{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,24]],"date-time":"2026-03-24T05:18:55Z","timestamp":1774329535765,"version":"3.50.1"},"reference-count":27,"publisher":"MDPI AG","issue":"12","license":[{"start":{"date-parts":[[2014,12,2]],"date-time":"2014-12-02T00:00:00Z","timestamp":1417478400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This work demonstrates the improvement of mass detection sensitivity and time response using a simple sensor structure. Indeed, complicated technological processes leading to very brittle sensing structures are often required to reach high sensitivity when we want to detect specific molecules in biological fields. These developments constitute an obstacle to the early diagnosis of diseases. An alternative is the design of coupled structures. In this study, the device is based on the piezoelectric excitation and detection of two GaAs microstructures vibrating in antisymmetric modes. GaAs is a crystal which has the advantage to be micromachined easily using typical clean room processes. Moreover, we showed its high potential in direct biofunctionalisation for use in the biological field. A specific design of the device was performed to improve the detection at low mass and an original detection method has been developed. The principle is to exploit the variation in amplitude at the initial resonance frequency which has in the vicinity of weak added mass the greatest slope. Therefore, we get a very good resolution for an infinitely weak mass: relative voltage variation of 8%\/1 fg. The analysis is based on results obtained by finite element simulation.<\/jats:p>","DOI":"10.3390\/s141222785","type":"journal-article","created":{"date-parts":[[2014,12,2]],"date-time":"2014-12-02T10:57:54Z","timestamp":1417517874000},"page":"22785-22797","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":8,"title":["GaAs Coupled Micro Resonators with Enhanced Sensitive  Mass Detection"],"prefix":"10.3390","volume":"14","author":[{"given":"Tony","family":"Chopard","sequence":"first","affiliation":[{"name":"FEMTO-ST Institute, Universit\u00e9 de Franche-Comt\u00e9, 15B avenue des Montboucons,  25030 Besan\u00e7on Cedex, France"}]},{"given":"Vivien","family":"Lacour","sequence":"additional","affiliation":[{"name":"FEMTO-ST Institute, Universit\u00e9 de Franche-Comt\u00e9, 15B avenue des Montboucons,  25030 Besan\u00e7on Cedex, France"},{"name":"Institute for Interdisciplinary Innovations in Technology (3IT), Faculty of Engineering,  Universit\u00e9 de Sherbrooke, 3000 Boulevard de l'Universit\u00e9, Sherbrooke, QC J1K OA5, Canada"}]},{"given":"Therese","family":"Leblois","sequence":"additional","affiliation":[{"name":"FEMTO-ST Institute, Universit\u00e9 de Franche-Comt\u00e9, 15B avenue des Montboucons,  25030 Besan\u00e7on Cedex, France"}]}],"member":"1968","published-online":{"date-parts":[[2014,12,2]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"122","DOI":"10.1016\/S0925-4005(01)00683-9","article-title":"A chemical sensor based on a microfabricated cantiler array with simultaneous resonance-frequency and bending readout","volume":"77","author":"Battiston","year":"2001","journal-title":"Sens. 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