{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,6]],"date-time":"2026-04-06T15:48:10Z","timestamp":1775490490744,"version":"3.50.1"},"reference-count":35,"publisher":"MDPI AG","issue":"10","license":[{"start":{"date-parts":[[2015,10,23]],"date-time":"2015-10-23T00:00:00Z","timestamp":1445558400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>A methanol microsensor integrated with a micro heater manufactured using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technique was presented. The sensor has a capability of detecting low concentration methanol gas. Structure of the sensor is composed of interdigitated electrodes, a sensitive film and a heater. The heater located under the interdigitated electrodes is utilized to provide a working temperature to the sensitive film. The sensitive film prepared by the sol-gel method is tin dioxide doped cadmium sulfide, which is deposited on the interdigitated electrodes. To obtain the suspended structure and deposit the sensitive film, the sensor needs a post-CMOS process to etch the sacrificial silicon dioxide layer and silicon substrate. The methanol senor is a resistive type. A readout circuit converts the resistance variation of the sensor into the output voltage. The experimental results show that the methanol sensor has a sensitivity of 0.18 V\/ppm.<\/jats:p>","DOI":"10.3390\/s151027047","type":"journal-article","created":{"date-parts":[[2015,10,24]],"date-time":"2015-10-24T08:27:06Z","timestamp":1445675226000},"page":"27047-27059","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":20,"title":["Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique"],"prefix":"10.3390","volume":"15","author":[{"given":"Chien-Fu","family":"Fong","sequence":"first","affiliation":[{"name":"Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ching-Liang","family":"Dai","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chyan-Chyi","family":"Wu","sequence":"additional","affiliation":[{"name":"Department of Mechanical and Electro-Mechanical Engineering, Tamkang University, Tamsui 251, Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2015,10,23]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"1885","DOI":"10.3390\/s150101885","article-title":"Development of fabric-based chemical as sensors for use as wearable electronic noses","volume":"15","author":"Seesaard","year":"2015","journal-title":"Sensors"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"5528","DOI":"10.3390\/s130505528","article-title":"A compact and low cost electronic electronic nose for aroma detection","volume":"13","author":"Agudo","year":"2013","journal-title":"Sensors"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"3608","DOI":"10.1166\/jnn.2006.17992","article-title":"Carbon nanotubes based methanol sensor for fuel cells application","volume":"6","author":"Kim","year":"2006","journal-title":"J. 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