{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,21]],"date-time":"2026-04-21T15:16:19Z","timestamp":1776784579816,"version":"3.51.2"},"reference-count":23,"publisher":"MDPI AG","issue":"7","license":[{"start":{"date-parts":[[2016,6,25]],"date-time":"2016-06-25T00:00:00Z","timestamp":1466812800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"NSF of China","doi-asserted-by":"publisher","award":["11374016 and 91221202"],"award-info":[{"award-number":["11374016 and 91221202"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"MOST of China","award":["2012CB932702"],"award-info":[{"award-number":["2012CB932702"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Dynamic mapping of an object\u2019s local temperature distribution may offer valuable information for failure analysis, system control and improvement. In this letter we present a computerized measurement system which is equipped with a hybrid, low-noise mechanical-electrical multiplexer for real-time two-dimensional (2D) mapping of surface temperatures. We demonstrate the performance of the system on a device embedded with 32 pieces of built-in Cr-Pt thin-film thermocouples arranged in a 4 \u00d7 8 matrix. The system can display a continuous 2D mapping movie of relative temperatures with a time interval around 1 s. This technique may find applications in a variety of practical devices and systems.<\/jats:p>","DOI":"10.3390\/s16070977","type":"journal-article","created":{"date-parts":[[2016,6,27]],"date-time":"2016-06-27T12:56:01Z","timestamp":1467032161000},"page":"977","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":21,"title":["Real-Time Two-Dimensional Mapping of Relative Local Surface Temperatures with a Thin-Film Sensor Array"],"prefix":"10.3390","volume":"16","author":[{"given":"Gang","family":"Li","sequence":"first","affiliation":[{"name":"Key Laboratory for the Physics &amp; Chemistry of Nanodevices, and Department of Electronics, Peking University, Beijing 100871, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zhenhai","family":"Wang","sequence":"additional","affiliation":[{"name":"Key Laboratory for the Physics &amp; Chemistry of Nanodevices, and Department of Electronics, Peking University, Beijing 100871, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xinyu","family":"Mao","sequence":"additional","affiliation":[{"name":"Key Laboratory for the Physics &amp; Chemistry of Nanodevices, and Department of Electronics, Peking University, Beijing 100871, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yinghuang","family":"Zhang","sequence":"additional","affiliation":[{"name":"Key Laboratory for the Physics &amp; Chemistry of Nanodevices, and Department of Electronics, Peking University, Beijing 100871, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xiaoye","family":"Huo","sequence":"additional","affiliation":[{"name":"Key Laboratory for the Physics &amp; Chemistry of Nanodevices, and Department of Electronics, Peking University, Beijing 100871, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Haixiao","family":"Liu","sequence":"additional","affiliation":[{"name":"Key Laboratory for the Physics &amp; Chemistry of Nanodevices, and Department of Electronics, Peking University, Beijing 100871, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9567-5980","authenticated-orcid":false,"given":"Shengyong","family":"Xu","sequence":"additional","affiliation":[{"name":"Key Laboratory for the Physics &amp; Chemistry of Nanodevices, and Department of Electronics, Peking University, Beijing 100871, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2016,6,25]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"1519","DOI":"10.1109\/JPROC.2006.879793","article-title":"Dynamic surface temperature measurements in ICs","volume":"94","author":"Altet","year":"2006","journal-title":"IEEE Proc."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"645","DOI":"10.1146\/annurev.matsci.30.1.645","article-title":"Low dielectric constant materials for ULSI interconnects","volume":"30","author":"Morgen","year":"2000","journal-title":"Annu. Rev. Mater. Sci."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"084902-1","DOI":"10.1063\/1.4744963","article-title":"High resolution resistive thermometry for micro\/nanoscale measurements","volume":"83","author":"Sadat","year":"2012","journal-title":"Rev. Sci. Instrum."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"99","DOI":"10.1007\/s00348-005-0986-4","article-title":"Temperature measurement near the triple line during phase change using thermos chromic liquid crystal thermography","volume":"39","author":"Buffone","year":"2005","journal-title":"Exp. Fluids"},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"2272","DOI":"10.1021\/ac051990f","article-title":"Quantitative 3D Mapping of Fluidic Temperatures within Microchannel Networks Using Fluorescence Lifetime Imaging","volume":"78","author":"Benninger","year":"2006","journal-title":"Anal. Chem."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"477","DOI":"10.1002\/pssa.201400360","article-title":"Scanning thermal microscopy: A review","volume":"212","author":"Gomes","year":"2015","journal-title":"Phys. Status Solidi A"},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"596","DOI":"10.1021\/nl203169t","article-title":"Quantitative thermometry of nanoscale hot spots","volume":"12","author":"Menges","year":"2012","journal-title":"Nano Lett."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"629","DOI":"10.1126\/science.aaa2433","article-title":"Nanoscale temperature mapping in operating microelectronic devices","volume":"347","author":"Mecklenburg","year":"2015","journal-title":"Science"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"589","DOI":"10.1109\/55.798053","article-title":"Spreading-resistance temperature sensor on silicon-on-insulator","volume":"20","author":"Lai","year":"1999","journal-title":"IEEE Electron Device Lett."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"827","DOI":"10.6028\/jres.116.025","article-title":"Micro hotplate temperature sensor calibration and BIST","volume":"116","author":"Afridi","year":"2011","journal-title":"J. Res. Natl. Inst. Stand. Technol."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"52","DOI":"10.1016\/j.sna.2007.07.020","article-title":"Diode temperature sensor array for measuring microscale surface temperatures with high resolution","volume":"141","author":"Han","year":"2008","journal-title":"Sens. Actuators A Phys."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"1606","DOI":"10.1109\/LED.2011.2165522","article-title":"Thin-film thermocouple array for time-resolved local temperature mapping","volume":"32","author":"Liu","year":"2011","journal-title":"IEEE Electron Device Lett."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"4306","DOI":"10.1063\/1.1290045","article-title":"Static and dynamic calibration of thin film thermocouples by means of a laser modulation technique","volume":"71","author":"Serio","year":"2000","journal-title":"Rev. Sci. Instrum."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"118","DOI":"10.1016\/j.sna.2007.01.007","article-title":"Fabrication and application of micro thin film thermocouples for transient temperature measurement in nanosecond pulsed laser micromachining of nickel","volume":"136","author":"Choi","year":"2007","journal-title":"Sens. Actuators A Phys."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"3208","DOI":"10.1021\/nl071990q","article-title":"Electrodeposited submicron thermocouples with microsecond response times","volume":"7","author":"Bourg","year":"2007","journal-title":"Nano Lett."},{"key":"ref_16","unstructured":"Designing with Thermocouples: Get the Most from Your Measurements. Available online: http:\/\/phoenixcontact.custhelp.com\/ci\/fattach\/get\/20942\/."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"818","DOI":"10.1109\/LED.2011.2136314","article-title":"Thermal sensing with lithographically patterned bimetallic thin-film thermocouples","volume":"32","author":"Varrenti","year":"2011","journal-title":"IEEE Electron Device Lett."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"5464","DOI":"10.1021\/cm800582p","article-title":"Thermocouples from electrodeposited submicrometer wires prepared by electrochemical step edge decoration","volume":"20","author":"Bourg","year":"2008","journal-title":"Chem. Mater."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"209","DOI":"10.1038\/nature12183","article-title":"Heat dissipation in atomic-scale junctions","volume":"498","author":"Lee","year":"2013","journal-title":"Nature"},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"70","DOI":"10.1016\/j.jpowsour.2016.03.002","article-title":"Cell integrated multi-juction thermocouple array for solid oxide fuel cell temperature sensing: N+1 architecture","volume":"315","author":"Ranaweera","year":"2016","journal-title":"J. Power Sources"},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"40185","DOI":"10.1039\/C6RA06353E","article-title":"A sub-200 nanometer wide 3D stacking thin-film temperature sensor","volume":"6","author":"Huo","year":"2016","journal-title":"RSC Adv."},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"309","DOI":"10.1109\/TNANO.2013.2247057","article-title":"Nanowire thermocouple characterization platform","volume":"12","author":"Szakmany","year":"2013","journal-title":"IEEE Trans. Nanotechnol."},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"29","DOI":"10.4028\/www.scientific.net\/AMR.422.29","article-title":"Key issues in temperature sensing at the microscale with a thermocouple array","volume":"422","author":"Sun","year":"2012","journal-title":"Adv. Mater. Res."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/16\/7\/977\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T19:24:47Z","timestamp":1760210687000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/16\/7\/977"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2016,6,25]]},"references-count":23,"journal-issue":{"issue":"7","published-online":{"date-parts":[[2016,7]]}},"alternative-id":["s16070977"],"URL":"https:\/\/doi.org\/10.3390\/s16070977","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2016,6,25]]}}}