{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,24]],"date-time":"2026-03-24T21:03:55Z","timestamp":1774386235436,"version":"3.50.1"},"reference-count":12,"publisher":"MDPI AG","issue":"1","license":[{"start":{"date-parts":[[2015,1,16]],"date-time":"2015-01-16T00:00:00Z","timestamp":1421366400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>In this article nickel interdigital capacitors were fabricated on top of silicon substrates. The capacitance of the interdigital capacitor was optimized by coating the electrodes with a 60 nm layer of HfO2. An analytical solution of the capacitance was compared to electromagnetic simulations using COMSOL and with experimental measurements. Results show that modeling interdigital capacitors using Finite Element Method software such as COMSOL is effective in the design and electrical characterization of these transducers.<\/jats:p>","DOI":"10.3390\/s150101998","type":"journal-article","created":{"date-parts":[[2015,1,16]],"date-time":"2015-01-16T10:23:36Z","timestamp":1421403816000},"page":"1998-2005","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":22,"title":["Design and Fabrication of Interdigital Nanocapacitors Coated with HfO2"],"prefix":"10.3390","volume":"15","author":[{"given":"Gabriel","family":"Gonz\u00e1lez","sequence":"first","affiliation":[{"name":"Conacyt, Universidad Aut\u00f3noma de San Luis Potos\u00ed, 78000 San Luis Potos\u00ed, Mexico"},{"name":"Coordinaci\u00f3n para la Innovaci\u00f3n y la Aplicaci\u00f3n de la Ciencia y la Tecnolog\u00eda, Universidad Aut\u00f3noma de San Luis Potos\u00ed, 78000 San Luis Potos\u00ed, Mexico"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-7583-8655","authenticated-orcid":false,"given":"Eleazar","family":"Kolosovas-Machuca","sequence":"additional","affiliation":[{"name":"Coordinaci\u00f3n para la Innovaci\u00f3n y la Aplicaci\u00f3n de la Ciencia y la Tecnolog\u00eda, Universidad Aut\u00f3noma de San Luis Potos\u00ed, 78000 San Luis Potos\u00ed, Mexico"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Edgar","family":"L\u00f3pez-Luna","sequence":"additional","affiliation":[{"name":"Coordinaci\u00f3n para la Innovaci\u00f3n y la Aplicaci\u00f3n de la Ciencia y la Tecnolog\u00eda, Universidad Aut\u00f3noma de San Luis Potos\u00ed, 78000 San Luis Potos\u00ed, Mexico"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Heber","family":"Hern\u00e1ndez-Arriaga","sequence":"additional","affiliation":[{"name":"Coordinaci\u00f3n para la Innovaci\u00f3n y la Aplicaci\u00f3n de la Ciencia y la Tecnolog\u00eda, Universidad Aut\u00f3noma de San Luis Potos\u00ed, 78000 San Luis Potos\u00ed, Mexico"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-1346-9073","authenticated-orcid":false,"given":"Francisco","family":"Gonz\u00e1lez","sequence":"additional","affiliation":[{"name":"Coordinaci\u00f3n para la Innovaci\u00f3n y la Aplicaci\u00f3n de la Ciencia y la Tecnolog\u00eda, Universidad Aut\u00f3noma de San Luis Potos\u00ed, 78000 San Luis Potos\u00ed, Mexico"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2015,1,16]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"808","DOI":"10.1109\/JPROC.2004.826603","article-title":"Interdigital sensors and transducers","volume":"92","author":"Mamishev","year":"2004","journal-title":"IEEE Proc."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"546","DOI":"10.3390\/s5120546","article-title":"Novel planar electromagnetic sensors: Modeling and performance evaluation","volume":"5","author":"Mukhopadhyay","year":"2005","journal-title":"Sensors"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"510","DOI":"10.1002\/mop.24967","article-title":"Miniaturized band-stop filter based on multilayer-technique and new coupled octagonal defected ground structure with interdigital capacitor","volume":"52","author":"Boutejdar","year":"2010","journal-title":"Microw. 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