{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T04:20:39Z","timestamp":1760242839260,"version":"build-2065373602"},"reference-count":16,"publisher":"MDPI AG","issue":"9","license":[{"start":{"date-parts":[[2016,8,24]],"date-time":"2016-08-24T00:00:00Z","timestamp":1471996800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"Natural Science Foundation of China","doi-asserted-by":"publisher","award":["51205089, 51275121 and 51475111"],"award-info":[{"award-number":["51205089, 51275121 and 51475111"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100002858","name":"China Postdoctoral science foundation","doi-asserted-by":"publisher","award":["2012M520726"],"award-info":[{"award-number":["2012M520726"]}],"id":[{"id":"10.13039\/501100002858","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>We present an interference confocal microscope (ICM) with a new single-body four-step simultaneous phase-shifter device designed to obtain high immunity to vibration. The proposed ICM combines the respective advantages of simultaneous phase shifting interferometry and bipolar differential confocal microscopy to obtain high axis resolution, large dynamic range, and reduce the sensitivity to vibration and reflectance disturbance seamlessly. A compact single body spatial phase shifter is added to capture four phase-shifted interference signals simultaneously without time delay and construct a stable and space-saving simplified interference confocal microscope system. The test result can be obtained by combining the interference phase response and the bipolar property of differential confocal microscopy without phase unwrapping. Experiments prove that the proposed microscope is capable of providing stable measurements with 1 nm of axial depth resolution for either low- or high-numerical aperture objective lenses.<\/jats:p>","DOI":"10.3390\/s16091358","type":"journal-article","created":{"date-parts":[[2016,8,24]],"date-time":"2016-08-24T09:59:47Z","timestamp":1472032787000},"page":"1358","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":1,"title":["Interference Confocal Microscope Integrated with Spatial Phase Shifter"],"prefix":"10.3390","volume":"16","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-4420-385X","authenticated-orcid":false,"given":"Weibo","family":"Wang","sequence":"first","affiliation":[{"name":"Institute of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150001, China"},{"name":"Department of Engineering Science, University of Oxford, Parks Road, Oxford OX1 3PJ, UK"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Kang","family":"Gu","sequence":"additional","affiliation":[{"name":"Institute of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150001, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xiaoyu","family":"You","sequence":"additional","affiliation":[{"name":"Institute of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150001, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jiubin","family":"Tan","sequence":"additional","affiliation":[{"name":"Institute of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150001, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jian","family":"Liu","sequence":"additional","affiliation":[{"name":"Institute of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150001, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2016,8,24]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"183","DOI":"10.1038\/328183a0","article-title":"Confocal microscopy comes of age","volume":"328","author":"White","year":"1987","journal-title":"Nature"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"8214","DOI":"10.1364\/OPEX.13.008214","article-title":"Rapid wavelength-swept spectrally encoded confocal microscopy","volume":"13","author":"Boudoux","year":"2005","journal-title":"Opt. 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Technol."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"6195","DOI":"10.1364\/AO.48.006195","article-title":"Improved differential confocal microscopy with ultrahigh signal-to-noise ratio and reflectance disturbance resistibility","volume":"48","author":"Liu","year":"2009","journal-title":"Appl. Opt."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"21626","DOI":"10.1364\/OE.22.021626","article-title":"Real-time laser differential confocal microscopy without sample reflectivity effects","volume":"22","author":"Qiu","year":"2014","journal-title":"Opt. Express"},{"key":"ref_9","unstructured":"Release of New Industrial Laser Microscope for 3D Surface Measurement, LEXT OLS4100 3D Measuring Laser Microscope. Available online: http:\/\/www.olympus-global.com\/en\/news\/2013a\/nr130529olse.jsp."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"16281","DOI":"10.1364\/OE.17.016281","article-title":"Phase-shift resolving confocal microscopy with high axial resolution, wide range and reflectance disturbance resistibility","volume":"17","author":"Liu","year":"2009","journal-title":"Opt. Express"},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"655","DOI":"10.1364\/AO.50.000655","article-title":"Confocal simultaneous phase-shifting interferometry","volume":"50","author":"Zhao","year":"2011","journal-title":"Appl. Opt."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"1281","DOI":"10.1117\/1.1474439","article-title":"Analysis of the wavelength-to-depth encoded interference microscopy for three-dimensional imaging","volume":"41","author":"Li","year":"2002","journal-title":"Opt. Eng."},{"key":"ref_13","doi-asserted-by":"crossref","unstructured":"Malacara, D. (2007). Optical Shop Testing, Wiley. [3rd ed.].","DOI":"10.1002\/9780470135976"},{"key":"ref_14","doi-asserted-by":"crossref","unstructured":"Serv\u00edn, M., Quiroga, J.A., and Padilla, J.M. (2014). Fringe Pattern Analysis for Optical Metrology, Wiley-VCH.","DOI":"10.1002\/9783527681075"},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"361","DOI":"10.1117\/12.7973301","article-title":"Instantaneous phase measuring interferometry","volume":"23","author":"Smythe","year":"1984","journal-title":"Opt. Eng."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"2059","DOI":"10.1364\/OL.30.002059","article-title":"Fiber-diffraction interferometer for vibration desensitization","volume":"30","author":"Kihm","year":"2005","journal-title":"Opt. 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