{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,1,30]],"date-time":"2026-01-30T10:50:51Z","timestamp":1769770251427,"version":"3.49.0"},"reference-count":22,"publisher":"MDPI AG","issue":"4","license":[{"start":{"date-parts":[[2016,4,12]],"date-time":"2016-04-12T00:00:00Z","timestamp":1460419200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"national natural science foundation of China","doi-asserted-by":"publisher","award":["61223002"],"award-info":[{"award-number":["61223002"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Sichuan Youth Science and Technology Innovation Research Team Funding","award":["2011JTD0006"],"award-info":[{"award-number":["2011JTD0006"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>We report in this paper on the study of surface acoustic wave (SAW) resonators based on an AlN\/titanium alloy (TC4) structure. The AlN\/TC4 structure with different thicknesses of AlN films was simulated, and the acoustic propagating modes were discussed. Based on the simulation results, interdigital transducers with a periodic length of 24 \u03bcm were patterned by lift-off photolithography techniques on the AlN films\/TC4 structure, while the AlN film thickness was in the range 1.5\u20133.5 \u03bcm. The device performances in terms of quality factor (Q-factor) and electromechanical coupling coefficient (k2) were determined from the measure S11 parameters. The Q-factor and k2 were strongly dependent not only on the normalized AlN film thickness but also on the full-width at half-maximum (FWHM) of AlN (002) peak. The dispersion curve of the SAW phase velocity was analyzed, and the experimental results showed a good agreement with simulations. The temperature behaviors of the devices were also presented and discussed. The prepared SAW resonators based on AlN\/TC4 structure have potential applications in integrated micromechanical sensing systems.<\/jats:p>","DOI":"10.3390\/s16040526","type":"journal-article","created":{"date-parts":[[2016,4,12]],"date-time":"2016-04-12T10:57:33Z","timestamp":1460458653000},"page":"526","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":42,"title":["The Characterization of Surface Acoustic Wave Devices Based on AlN-Metal Structures"],"prefix":"10.3390","volume":"16","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-1601-8590","authenticated-orcid":false,"given":"Lin","family":"Shu","sequence":"first","affiliation":[{"name":"State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China"}]},{"given":"Bin","family":"Peng","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China"}]},{"given":"Chuan","family":"Li","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China"}]},{"given":"Dongdong","family":"Gong","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China"}]},{"given":"Zhengbing","family":"Yang","sequence":"additional","affiliation":[{"name":"China Gas Turbine Establishment, Jiangyou 621703, China"}]},{"given":"Xingzhao","family":"Liu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China"}]},{"given":"Wanli","family":"Zhang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China"}]}],"member":"1968","published-online":{"date-parts":[[2016,4,12]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"144","DOI":"10.3390\/s140100144","article-title":"High-Temperature Piezoelectric Sensing","volume":"14","author":"Jiang","year":"2013","journal-title":"Sensors"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"1993","DOI":"10.1109\/JSEN.2011.2181160","article-title":"Fastener Failure Detection Using a Surface Acoustic Wave Strain Sensor","volume":"12","author":"Wilson","year":"2012","journal-title":"IEEE Sens. 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