{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T21:15:42Z","timestamp":1760217342450,"version":"build-2065373602"},"reference-count":23,"publisher":"MDPI AG","issue":"9","license":[{"start":{"date-parts":[[2015,8,28]],"date-time":"2015-08-28T00:00:00Z","timestamp":1440720000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>We propose an electrostatically-actuated microelectromechanical digital-to-analog converter (M-DAC) device with low actuation voltage. The spring structures of the  silicon-based M-DAC device were monolithically fabricated using parylene-C. Because the Young\u2019s modulus of parylene-C is considerably lower than that of silicon, the electrostatic microactuators in the proposed device require much lower actuation voltages. The actuation voltage of the proposed M-DAC device is approximately 6 V, which is less than one half of the actuation voltages of a previously reported M-DAC equipped with electrostatic microactuators. The measured total displacement of the proposed three-bit  M-DAC is nearly 504 nm, and the motion step is approximately 72 nm. Furthermore, we demonstrated that the M-DAC can be employed as a mirror platform with discrete displacement output for a noncontact surface profiling system.<\/jats:p>","DOI":"10.3390\/s150921567","type":"journal-article","created":{"date-parts":[[2015,9,1]],"date-time":"2015-09-01T10:55:58Z","timestamp":1441104958000},"page":"21567-21580","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":4,"title":["Low-Actuation Voltage MEMS Digital-to-Analog Converter with Parylene Spring Structures"],"prefix":"10.3390","volume":"15","author":[{"given":"Cheng-Wen","family":"Ma","sequence":"first","affiliation":[{"name":"Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan"}]},{"given":"Fu-Wei","family":"Lee","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan"}]},{"given":"Hsin-Hung","family":"Liao","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan"}]},{"given":"Wen-Cheng","family":"Kuo","sequence":"additional","affiliation":[{"name":"Department of Mechanical and Automation Engineering and Graduate Institute of Industrial Design, National Kaohsiung First University of Science and Technology, Kaoshiung 824, Taiwan"}]},{"given":"Yao-Joe","family":"Yang","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan"}]}],"member":"1968","published-online":{"date-parts":[[2015,8,28]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"218","DOI":"10.1109\/84.846702","article-title":"Microelectromechanical digital-to-analog converters of displacement for step motion actuators","volume":"9","author":"Toshiyoshi","year":"2000","journal-title":"J. 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