{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,12]],"date-time":"2026-05-12T13:15:35Z","timestamp":1778591735650,"version":"3.51.4"},"reference-count":30,"publisher":"MDPI AG","issue":"6","license":[{"start":{"date-parts":[[2015,6,22]],"date-time":"2015-06-22T00:00:00Z","timestamp":1434931200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Three different electrothermally-actuated MEMS micromirrors with Cr\/Au-Si bimorph actuators are proposed. The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. (Durham, NC, USA). A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors. Electrothermal actuation has achieved a large angular movement in the micromirrors. Application of an external electric current 0.04 A to the bending-type, restricted-torsion-type, and free-torsion-type mirrors achieved rotation angles of 1.69\u00b0, 3.28\u00b0, and 3.64\u00b0, respectively.<\/jats:p>","DOI":"10.3390\/s150614745","type":"journal-article","created":{"date-parts":[[2015,6,22]],"date-time":"2015-06-22T12:06:06Z","timestamp":1434974766000},"page":"14745-14756","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":16,"title":["Electrothermally-Actuated Micromirrors with Bimorph Actuators\u2014Bending-Type and Torsion-Type"],"prefix":"10.3390","volume":"15","author":[{"given":"Cheng-Hua","family":"Tsai","sequence":"first","affiliation":[{"name":"Graduate Institute of Photonics and Optoelectronics and the Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chun-Wei","family":"Tsai","sequence":"additional","affiliation":[{"name":"Graduate Institute of Photonics and Optoelectronics and the Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Hsu-Tang","family":"Chang","sequence":"additional","affiliation":[{"name":"Graduate Institute of Photonics and Optoelectronics and the Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Shih-Hsiang","family":"Liu","sequence":"additional","affiliation":[{"name":"Graduate Institute of Photonics and Optoelectronics and the Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jui-Che","family":"Tsai","sequence":"additional","affiliation":[{"name":"Graduate Institute of Photonics and Optoelectronics and the Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2015,6,22]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"4433","DOI":"10.1109\/JLT.2006.886405","article-title":"Optical MEMS for Lightwave Communication","volume":"24","author":"Wu","year":"2006","journal-title":"J. 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