{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,2,6]],"date-time":"2026-02-06T01:07:48Z","timestamp":1770340068318,"version":"3.49.0"},"reference-count":20,"publisher":"MDPI AG","issue":"12","license":[{"start":{"date-parts":[[2014,11,25]],"date-time":"2014-11-25T00:00:00Z","timestamp":1416873600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"KIST Institutional Program","award":["2E23032"],"award-info":[{"award-number":["2E23032"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>The ability to measure pressure and force is essential in biomedical applications such as minimally invasive surgery (MIS) and palpation for detecting cancer cysts. Here, we report a force sensor for measuring a shear and normal force by combining an arrayed piezoelectric sensors layer with a precut glass top plate connected by four stress concentrating legs. We designed and fabricated a thin film piezoelectric force sensor and proposed an enhanced sensing tool to be used for analyzing gentle touches without the external voltage source used in FET sensors. Both the linear sensor response from 3 kPa to 30 kPa and the exact signal responses from the moving direction illustrate the strong feasibility of the described thin film miniaturized piezoelectric force sensor.<\/jats:p>","DOI":"10.3390\/s141222199","type":"journal-article","created":{"date-parts":[[2014,11,25]],"date-time":"2014-11-25T11:01:31Z","timestamp":1416913291000},"page":"22199-22207","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":57,"title":["A Micro-Fabricated Force Sensor Using an All Thin Film Piezoelectric Active Sensor"],"prefix":"10.3390","volume":"14","author":[{"given":"Junwoo","family":"Lee","sequence":"first","affiliation":[{"name":"Department of Electrical Engineering, Kwangwoon University, 447-1, Wolgye, Nowon,  Seoul 139-701, Korea"}]},{"given":"Wook","family":"Choi","sequence":"additional","affiliation":[{"name":"Department of Electrical Engineering, Kwangwoon University, 447-1, Wolgye, Nowon,  Seoul 139-701, Korea"}]},{"given":"Yong","family":"Yoo","sequence":"additional","affiliation":[{"name":"Department of Electrical Engineering, Kwangwoon University, 447-1, Wolgye, Nowon,  Seoul 139-701, Korea"}]},{"given":"Kyo","family":"Hwang","sequence":"additional","affiliation":[{"name":"Korea Institute of Science and Technology (KIST), Seoul 136-791, Korea"}]},{"given":"Sang-Myung","family":"Lee","sequence":"additional","affiliation":[{"name":"Department of Chemical Engineering, Kangwon National University, Chuncheon 200-701, Korea"}]},{"given":"Sungchul","family":"Kang","sequence":"additional","affiliation":[{"name":"Korea Institute of Science and Technology (KIST), Seoul 136-791, Korea"}]},{"given":"Jinseok","family":"Kim","sequence":"additional","affiliation":[{"name":"Korea Institute of Science and Technology (KIST), Seoul 136-791, Korea"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-7344-6060","authenticated-orcid":false,"given":"Jeong","family":"Lee","sequence":"additional","affiliation":[{"name":"Department of Electrical Engineering, Kwangwoon University, 447-1, Wolgye, Nowon,  Seoul 139-701, Korea"}]}],"member":"1968","published-online":{"date-parts":[[2014,11,25]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"788","DOI":"10.1038\/nnano.2011.184","article-title":"Skin-like pressure and strain sensors based on transparent elastic films of carbon nanotubes","volume":"6","author":"Lipomi","year":"2011","journal-title":"Nat. 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