{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T04:25:48Z","timestamp":1760243148389,"version":"build-2065373602"},"reference-count":16,"publisher":"MDPI AG","issue":"10","license":[{"start":{"date-parts":[[2015,10,12]],"date-time":"2015-10-12T00:00:00Z","timestamp":1444608000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>The optimization of an surface acoustic wave (SAW)-based rate sensor incorporating metallic dot arrays was performed by using the approach of partial-wave analysis in layered media. The optimal sensor chip designs, including the material choice of piezoelectric crystals and metallic dots, dot thickness, and sensor operation frequency were determined theoretically. The theoretical predictions were confirmed experimentally by using the developed SAW sensor composed of differential delay line-oscillators and a metallic dot array deposited along the acoustic wave propagation path of the SAW delay lines. A significant improvement in sensor sensitivity was achieved in the case of 128\u00b0 YX LiNbO3, and a thicker Au dot array, and low operation frequency were used to structure the sensor.<\/jats:p>","DOI":"10.3390\/s151025761","type":"journal-article","created":{"date-parts":[[2015,10,14]],"date-time":"2015-10-14T02:36:30Z","timestamp":1444790190000},"page":"25761-25773","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":12,"title":["Optimization of Surface Acoustic Wave-Based Rate Sensors"],"prefix":"10.3390","volume":"15","author":[{"given":"Fangqian","family":"Xu","sequence":"first","affiliation":[{"name":"Zhejiang University of Media and Communications, 998 Xueyuan Street Higher Education Zone Xia Sha, Zhejiang 310018, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Wen","family":"Wang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Acoustics, Institute of Acoustics, Chinese Academy of Sciences, No. 21, BeiSiHuan West Road, Beijing 100190, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xiuting","family":"Shao","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Acoustics, Institute of Acoustics, Chinese Academy of Sciences, No. 21, BeiSiHuan West Road, Beijing 100190, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xinlu","family":"Liu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Acoustics, Institute of Acoustics, Chinese Academy of Sciences, No. 21, BeiSiHuan West Road, Beijing 100190, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yong","family":"Liang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Acoustics, Institute of Acoustics, Chinese Academy of Sciences, No. 21, BeiSiHuan West Road, Beijing 100190, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2015,10,12]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"214","DOI":"10.1134\/S2075108711040109","article-title":"State of the art and prospects for the development of SAW-based soli-state gyros","volume":"4","author":"Lukyanov","year":"2011","journal-title":"Gyroscopy Navig."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"33","DOI":"10.1016\/S0924-4247(97)01713-5","article-title":"A surface-acoustic-wave gyro sensor","volume":"66","author":"Kurosaws","year":"1998","journal-title":"Sens. Actuators A Phys."},{"key":"ref_3","doi-asserted-by":"crossref","unstructured":"Biryukov, S.V., Chmidt, H., and Weihnacht, M. (2009, January 20\u201323). Gyroscopic Effect for SAW in Common Piezoelectric Crystals. Proceedings of the 2009 IEEE International Ultrasonics Symposium (IUS), Rome, Italy.","DOI":"10.1109\/ULTSYM.2009.5441457"},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"2272","DOI":"10.1088\/0960-1317\/17\/11\/014","article-title":"A micro rate gyroscope based on the SAW gyroscopic effect","volume":"17","author":"Lee","year":"2007","journal-title":"J. Micromech. Microeng."},{"key":"ref_5","doi-asserted-by":"crossref","unstructured":"Lee, S.W., Rhim, J.W., Park, S.W., and Yang, S.K. (2007, January 28\u201331). A Novel Micro Rate Sensor using a Surface-Acoustic-Wave (SAW) Delay-Line Oscillator. Proceedings of the 2007 IEEE on Sensors, Atlanta, GA, USA.","DOI":"10.1109\/ICSENS.2007.4388612"},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"10894","DOI":"10.3390\/s111110894","article-title":"Development of a new surface acoustic wave based gyroscope on a X-112\u00b0Y LiTaO3 substrate","volume":"11","author":"Wang","year":"2011","journal-title":"Sensors"},{"key":"ref_7","doi-asserted-by":"crossref","unstructured":"Yan, Q., Wei, Y., Shen, M., Zhu, J., and Li, Y. (2007, January 5\u20138). Theoretical and Experimental Study of Surface Acoustic Wave Gyroscopic Effect. Proceedings of the International Conference on Mechatronics and Automation, Harbin, China.","DOI":"10.1109\/ICMA.2007.4304182"},{"key":"ref_8","doi-asserted-by":"crossref","unstructured":"Wang, W., Xu, F.Q., Li, S.Z., He, S.T., Li, S.Z., and Lee, K. (2010). A new micro-rate sensor based on shear horizontal SAW gyroscopic effect. Jpn. J. Appl. Phys., 49.","DOI":"10.1143\/JJAP.49.096602"},{"key":"ref_9","doi-asserted-by":"crossref","unstructured":"Oh, H., Lee, K., Yang, S.S., and Wang, W. (2011). Enhanced sensitivity of a surface acoustic wave gyroscope using a progressive wave. J. Micromech. Microeng., 21.","DOI":"10.1088\/0960-1317\/21\/7\/075015"},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"3908","DOI":"10.3390\/s140303908","article-title":"Enhanced Sensitivity of Surface Acoustic Wave-Based Rate Sensors Incorporating Metallic Dot Arrays","volume":"14","author":"Wang","year":"2014","journal-title":"Sensors"},{"key":"ref_11","doi-asserted-by":"crossref","unstructured":"Wang, W., Shao, X.T., Liu, J.L., and He, S.T. (2012, January 7\u201310). Theoretical analysis on SAW gyroscopic effect combining with metallic dot array. Proceedings of the 2012 IEEE International Ultrasonics Symposium (IUS), Dresden, Germany.","DOI":"10.1109\/ULTSYM.2012.0603"},{"key":"ref_12","doi-asserted-by":"crossref","unstructured":"Wang, W., Li, S.Z., and Liu, M.H. (2011, January 5\u20139). Theoretical Analysis on Gyroscopic Effect in Surface Acoustic Waves. Proceedings of the 2011 16th International Conference on Solid-State Sensors, Actuators and Microsystems, Beijing, China.","DOI":"10.1109\/TRANSDUCERS.2011.5969168"},{"key":"ref_13","unstructured":"Auld, B. (1973). Acoustic Fields and Waves in Solids, Wiley."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"425","DOI":"10.1016\/0038-1098(94)90035-3","article-title":"Comparison of the constrained and unconstrained Monte-Carlo method: The case of Cu3Au","volume":"90","author":"Polatoglou","year":"1994","journal-title":"Solid State Commun."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"422","DOI":"10.1016\/j.snb.2007.02.037","article-title":"Enhanced Sensitivity of SAW Gas Sensor Coated Molecularly Imprinted Polymer Incorporating High Frequency Stability Oscillator","volume":"125","author":"Wang","year":"2007","journal-title":"Sens. Actuators B Chem."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"1526","DOI":"10.3390\/s110201526","article-title":"Advances in SXFA-Coated SAW Chemical Sensors for Organophosphorous Compound Detection","volume":"11","author":"Wang","year":"2011","journal-title":"Sensors"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/15\/10\/25761\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T20:49:55Z","timestamp":1760215795000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/15\/10\/25761"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2015,10,12]]},"references-count":16,"journal-issue":{"issue":"10","published-online":{"date-parts":[[2015,10]]}},"alternative-id":["s151025761"],"URL":"https:\/\/doi.org\/10.3390\/s151025761","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2015,10,12]]}}}