted-by":"crossref","first-page":"1020","DOI":"10.1557\/mrs.2011.274","article-title":"Integrated microchips for biological analysis fabricated by femtosecond laser direct writing","volume":"36","author":"Sugioka","year":"2011","journal-title":"Mrs Bull."},{"key":"ref_48","doi-asserted-by":"crossref","first-page":"119","DOI":"10.1016\/j.pquantelec.2014.03.002","article-title":"Surface and bulk structuring of materials by ripples with long and short laser pulses: Recent advances","volume":"38","author":"Buividas","year":"2014","journal-title":"Prog. Quant. Electron."},{"key":"ref_49","doi-asserted-by":"crossref","first-page":"26","DOI":"10.1002\/lpor.200710031","article-title":"Applications of femtosecond laser induced self-organized planar nanocracks inside fused silica glass","volume":"2","author":"Taylor","year":"2008","journal-title":"Laser Photon. Rev."},{"key":"ref_50","doi-asserted-by":"crossref","first-page":"127","DOI":"10.1016\/j.pquantelec.2009.06.001","article-title":"Laser-based micro\/nanoengineering for biological applications","volume":"33","author":"Stratakis","year":"2009","journal-title":"Prog. Quant. Electron."},{"key":"ref_51","doi-asserted-by":"crossref","first-page":"385","DOI":"10.1002\/lpor.201200017","article-title":"Direct femtosecond laser surface nano\/microstructuring and its applications","volume":"7","author":"Vorobyev","year":"2013","journal-title":"Laser Photon. Rev."},{"key":"ref_52","doi-asserted-by":"crossref","first-page":"169","DOI":"10.1007\/b94405","article-title":"Two-Photon Photopolymerization and 3D Lithographic Microfabrication","volume":"Volume 170","author":"Sun","year":"2004","journal-title":"NMR 3D Analysis Photopolymerization"},{"key":"ref_53","doi-asserted-by":"crossref","first-page":"6238","DOI":"10.1002\/anie.200603995","article-title":"Multiphoton fabrication","volume":"46","author":"LaFratta","year":"2007","journal-title":"Angew. Chem. Int. Ed."},{"key":"ref_54","doi-asserted-by":"crossref","first-page":"100","DOI":"10.1002\/lpor.200710039","article-title":"Recent progress in multiphoton microfabrication","volume":"2","author":"Maruo","year":"2008","journal-title":"Laser Photon. Rev."},{"key":"ref_55","doi-asserted-by":"crossref","first-page":"435","DOI":"10.1016\/j.nantod.2010.08.007","article-title":"Designable 3D nanofabrication by femtosecond laser direct writing","volume":"5","author":"Zhang","year":"2010","journal-title":"Nano Today"},{"key":"ref_56","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1016\/j.physrep.2013.07.005","article-title":"Ultrafast laser nanostructuring of photopolymers: A decade of advances","volume":"533","author":"Malinauskas","year":"2013","journal-title":"Phys. Rep."},{"key":"ref_57","doi-asserted-by":"crossref","first-page":"1677","DOI":"10.1039\/c3lc50160d","article-title":"Fabrication and multifunction integration of microfluidic chips by femtosecond laser direct writing","volume":"13","author":"Xu","year":"2013","journal-title":"Lab Chip."},{"key":"ref_58","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1002\/lpor.201200081","article-title":"Laser nanofabrication in photoresists and azopolymers","volume":"8","author":"Sekkat","year":"2014","journal-title":"Laser Photon. Rev."},{"key":"ref_59","doi-asserted-by":"crossref","first-page":"577","DOI":"10.1021\/cr010379n","article-title":"Mechanisms of pulsed laser ablation of biological tissues","volume":"103","author":"Vogel","year":"2003","journal-title":"Chem. Rev."},{"key":"ref_60","doi-asserted-by":"crossref","first-page":"1015","DOI":"10.1007\/s00340-005-2036-6","article-title":"Mechanisms of femtosecond laser nanosurgery of cells and tissues","volume":"81","author":"Vogel","year":"2005","journal-title":"Appl. Phys. B"},{"key":"ref_61","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1109\/JSTQE.2013.2287098","article-title":"Clinical ultrafast laser surgery: Recent advances and future directions","volume":"20","author":"Hoy","year":"2014","journal-title":"IEEE J. Sel. Top. Quant. Electron."},{"key":"ref_62","doi-asserted-by":"crossref","first-page":"853","DOI":"10.1007\/s00339-009-5338-4","article-title":"Rapid fabrication of optical volume gratings in Foturan glass by femtosecond laser micromachining","volume":"97","author":"He","year":"2009","journal-title":"Appl. Phys. A"},{"key":"ref_63","doi-asserted-by":"crossref","first-page":"353","DOI":"10.1063\/1.1432747","article-title":"Laser ablation of dielectrics with temporally shaped femtosecond pulses","volume":"80","author":"Stoian","year":"2002","journal-title":"Appl. Phys. Lett."},{"key":"ref_64","doi-asserted-by":"crossref","first-page":"9443","DOI":"10.1364\/OE.16.009443","article-title":"Transition from thermal diffusion to heat accumulation in high repetition rate femtosecond laser writing of buried optical waveguides","volume":"16","author":"Eaton","year":"2008","journal-title":"Opt. Express"},{"key":"ref_65","doi-asserted-by":"crossref","first-page":"51","DOI":"10.3788\/COL20080601.0051","article-title":"Influence of scanning velocity on femtosecond laser direct writing lines on FOTURAN glass","volume":"6","author":"Wu","year":"2008","journal-title":"Chin. Opt. Lett."},{"key":"ref_66","doi-asserted-by":"crossref","first-page":"2199","DOI":"10.1103\/PhysRevLett.82.2199","article-title":"Anomalous anisotropic light scattering in Ge-doped silica glass","volume":"82","author":"Kazansky","year":"1999","journal-title":"Phys. Rev. Lett."},{"key":"ref_67","doi-asserted-by":"crossref","unstructured":"Bhardwaj, V.R., Simova, E., Rajeev, P.P., Hnatovsky, C., Taylor, R.S., Rayner, D.M., and Corkum, P.B. (2006). Optically produced arrays of planar nanostructures inside fused silica. Phys. Rev. Lett.","DOI":"10.1103\/PhysRevLett.96.057404"},{"key":"ref_68","doi-asserted-by":"crossref","unstructured":"Salter, P.S., and Booth, M.J. (2012). Dynamic control of directional asymmetry observed in ultrafast laser direct writing. Appl. Phys. Lett.","DOI":"10.1063\/1.4756904"},{"key":"ref_69","doi-asserted-by":"crossref","first-page":"2559","DOI":"10.1364\/OL.32.002559","article-title":"Single-step writing of Bragg grating waveguides in fused silica with an externally modulated femtosecond fiber laser","volume":"32","author":"Zhang","year":"2007","journal-title":"Opt. Lett."},{"key":"ref_70","doi-asserted-by":"crossref","first-page":"8264","DOI":"10.1364\/AO.46.008264","article-title":"Applications of a microlens array and a photomask to the laser microfabrication of a periodic photopolymer rod array","volume":"46","author":"Matsuo","year":"2007","journal-title":"Appl. Opt."},{"key":"ref_71","doi-asserted-by":"crossref","unstructured":"Kondo, T., Juodkazis, S., Mizeikis, V., Matsuo, S., and Misawa, H. (2006). Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography. New J. Phys.","DOI":"10.1088\/1367-2630\/8\/10\/250"},{"key":"ref_72","doi-asserted-by":"crossref","first-page":"1938","DOI":"10.1364\/OL.27.001938","article-title":"Femtosecond micromachining of symmetric waveguides at 1.5 \u00b5m by astigmatic beam focusing","volume":"27","author":"Cerullo","year":"2002","journal-title":"Opt. Lett."},{"key":"ref_73","doi-asserted-by":"crossref","first-page":"55","DOI":"10.1364\/OL.28.000055","article-title":"Control of the cross-sectional shape of a hollow microchannel embedded in photostructurable glass by use of a femtosecond laser","volume":"28","author":"Cheng","year":"2003","journal-title":"Opt. Lett."},{"key":"ref_74","doi-asserted-by":"crossref","first-page":"5676","DOI":"10.1364\/OPEX.13.005676","article-title":"Slit beam shaping method for femtosecond laser direct-write fabrication of symmetric waveguides in bulk glasses","volume":"13","author":"Ams","year":"2005","journal-title":"Opt. Express"},{"key":"ref_75","doi-asserted-by":"crossref","first-page":"208","DOI":"10.1364\/OL.31.000208","article-title":"Femtosecond laser microprocessing with three-dimensionally isotropic spatial resolution using crossed-beam irradiation","volume":"31","author":"Sugioka","year":"2006","journal-title":"Opt. Lett."},{"key":"ref_76","doi-asserted-by":"crossref","first-page":"1106","DOI":"10.1364\/OL.35.001106","article-title":"Fabrication of microfluidic channels with a circular cross section using spatiotemporally focused femtosecond laser pulses","volume":"35","author":"He","year":"2010","journal-title":"Opt. Lett."},{"key":"ref_77","doi-asserted-by":"crossref","unstructured":"He, F., Cheng, Y., Lin, J., Ni, J., Xu, Z., Sugioka, K., and Midorikawa, K. (2011). Independent control of aspect ratios in the axial and lateral cross sections of a focal spot for three-dimensional femtosecond laser micromachining. New J. Phys.","DOI":"10.1088\/1367-2630\/13\/8\/083014"},{"key":"ref_78","doi-asserted-by":"crossref","first-page":"9734","DOI":"10.1364\/OE.22.009734","article-title":"Characterization and control of peak intensity distribution at the focus of a spatiotemporally focused femtosecond laser beam","volume":"22","author":"He","year":"2014","journal-title":"Opt. Express"},{"key":"ref_79","doi-asserted-by":"crossref","first-page":"3329","DOI":"10.1063\/1.120327","article-title":"Photowritten optical waveguides in various glasses with ultrashort pulse laser","volume":"71","author":"Miura","year":"1997","journal-title":"Appl. Phys. Lett."},{"key":"ref_80","doi-asserted-by":"crossref","first-page":"93","DOI":"10.1364\/OL.26.000093","article-title":"Micromachining bulk glass by use of femtosecond laser pulses with nanojoule energy","volume":"26","author":"Schaffer","year":"2001","journal-title":"Opt. Lett."},{"key":"ref_81","doi-asserted-by":"crossref","first-page":"102201","DOI":"10.3788\/COL201210.102201","article-title":"Fabrication of magneto-optical microstructure by femtosecond laser pulses","volume":"10","author":"Li","year":"2012","journal-title":"Chin. Opt. Lett."},{"key":"ref_82","doi-asserted-by":"crossref","first-page":"277","DOI":"10.1364\/OL.26.000277","article-title":"Femtosecond laser-assisted three-dimensional microfabrication in silica","volume":"26","author":"Juodkazis","year":"2001","journal-title":"Opt. Lett."},{"key":"ref_83","doi-asserted-by":"crossref","first-page":"1867","DOI":"10.1364\/OL.30.001867","article-title":"Polarization-selective etching in femtosecond laser-assisted microfluidic channel fabrication in fused silica","volume":"30","author":"Hnatovsky","year":"2005","journal-title":"Opt. Lett."},{"key":"ref_84","doi-asserted-by":"crossref","unstructured":"Yu, X., Liao, Y., He, F., Zeng, B., Cheng, Y., Xu, Z., Sugioka, K., and Midorikawa, K. (2011). Tuning etch selectivity of fused silica irradiated by femtosecond laser pulses by controlling polarization of the writing pulses. J. Appl. Phys.","DOI":"10.1063\/1.3555080"},{"key":"ref_85","doi-asserted-by":"crossref","first-page":"11560","DOI":"10.1021\/jp900915r","article-title":"Examination of etching agent and etching mechanism on femotosecond laser microfabrication of channels inside vitreous silica substrates","volume":"113","author":"Kiyama","year":"2009","journal-title":"J. Phys. Chem. C"},{"key":"ref_86","doi-asserted-by":"crossref","first-page":"126","DOI":"10.2961\/jlmn.2014.02.0009","article-title":"Selective, Laser-Induced Etching of Fused Silica at High Scan-Speeds Using KOH","volume":"9","author":"Hermans","year":"2014","journal-title":"J. Laser Micro Nanoeng."},{"key":"ref_87","doi-asserted-by":"crossref","first-page":"282","DOI":"10.1364\/OL.35.000282","article-title":"Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser","volume":"35","author":"He","year":"2010","journal-title":"Opt. Lett."},{"key":"ref_88","doi-asserted-by":"crossref","unstructured":"He, F., Cheng, Y., Qiao, L., Wang, C., Xu, Z., Sugioka, K., Midorikawa, K., and Wu, J. (2010). Two-photon fluorescence excitation with a microlens fabricated on the fused silica chip by femtosecond laser micromachining. Appl. Phys. Lett.","DOI":"10.1063\/1.3294627"},{"key":"ref_89","doi-asserted-by":"crossref","first-page":"379","DOI":"10.1007\/s00340-011-4520-5","article-title":"Fabrication of hollow optical waveguides in fused silica by three-dimensional femtosecond laser micromachining","volume":"105","author":"He","year":"2011","journal-title":"Appl. Phys. B"},{"key":"ref_90","doi-asserted-by":"crossref","first-page":"10212","DOI":"10.1364\/OE.20.010212","article-title":"On-chip three-dimensional high-Q microcavities fabricated by femtosecond laser direct writing","volume":"20","author":"Lin","year":"2012","journal-title":"Opt. Express"},{"key":"ref_91","doi-asserted-by":"crossref","first-page":"857","DOI":"10.1007\/s00339-002-1937-z","article-title":"3-D microstructuring inside photosensitive glass by femtosecond laser excitation","volume":"76","author":"Masuda","year":"2003","journal-title":"Appl. Phys. A"},{"key":"ref_92","doi-asserted-by":"crossref","first-page":"1912","DOI":"10.1364\/OL.26.001912","article-title":"Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses","volume":"26","author":"Li","year":"2001","journal-title":"Opt. Lett."},{"key":"ref_93","doi-asserted-by":"crossref","first-page":"4236","DOI":"10.1364\/OL.36.004236","article-title":"Femtosecond laser-induced breakdown in distilled water for fabricating the helical microchannels array","volume":"36","author":"Li","year":"2011","journal-title":"Opt. Lett."},{"key":"ref_94","doi-asserted-by":"crossref","first-page":"3225","DOI":"10.1364\/OL.35.003225","article-title":"Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing","volume":"35","author":"Liao","year":"2010","journal-title":"Opt. Lett."},{"key":"ref_95","doi-asserted-by":"crossref","first-page":"746","DOI":"10.1039\/c2lc21015k","article-title":"Rapid prototyping of three-dimensional microfluidic mixers in glass by femtosecond laser direct writing","volume":"12","author":"Liao","year":"2012","journal-title":"Lab Chip"},{"key":"ref_96","doi-asserted-by":"crossref","first-page":"1626","DOI":"10.1039\/c3lc41171k","article-title":"Direct laser writing of sub-50 nm nanofluidic channels buried in glass for three-dimensional micro-nanofluidic integration","volume":"13","author":"Liao","year":"2013","journal-title":"Lab Chip"},{"key":"ref_97","doi-asserted-by":"crossref","first-page":"12743","DOI":"10.1364\/OE.15.012743","article-title":"Selective metallization on insulator surfaces with femtosecond laser pulses","volume":"15","author":"Xu","year":"2007","journal-title":"Opt. Express"},{"key":"ref_98","doi-asserted-by":"crossref","unstructured":"Zhou, Z., Xu, J., Cheng, Y., Xu, Z., Sugioka, K., and Midorikawa, K. (2008). Surface-enhanced Raman scattering substrate fabricated by femtosecond laser direct writing. Jpn. J. Appl. Phys.","DOI":"10.1109\/CLEOPR.2007.4391526"},{"key":"ref_99","doi-asserted-by":"crossref","first-page":"4608","DOI":"10.1039\/c3lc50962a","article-title":"Electrofluidics fabricated by space-selective metallization in glass microfluidic structures using femtosecond laser direct writing","volume":"13","author":"Xu","year":"2013","journal-title":"Lab Chip"},{"key":"ref_100","doi-asserted-by":"crossref","first-page":"1307","DOI":"10.1364\/OL.31.001307","article-title":"Laser-fabricated dielectric optical components for surface plasmon polaritons","volume":"31","author":"Reinhardt","year":"2006","journal-title":"Opt. Lett."},{"key":"ref_101","doi-asserted-by":"crossref","unstructured":"Malinauskas, M., \u017dukauskas, A., Purlys, V., Belazaras, K., Momot, A., Paipulas, D., Gadonas, R., Piskarskas, A., Gilbergs, H., and Gaidukevi\u010di\u016bt\u0117, A. (2010). Femtosecond laser polymerization of hybrid\/integrated micro-optical elements and their characterization. J. Opt.","DOI":"10.1117\/12.854396"},{"key":"ref_102","doi-asserted-by":"crossref","first-page":"458","DOI":"10.1002\/lpor.201400005","article-title":"Hybrid femtosecond laser microfabrication to achieve true 3D glass\/polymer composite biochips with multiscale features and high performance: The concept of ship-in-a-bottle biochip","volume":"8","author":"Wu","year":"2014","journal-title":"Laser Photon. Rev."},{"key":"ref_103","doi-asserted-by":"crossref","first-page":"2285","DOI":"10.1364\/OL.34.002285","article-title":"Surface-enhanced Raman-scattering fiber probe fabricated by femtosecond laser","volume":"34","author":"Lan","year":"2009","journal-title":"Opt. Lett."},{"key":"ref_104","doi-asserted-by":"crossref","first-page":"1458","DOI":"10.1364\/OL.38.001458","article-title":"Low-threshold whispering-gallery-mode microlasers fabricated in a Nd: Glass substrate by three-dimensional femtosecond laser micromachining","volume":"38","author":"Lin","year":"2013","journal-title":"Opt. Lett."},{"key":"ref_105","doi-asserted-by":"crossref","unstructured":"Lenssen, B., and Bellouard, Y. (2012). Optically transparent glass micro-actuator fabricated by femtosecond laser exposure and chemical etching. Appl. Phys. Lett.","DOI":"10.1063\/1.4750236"},{"key":"ref_106","doi-asserted-by":"crossref","first-page":"1762","DOI":"10.1002\/smll.201000511","article-title":"Flexible nanowiring of metal on nonplanar substrates by femtosecond-laser-induced electroless plating","volume":"6","author":"Xu","year":"2010","journal-title":"Small"},{"key":"ref_107","doi-asserted-by":"crossref","first-page":"2120","DOI":"10.1364\/OPEX.12.002120","article-title":"Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching","volume":"12","author":"Bellouard","year":"2004","journal-title":"Opt. Express"},{"key":"ref_108","doi-asserted-by":"crossref","first-page":"1167","DOI":"10.1039\/b920062b","article-title":"Three-dimensional Mach-Zehnder interferometer in a microfluidic chip for spatially-resolved label-free detection","volume":"10","author":"Crespi","year":"2010","journal-title":"Lab Chip"},{"key":"ref_109","doi-asserted-by":"crossref","first-page":"4679","DOI":"10.1364\/OE.18.004679","article-title":"Femtosecond laser fabricated monolithic chip for optical trapping and stretching of single cells","volume":"18","author":"Bellini","year":"2010","journal-title":"Opt. Express"},{"key":"ref_110","doi-asserted-by":"crossref","first-page":"179","DOI":"10.1007\/s00339-010-6096-z","article-title":"A microfluidic chip integrated with a microoptical lens fabricated by femtosecond laser micromachining","volume":"102","author":"Qiao","year":"2011","journal-title":"Appl. Phys. A"},{"key":"ref_111","doi-asserted-by":"crossref","unstructured":"Matsuo, S., Kiyama, S., Shichijo, Y., Tomita, T., Hashimoto, S., Hosokawa, Y., and Masuhara, H. (2008). Laser microfabrication and rotation of ship-in-a-bottle optical rotators. Appl. Phys. Lett.","DOI":"10.1063\/1.2967872"},{"key":"ref_112","doi-asserted-by":"crossref","first-page":"6635","DOI":"10.1364\/OPEX.13.006635","article-title":"Integrating optics and micro-mechanics in a single substrate: A step toward monolithic integration in fused silica","volume":"13","author":"Bellouard","year":"2005","journal-title":"Opt. Express"},{"key":"ref_113","doi-asserted-by":"crossref","first-page":"1370","DOI":"10.1016\/j.optcom.2008.12.028","article-title":"Fabrication of an integrated Raman sensor by selective surface metallization using a femtosecond laser oscillator","volume":"282","author":"Zhou","year":"2009","journal-title":"Opt. Commun."},{"key":"ref_114","doi-asserted-by":"crossref","first-page":"403","DOI":"10.1007\/s10544-007-9149-0","article-title":"Nano-aquarium for dynamic observation of living cells fabricated by femtosecond laser direct writing of photostructurable glass","volume":"10","author":"Hanada","year":"2008","journal-title":"Biomed. Microdev."},{"key":"ref_115","doi-asserted-by":"crossref","first-page":"11","DOI":"10.1007\/s00339-006-3672-3","article-title":"Fabrication of 3D microoptical lenses in photosensitive glass using femtosecond laser micromachining","volume":"85","author":"Cheng","year":"2006","journal-title":"Appl. Phys. A"},{"key":"ref_116","doi-asserted-by":"crossref","first-page":"1144","DOI":"10.1364\/OL.28.001144","article-title":"Three-dimensional micro-optical components embedded in photosensitive glass by a femtosecond laser","volume":"28","author":"Cheng","year":"2003","journal-title":"Opt. Lett."},{"key":"ref_117","doi-asserted-by":"crossref","first-page":"2007","DOI":"10.1364\/OL.29.002007","article-title":"Microfluidic laser embedded in glass by three-dimensional femtosecond laser microprocessing","volume":"29","author":"Cheng","year":"2004","journal-title":"Opt. Lett."},{"key":"ref_118","doi-asserted-by":"crossref","first-page":"1029","DOI":"10.1007\/s00339-003-2447-3","article-title":"Direct fabrication of freely movable microplate inside photosensitive glass by femtosecond laser for lab-on-chip application","volume":"78","author":"Masuda","year":"2004","journal-title":"Appl. Phys. A"},{"key":"ref_119","doi-asserted-by":"crossref","unstructured":"Sugioka, K., Hongo, T., Takai, H., and Midorikawa, K. (2005). Selective metallization of internal walls of hollow structures inside glass using femtosecond laser. Appl. Phys. Lett.","DOI":"10.1063\/1.1921355"},{"key":"ref_120","doi-asserted-by":"crossref","first-page":"1826","DOI":"10.1039\/C4LC00133H","article-title":"Straightforward 3D hydrodynamic focusing in femtosecond laser fabricated microfluidic channels","volume":"14","author":"Bragheri","year":"2014","journal-title":"Lab Chip"},{"key":"ref_121","doi-asserted-by":"crossref","first-page":"106","DOI":"10.1038\/nphoton.2006.96","article-title":"Integrated optofluidics: A new river of light","volume":"1","author":"Monat","year":"2007","journal-title":"Nat. Photon."},{"key":"ref_122","doi-asserted-by":"crossref","first-page":"311","DOI":"10.1039\/B808366E","article-title":"Single cell detection using a glass-based optofluidic device fabricated by femtosecond laser pulses","volume":"9","author":"Kim","year":"2009","journal-title":"Lab Chip"},{"key":"ref_123","doi-asserted-by":"crossref","first-page":"948","DOI":"10.1039\/c2lc20939j","article-title":"A 3D mammalian cell separator biochip","volume":"12","author":"Choudhury","year":"2012","journal-title":"Lab Chip"},{"key":"ref_124","doi-asserted-by":"crossref","first-page":"1536","DOI":"10.1364\/OL.32.001536","article-title":"Fabrication of microfluidic optical waveguides on glass chips with femtosecond laser pulses","volume":"32","author":"Sun","year":"2007","journal-title":"Opt. Lett."},{"key":"ref_125","doi-asserted-by":"crossref","first-page":"91","DOI":"10.1039\/B808360F","article-title":"Integration of femtosecond laser written optical waveguides in a lab-on-chip","volume":"9","author":"Vazquez","year":"2009","journal-title":"Lab Chip"},{"key":"ref_126","doi-asserted-by":"crossref","first-page":"591","DOI":"10.1038\/nmeth.1221","article-title":"Whispering-gallery-mode biosensing: label-free detection down to single molecules","volume":"5","author":"Vollmer","year":"2008","journal-title":"Nat. Methods"},{"key":"ref_127","doi-asserted-by":"crossref","first-page":"46","DOI":"10.1038\/nphoton.2009.237","article-title":"On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator","volume":"4","author":"Zhu","year":"2010","journal-title":"Nat. Photon."},{"key":"ref_128","doi-asserted-by":"crossref","first-page":"14792","DOI":"10.1364\/OE.22.014792","article-title":"Fabrication of an integrated high-quality-factor (high-Q) optofluidic sensor by femtosecond laser micromachining","volume":"22","author":"Song","year":"2014","journal-title":"Opt. Express"},{"key":"ref_129","doi-asserted-by":"crossref","first-page":"1128","DOI":"10.1063\/1.1779954","article-title":"Variable-focus liquid lens for miniature cameras","volume":"85","author":"Kuiper","year":"2004","journal-title":"Appl. Phys. Lett."},{"key":"ref_130","doi-asserted-by":"crossref","first-page":"163","DOI":"10.1016\/0009-2614(74)85388-1","article-title":"Raman spectra of pyridine adsorbed at a silver electrode","volume":"26","author":"Fleischmann","year":"1974","journal-title":"Chem. Phys. Lett."},{"key":"ref_131","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1016\/S0022-0728(77)80224-6","article-title":"Surface Raman spectroelectrochemistry. Part 1. Heterocyclic, aromatic, and aliphatic amines adsorbed on the anodized silver electrode","volume":"84","author":"Jeanmaire","year":"1977","journal-title":"J. Electroanal. Chem."},{"key":"ref_132","doi-asserted-by":"crossref","first-page":"5215","DOI":"10.1021\/ja00457a071","article-title":"Anomalously intense raman spectra of pyridine at a silver electrode","volume":"99","author":"Albrecht","year":"1977","journal-title":"J. Am. Chem. Soc."},{"key":"ref_133","doi-asserted-by":"crossref","first-page":"1667","DOI":"10.1103\/PhysRevLett.78.1667","article-title":"Single molecule detection using surface-enhanced raman scattering (SERS)","volume":"78","author":"Kneipp","year":"1997","journal-title":"Phys. Rev. Lett."},{"key":"ref_134","doi-asserted-by":"crossref","first-page":"1102","DOI":"10.1126\/science.275.5303.1102","article-title":"Probing Single Molecules and Single Nanoparticles by Surface-Enhanced Raman Scattering","volume":"275","author":"Nie","year":"1997","journal-title":"Science"},{"key":"ref_135","doi-asserted-by":"crossref","first-page":"21581","DOI":"10.1364\/OE.17.021581","article-title":"One-step fabrication of nanostructures by femtosecond laser for surface-enhanced Raman scattering","volume":"17","author":"Lin","year":"2009","journal-title":"Opt. Express"},{"key":"ref_136","doi-asserted-by":"crossref","first-page":"11064","DOI":"10.3390\/s101211064","article-title":"Surface-enhanced Raman scattering sensor on an optical fiber probe fabricated with a femtosecond laser","volume":"10","author":"Ma","year":"2010","journal-title":"Sensors"},{"key":"ref_137","doi-asserted-by":"crossref","first-page":"3347","DOI":"10.1039\/c1lc20397e","article-title":"Localized flexible integration of high-efficiency surface enhanced Raman scattering (SERS) monitors into microfluidic channels","volume":"11","author":"Xu","year":"2011","journal-title":"Lab Chip"},{"key":"ref_138","doi-asserted-by":"crossref","first-page":"2109","DOI":"10.1039\/c1lc20101h","article-title":"3D microfluidic chips with integrated functional microelements fabricated by a femtosecond laser for studying the gliding mechanism of cyanobacteria","volume":"11","author":"Hanada","year":"2011","journal-title":"Lab Chip"},{"key":"ref_139","doi-asserted-by":"crossref","first-page":"1527","DOI":"10.1039\/c2lc21091f","article-title":"Optical classification of algae species with a glass lab-on-a-chip","volume":"12","author":"Schaap","year":"2012","journal-title":"Lab Chip"},{"key":"ref_140","doi-asserted-by":"crossref","first-page":"289","DOI":"10.1007\/s13320-012-0095-y","article-title":"Lab-on-fiber technology: A new avenue for optical nanosensors","volume":"2","author":"Consales","year":"2012","journal-title":"Photon. Sens."},{"key":"ref_141","doi-asserted-by":"crossref","first-page":"772","DOI":"10.1016\/j.yofte.2013.07.010","article-title":"Lab-on-fiber devices as an all-around platform for sensing","volume":"19","author":"Ricciardi","year":"2013","journal-title":"Opt. Fiber Technol."},{"key":"ref_142","doi-asserted-by":"crossref","first-page":"69","DOI":"10.1021\/ph400075r","article-title":"Versatile optical fiber nanoprobes: From plasmonic biosensors to polarization-sensitive devices","volume":"1","author":"Ricciardi","year":"2013","journal-title":"ACS Photon."},{"key":"ref_143","doi-asserted-by":"crossref","first-page":"2559","DOI":"10.1364\/OL.31.002559","article-title":"Microchannels in conventional single-mode fibers","volume":"31","author":"Lai","year":"2006","journal-title":"Opt. Lett."},{"key":"ref_144","doi-asserted-by":"crossref","first-page":"3328","DOI":"10.1364\/OL.34.003328","article-title":"Refractive index sensor based on a microhole in single-mode fiber created by the use of femtosecond laser micromachining","volume":"34","author":"Wang","year":"2009","journal-title":"Opt. Lett."},{"key":"ref_145","doi-asserted-by":"crossref","first-page":"8731","DOI":"10.1364\/OE.15.008731","article-title":"Micro-channels machined in microstructured optical fibers by femtosecond laser","volume":"15","author":"Brakel","year":"2007","journal-title":"Opt. Express"},{"key":"ref_146","doi-asserted-by":"crossref","first-page":"536","DOI":"10.1364\/OL.33.000536","article-title":"Miniaturized fiber inline Fabry-Perot interferometer fabricated with a femtosecond laser","volume":"33","author":"Wei","year":"2008","journal-title":"Opt. Lett."},{"key":"ref_147","doi-asserted-by":"crossref","first-page":"110603","DOI":"10.3788\/col201311.110603","article-title":"Fiber inline interferometric refractive index sensors fabricated by femtosecond laser and fusion splicing","volume":"11","author":"Yu","year":"2013","journal-title":"Chin. Opt. Lett."},{"key":"ref_148","doi-asserted-by":"crossref","first-page":"335","DOI":"10.1364\/OL.38.000335","article-title":"Single microchannel high-temperature fiber sensor by femtosecond laser-induced water breakdown","volume":"38","author":"Yi","year":"2013","journal-title":"Opt. Lett."},{"key":"ref_149","doi-asserted-by":"crossref","first-page":"14123","DOI":"10.1364\/OE.15.014123","article-title":"Micro Fabry-Perot interferometers in silica fibers machined by femtosecond laser","volume":"15","author":"Rao","year":"2007","journal-title":"Opt. Express"},{"key":"ref_150","doi-asserted-by":"crossref","first-page":"5764","DOI":"10.1364\/OE.16.005764","article-title":"Temperature-insensitive miniaturized fiber inline Fabry-Perot interferometer for highly sensitive refractive index measurement","volume":"16","author":"Wei","year":"2008","journal-title":"Opt. Express"},{"key":"ref_151","doi-asserted-by":"crossref","first-page":"956","DOI":"10.1364\/OL.33.000956","article-title":"Directly written monolithic waveguide laser incorporating a distributed feedback waveguide-Bragg grating","volume":"33","author":"Marshall","year":"2008","journal-title":"Opt. Lett."},{"key":"ref_152","doi-asserted-by":"crossref","first-page":"675","DOI":"10.3788\/COL20090708.0675","article-title":"Dual-wavelength FBG inscribed by femtosecond laser for simultaneous measurement of high temperature and strain","volume":"7","author":"Zhu","year":"2009","journal-title":"Chin. Opt. Lett."},{"key":"ref_153","doi-asserted-by":"crossref","first-page":"646","DOI":"10.1364\/OL.24.000646","article-title":"Fabrication of long-period fiber gratings by focused irradiation of infrared femtosecond laser pulses","volume":"4","author":"Kondo","year":"1999","journal-title":"Opt. Lett."},{"key":"ref_154","doi-asserted-by":"crossref","first-page":"1007","DOI":"10.1364\/OL.35.001007","article-title":"Femtosecond laser fabricated fiber Bragg grating in microfiber for refractive index sensing","volume":"35","author":"Fang","year":"2010","journal-title":"Opt. Lett."},{"key":"ref_155","doi-asserted-by":"crossref","unstructured":"Malinauskas, M., Gilbergs, H., \u017dukauskas, A., Purlys, V., Paipulas, D., and Gadonas, R. (2010). A femtosecond laser-induced two-photon photopolymerization technique for structuring microlenses. J. Opt.","DOI":"10.1117\/12.821776"},{"key":"ref_156","doi-asserted-by":"crossref","first-page":"810","DOI":"10.1364\/OPEX.14.000810","article-title":"Micro lens fabrication by means of femtosecond two photon photopolymerization","volume":"14","author":"Guo","year":"2006","journal-title":"Opt. Express"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/14\/10\/19402\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T21:17:05Z","timestamp":1760217425000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/14\/10\/19402"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2014,10,17]]},"references-count":156,"journal-issue":{"issue":"10","published-online":{"date-parts":[[2014,10]]}},"alternative-id":["s141019402"],"URL":"https:\/\/doi.org\/10.3390\/s141019402","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2014,10,17]]}}}