{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,2,5]],"date-time":"2026-02-05T11:51:46Z","timestamp":1770292306804,"version":"3.49.0"},"reference-count":47,"publisher":"MDPI AG","issue":"10","license":[{"start":{"date-parts":[[2015,10,14]],"date-time":"2015-10-14T00:00:00Z","timestamp":1444780800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>A capacitive acoustic resonator developed by combining three-dimensional (3D) printing and two-dimensional (2D) printed electronics technique is described. During this work, a patterned bottom structure with rigid backplate and cavity is fabricated directly by a 3D printing method, and then a direct write inkjet printing technique has been employed to print a silver conductive layer. A novel approach has been used to fabricate a diaphragm for the acoustic sensor as well, where the conductive layer is inkjet-printed on a  pre-stressed thin organic film. After assembly, the resulting structure contains an electrically conductive diaphragm positioned at a distance from a fixed bottom electrode separated by a spacer. Measurements confirm that the transducer acts as capacitor. The deflection of the diaphragm in response to the incident acoustic single was observed by a laser Doppler vibrometer and the corresponding change of capacitance has been calculated, which is then compared with the numerical result. Observation confirms that the device performs as a resonator and provides adequate sensitivity and selectivity at its resonance frequency.<\/jats:p>","DOI":"10.3390\/s151026018","type":"journal-article","created":{"date-parts":[[2015,10,14]],"date-time":"2015-10-14T10:52:42Z","timestamp":1444819962000},"page":"26018-26038","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":32,"title":["Fabrication of Capacitive Acoustic Resonators Combining 3D Printing and 2D Inkjet Printing Techniques"],"prefix":"10.3390","volume":"15","author":[{"given":"Rubaiyet","family":"Haque","sequence":"first","affiliation":[{"name":"Centre Micro\u00e9lectronique de Provence (CMP), \u00c9cole Nationale Sup\u00e9rieure des Mines de  Saint-\u00c9tienne, 13541 Gardanne, France"}]},{"given":"Erick","family":"Ogam","sequence":"additional","affiliation":[{"name":"Laboratoire de M\u00e9canique et D\u2019Acoustique UPR7051 CNRS, 31 Chemin Josep Aiguier,  13402 Marseille, France"}]},{"given":"Christophe","family":"Loussert","sequence":"additional","affiliation":[{"name":"TAGSYS RFID, 13600 La Ciotat, France"}]},{"given":"Patrick","family":"Benaben","sequence":"additional","affiliation":[{"name":"Centre Micro\u00e9lectronique de Provence (CMP), \u00c9cole Nationale Sup\u00e9rieure des Mines de  Saint-\u00c9tienne, 13541 Gardanne, France"}]},{"given":"Xavier","family":"Boddaert","sequence":"additional","affiliation":[{"name":"Centre Micro\u00e9lectronique de Provence (CMP), \u00c9cole Nationale Sup\u00e9rieure des Mines de  Saint-\u00c9tienne, 13541 Gardanne, France"}]}],"member":"1968","published-online":{"date-parts":[[2015,10,14]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1016\/0924-4247(94)00790-X","article-title":"A Review of Silicon Microphones","volume":"44","author":"Scheeper","year":"1994","journal-title":"Sens. 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