{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T04:19:37Z","timestamp":1760242777322,"version":"build-2065373602"},"reference-count":45,"publisher":"MDPI AG","issue":"6","license":[{"start":{"date-parts":[[2016,6,21]],"date-time":"2016-06-21T00:00:00Z","timestamp":1466467200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100000781","name":"European Research Council","doi-asserted-by":"publisher","award":["NANOFORCELLS (ERC-StG-2011-278860)."],"award-info":[{"award-number":["NANOFORCELLS (ERC-StG-2011-278860)."]}],"id":[{"id":"10.13039\/501100000781","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Thickness characterization of thin films is of primary importance in a variety of nanotechnology applications, either in the semiconductor industry, quality control in nanofabrication processes or engineering of nanoelectromechanical systems (NEMS) because small thickness variability can strongly compromise the device performance. Here, we present an alternative optical method in bright field mode called Spatially Multiplexed Micro-Spectrophotometry that allows rapid and non-destructive characterization of thin films over areas of mm2 and with 1 \u03bcm of lateral resolution. We demonstrate an accuracy of 0.1% in the thickness characterization through measurements performed on four microcantilevers that expand an area of 1.8 mm2 in one minute of analysis time. The measured thickness variation in the range of few tens of nm translates into a mechanical variability that produces an error of up to 2% in the response of the studied devices when they are used to measure surface stress variations.<\/jats:p>","DOI":"10.3390\/s16060926","type":"journal-article","created":{"date-parts":[[2016,6,23]],"date-time":"2016-06-23T00:43:08Z","timestamp":1466642588000},"page":"926","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":1,"title":["Spatially Multiplexed Micro-Spectrophotometry in Bright Field Mode for Thin Film Characterization"],"prefix":"10.3390","volume":"16","author":[{"given":"Valerio","family":"Pini","sequence":"first","affiliation":[{"name":"IMM-Instituto de Microelectr\u00f3nica de Madrid (CNM-CSIC), Isaac Newton 8, PTM, Tres Cantos, E-28760 Madrid, Spain"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Priscila","family":"Kosaka","sequence":"additional","affiliation":[{"name":"IMM-Instituto de Microelectr\u00f3nica de Madrid (CNM-CSIC), Isaac Newton 8, PTM, Tres Cantos, E-28760 Madrid, Spain"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jose","family":"Ruz","sequence":"additional","affiliation":[{"name":"IMM-Instituto de Microelectr\u00f3nica de Madrid (CNM-CSIC), Isaac Newton 8, PTM, Tres Cantos, E-28760 Madrid, Spain"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Oscar","family":"Malvar","sequence":"additional","affiliation":[{"name":"IMM-Instituto de Microelectr\u00f3nica de Madrid (CNM-CSIC), Isaac Newton 8, PTM, Tres Cantos, E-28760 Madrid, Spain"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9680-7551","authenticated-orcid":false,"given":"Mario","family":"Encinar","sequence":"additional","affiliation":[{"name":"IMM-Instituto de Microelectr\u00f3nica de Madrid (CNM-CSIC), Isaac Newton 8, PTM, Tres Cantos, E-28760 Madrid, Spain"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Javier","family":"Tamayo","sequence":"additional","affiliation":[{"name":"IMM-Instituto de Microelectr\u00f3nica de Madrid (CNM-CSIC), Isaac Newton 8, PTM, Tres Cantos, E-28760 Madrid, Spain"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Montserrat","family":"Calleja","sequence":"additional","affiliation":[{"name":"IMM-Instituto de Microelectr\u00f3nica de Madrid (CNM-CSIC), Isaac Newton 8, PTM, Tres Cantos, E-28760 Madrid, Spain"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2016,6,21]]},"reference":[{"key":"ref_1","unstructured":"Van Zant, P. (2000). Microchip Fabrication: A Practical Guide to Semiconductor Processing, McGraw-Hill."},{"key":"ref_2","unstructured":"Heavens, O.S. (1991). Optical Properties of Thin Solid Films, Courier Corporation."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"33","DOI":"10.1016\/S0167-2738(00)00327-1","article-title":"Thin-film lithium and lithium-ion batteries","volume":"135","author":"Bates","year":"2000","journal-title":"Solid State Ion."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"4706","DOI":"10.1016\/j.tsf.2009.03.056","article-title":"Thin-film solar cells","volume":"517","author":"Aberle","year":"2009","journal-title":"Thin Solid Films"},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"036101","DOI":"10.1088\/0034-4885\/74\/3\/036101","article-title":"Cantilever-like micromechanical sensors","volume":"74","author":"Anja","year":"2011","journal-title":"Rep. Prog. Phys."},{"key":"ref_6","unstructured":"Azzam, R.M.A., and Bashara, N.M. (1977). Ellipsometry and Polarized Light, North-Holland."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"108","DOI":"10.1016\/0039-6028(80)90297-6","article-title":"Recent developments in instrumentation in ellipsometry","volume":"96","author":"Hauge","year":"1980","journal-title":"Surf. Sci."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"859","DOI":"10.1063\/1.337327","article-title":"Spatially resolved ellipsometry","volume":"60","author":"Erman","year":"1986","journal-title":"J. Appl. Phys."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"799","DOI":"10.1364\/AO.48.000799","article-title":"Spectrally resolved white-light interferometry for 3D inspection of a thin-film layer structure","volume":"48","author":"Ghim","year":"2009","journal-title":"Appl. Opt."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"075002","DOI":"10.1088\/0957-0233\/24\/7\/075002","article-title":"Thin-film thickness profile measurement using a Mirau-type low-coherence interferometer","volume":"24","author":"Ghim","year":"2013","journal-title":"Meas. Sci. Technol."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"3269","DOI":"10.1364\/OL.36.003269","article-title":"Multilayer thin-film inspection through measurements of reflection coefficients","volume":"36","author":"Wu","year":"2011","journal-title":"Opt. Lett."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"5968","DOI":"10.1364\/AO.38.005968","article-title":"Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry","volume":"38","author":"Kim","year":"1999","journal-title":"Appl. Opt."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"1893","DOI":"10.1364\/OL.27.001893","article-title":"Measurement of the thickness profile of a transparent thin film deposited upon a pattern structure with an acousto-optic tunable filter","volume":"27","author":"Kim","year":"2002","journal-title":"Opt. Lett."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"4662","DOI":"10.1364\/OE.14.004662","article-title":"Spectrally resolved white-light phase-shifting interference microscopy for thickness-profile measurements of transparent thin film layers on patterned substrates","volume":"14","author":"Debnath","year":"2006","journal-title":"Opt. Express"},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"11885","DOI":"10.1364\/OE.14.011885","article-title":"Thin-film thickness profile and its refractive index measurements by dispersive white-light interferometry","volume":"14","author":"Ghim","year":"2006","journal-title":"Opt. Express"},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"5668","DOI":"10.1364\/AO.51.005668","article-title":"Sensitivity analysis of thin-film thickness measurement by vertical scanning white-light interferometry","volume":"51","author":"Dong","year":"2012","journal-title":"Appl. Opt."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"489","DOI":"10.1016\/B978-0-12-386022-4.00013-3","article-title":"Chapter 13: Microspectrophotometry","volume":"Volume 46","author":"Thomas","year":"2014","journal-title":"Experimental Methods in the Physical Sciences"},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"2765","DOI":"10.1088\/0960-1317\/16\/12\/033","article-title":"A high-resolution optical study of cantilever heterostructure layer geometries","volume":"16","author":"Scholz","year":"2006","journal-title":"J. Micromech. Microeng."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"015202","DOI":"10.1088\/0957-0233\/25\/1\/015202","article-title":"Rapid microcantilever-thickness determination by optical interferometry","volume":"25","author":"Salmon","year":"2014","journal-title":"Meas. Sci. Technol."},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"091903","DOI":"10.1063\/1.2776015","article-title":"Fast, precise, tomographic measurements of thin films","volume":"91","author":"Ghim","year":"2007","journal-title":"Appl. Phys. Lett."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"203","DOI":"10.1007\/s00340-008-3093-4","article-title":"Spectral interferometry and reflectometry used to measure thin films","volume":"92","author":"Hlubina","year":"2008","journal-title":"Appl. Phys. B Lasers Opt."},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"125301","DOI":"10.1088\/0957-0233\/21\/12\/125301","article-title":"Depth-sensitive thin film reflectometer","volume":"21","author":"Hirth","year":"2010","journal-title":"Meas. Sci. Technol."},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"3873","DOI":"10.1088\/0957-4484\/17\/15\/044","article-title":"Observation of nanoscale dynamics in cantilever sensor arrays","volume":"17","author":"Reed","year":"2006","journal-title":"Nanotechnology"},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"22836","DOI":"10.1038\/srep22836","article-title":"Spatially multiplexed dark-field microspectrophotometry for nanoplasmonics","volume":"6","author":"Pini","year":"2016","journal-title":"Sci. Rep."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"4925","DOI":"10.1039\/c2nr31102j","article-title":"Challenges for nanomechanical sensors in biological detection","volume":"4","author":"Calleja","year":"2012","journal-title":"Nanoscale"},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"1287","DOI":"10.1039\/C2CS35293A","article-title":"Biosensors based on nanomechanical systems","volume":"42","author":"Tamayo","year":"2013","journal-title":"Chem. Soc. Rev."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"125501","DOI":"10.1088\/0957-0233\/20\/12\/125501","article-title":"Improved methods and uncertainty analysis in the calibration of the spring constant of an atomic force microscope cantilever using static experimental methods","volume":"20","author":"Clifford","year":"2009","journal-title":"Meas. Sci. Technol."},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"105709","DOI":"10.1088\/0957-4484\/19\/10\/105709","article-title":"Variations in properties of atomic force microscope cantilevers fashioned from the same wafer","volume":"19","author":"Webber","year":"2008","journal-title":"Nanotechnology"},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"241916","DOI":"10.1063\/1.2405887","article-title":"Thin film interference in the optomechanical response of micromechanical silicon cantilevers","volume":"89","author":"Wilkinson","year":"2006","journal-title":"Appl. Phys. Lett."},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"517","DOI":"10.1038\/nnano.2013.118","article-title":"Silicon chips detect intracellular pressure changes in living cells","volume":"8","author":"Duch","year":"2013","journal-title":"Nat. Nanotechnol."},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"231115","DOI":"10.1063\/1.4904027","article-title":"Absorption features of the zero frequency mode in an ultra-thin slab","volume":"105","author":"Llorens","year":"2014","journal-title":"Appl. Phys. Lett."},{"key":"ref_32","unstructured":"Born, M., and Wolf, E. (1999). Principles of Optics: Electromagnetic Theory of Propagation, Interference and Diffraction of Light, CUP Archive."},{"key":"ref_33","doi-asserted-by":"crossref","first-page":"166","DOI":"10.1016\/0040-6090(93)90082-Z","article-title":"Temperature dependence of the dielectric function of silicon using in situ spectroscopic ellipsometry","volume":"233","author":"Vuye","year":"1993","journal-title":"Thin Solid Films"},{"key":"ref_34","doi-asserted-by":"crossref","unstructured":"Cowan, G. (1998). Statistical Data Analysis, Oxford University Press.","DOI":"10.1093\/oso\/9780198501565.001.0001"},{"key":"ref_35","doi-asserted-by":"crossref","first-page":"1666","DOI":"10.1088\/0957-4484\/16\/9\/044","article-title":"The determination of atomic force microscope cantilever spring constants via dimensional methods for nanomechanical analysis","volume":"16","author":"Charles","year":"2005","journal-title":"Nanotechnology"},{"key":"ref_36","doi-asserted-by":"crossref","first-page":"475702","DOI":"10.1088\/0957-4484\/23\/47\/475702","article-title":"Quantification of the surface stress in microcantilever biosensors: Revisiting Stoney\u2019s equation","volume":"23","author":"Tamayo","year":"2012","journal-title":"Nanotechnology"},{"key":"ref_37","doi-asserted-by":"crossref","first-page":"1834","DOI":"10.3390\/s7091834","article-title":"Measurement of the mass and rigidity of adsorbates on a microcantilever sensor","volume":"7","author":"Ramos","year":"2007","journal-title":"Sensors"},{"key":"ref_38","doi-asserted-by":"crossref","unstructured":"Ruz, J., Tamayo, J., Pini, V., Kosaka, P., and Calleja, M. (2014). Physics of nanomechanical spectrometry of viruses. Sci. Rep., 4.","DOI":"10.1038\/srep06051"},{"key":"ref_39","doi-asserted-by":"crossref","first-page":"9783","DOI":"10.1073\/pnas.152330199","article-title":"Multiple label-free biodetection and quantitative DNA-binding assays on a nanomechanical cantilever array","volume":"99","author":"McKendry","year":"2002","journal-title":"Proc. Natl. Acad. Sci. USA"},{"key":"ref_40","doi-asserted-by":"crossref","first-page":"30","DOI":"10.1016\/S1369-7021(05)00792-3","article-title":"Cantilever array sensors","volume":"8","author":"Lang","year":"2005","journal-title":"Mater. Today"},{"key":"ref_41","doi-asserted-by":"crossref","first-page":"383","DOI":"10.1063\/1.120749","article-title":"Sequential position readout from arrays of micromechanical cantilever sensors","volume":"72","author":"Lang","year":"1998","journal-title":"Appl. Phys. Lett."},{"key":"ref_42","doi-asserted-by":"crossref","first-page":"10962","DOI":"10.1021\/la501865h","article-title":"Hydration Induced Stress on DNA Monolayers Grafted on Microcantilevers","volume":"30","author":"Kosaka","year":"2014","journal-title":"Langmuir"},{"key":"ref_43","doi-asserted-by":"crossref","first-page":"214","DOI":"10.1038\/nnano.2006.134","article-title":"Rapid and label-free nanomechanical detection of biomarker transcripts in human RNA","volume":"1","author":"Zhang","year":"2006","journal-title":"Nat. Nanotechnol."},{"key":"ref_44","doi-asserted-by":"crossref","first-page":"125109","DOI":"10.1063\/1.3525090","article-title":"High throughput optical readout of dense arrays of nanomechanical systems for sensing applications","volume":"81","author":"Kosaka","year":"2010","journal-title":"Rev. Sci. Instrum."},{"key":"ref_45","doi-asserted-by":"crossref","first-page":"863","DOI":"10.1039\/C2AN36192B","article-title":"Tackling reproducibility in microcantilever biosensors: A statistical approach for sensitive and specific end-point detection of immunoreactions","volume":"138","author":"Kosaka","year":"2013","journal-title":"Analyst"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/16\/6\/926\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T19:25:48Z","timestamp":1760210748000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/16\/6\/926"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2016,6,21]]},"references-count":45,"journal-issue":{"issue":"6","published-online":{"date-parts":[[2016,6]]}},"alternative-id":["s16060926"],"URL":"https:\/\/doi.org\/10.3390\/s16060926","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2016,6,21]]}}}