{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,10]],"date-time":"2026-05-10T02:08:06Z","timestamp":1778378886957,"version":"3.51.4"},"reference-count":43,"publisher":"MDPI AG","issue":"11","license":[{"start":{"date-parts":[[2016,10,25]],"date-time":"2016-10-25T00:00:00Z","timestamp":1477353600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100000266","name":"EPSRC","doi-asserted-by":"publisher","award":["EP\/G061394\/1"],"award-info":[{"award-number":["EP\/G061394\/1"]}],"id":[{"id":"10.13039\/501100000266","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100000266","name":"EPSRC","doi-asserted-by":"publisher","award":["EP\/K031953\/1"],"award-info":[{"award-number":["EP\/K031953\/1"]}],"id":[{"id":"10.13039\/501100000266","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This paper describes a one-port mechanical resonance detection scheme utilized on a piezoelectric thin film driven silicon circular diaphragm resonator and discusses the limitations to such an approach in degenerate mode mass detection sensors. The sensor utilizes degenerated vibration modes of a radial symmetrical microstructure thereby providing both a sense and reference mode allowing for minimization of environmental effects on performance. The circular diaphragm resonator was fabricated with thickness of 4.5 \u00b5m and diameter of 140 \u00b5m. A PZT thin film of 0.75 \u00b5m was patterned on the top surface for the purposes of excitation and vibration sensing. The device showed a resonant frequency of 5.8 MHz for the (1, 1) mode. An electronic interface circuit was designed to cancel out the large static and parasitic capacitance allowing for electrical detection of the mechanical vibration thereby enabling the frequency split between the sense and reference mode to be measured accurately. The extracted motional current, proportional to the vibration velocity, was fed back to the drive to effectively increase the Q factor, and therefore device sensitivity, by more than a factor of 8. A software phase-locked loop was implemented to automatically track the resonant frequencies to allow for faster and accurate resonance detection. Results showed that by utilizing the absolute mode frequencies as an indication of sensor temperature, the variation in sensor temperature due to the heating from the drive electronics was accounted for and led to an ultimate measurement sensitivity of 2.3 Hz.<\/jats:p>","DOI":"10.3390\/s16111781","type":"journal-article","created":{"date-parts":[[2016,10,25]],"date-time":"2016-10-25T10:28:49Z","timestamp":1477391329000},"page":"1781","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":12,"title":["One-Port Electronic Detection Strategies for Improving Sensitivity in Piezoelectric Resonant Sensor Measurements"],"prefix":"10.3390","volume":"16","author":[{"given":"Zhongxu","family":"Hu","sequence":"first","affiliation":[{"name":"School of Mechanical and Systems Engineering, Newcastle University, Newcastle upon Tyne NE1 7RU, UK"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-2893-8776","authenticated-orcid":false,"given":"John","family":"Hedley","sequence":"additional","affiliation":[{"name":"School of Mechanical and Systems Engineering, Newcastle University, Newcastle upon Tyne NE1 7RU, UK"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Neil","family":"Keegan","sequence":"additional","affiliation":[{"name":"Institute of Cellular Medicine, Newcastle University, Newcastle upon Tyne NE1 7RU, UK"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Julia","family":"Spoors","sequence":"additional","affiliation":[{"name":"Institute of Cellular Medicine, Newcastle University, Newcastle upon Tyne NE1 7RU, UK"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Barry","family":"Gallacher","sequence":"additional","affiliation":[{"name":"School of Mechanical and Systems Engineering, Newcastle University, Newcastle upon Tyne NE1 7RU, UK"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Calum","family":"McNeil","sequence":"additional","affiliation":[{"name":"Institute of Cellular Medicine, Newcastle University, Newcastle upon Tyne NE1 7RU, UK"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2016,10,25]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"946","DOI":"10.1007\/s00216-004-2694-y","article-title":"Cantilever-based biosensors","volume":"379","author":"Ziegler","year":"2004","journal-title":"Anal. Bioanal. Chem."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"1532","DOI":"10.1126\/science.290.5496.1532","article-title":"Nanoelectromechanical systems","volume":"290","author":"Craighead","year":"2000","journal-title":"Science"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"903","DOI":"10.1109\/16.210197","article-title":"Mechanical-thermal noise in acoustic and vibration sensors","volume":"40","author":"Gabrielson","year":"1993","journal-title":"IEEE Trans. Electron. Dev."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"276","DOI":"10.1109\/JMEMS.2012.2219294","article-title":"Electronic detection strategies for a MEMS-based biosensor","volume":"22","author":"Burnett","year":"2013","journal-title":"J. Microelectromech. Syst."},{"key":"ref_5","unstructured":"Klaasse, G., Puers, R., and Tilmans, H.A.C. (2002, January 29). Piezoelectric versus electrostatic actuation for a capacitive RF-MEMS. Proceedings of the 3rd Workshop on Semiconductor Sensor and Actuator, Leuven, Belgium."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"092001","DOI":"10.1088\/0957-0233\/20\/9\/092001","article-title":"Piezoelectric MEMS sensors: state-of-the art and perspectives","volume":"20","author":"Tadigadapa","year":"2009","journal-title":"Meas. Sci. Technol."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"7","DOI":"10.1023\/B:JECR.0000033998.72845.51","article-title":"Thin film piezoelectrics for MEMS","volume":"12","author":"Muralt","year":"2004","journal-title":"J. Electroceram."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"547","DOI":"10.1039\/b410905h","article-title":"In-situ quantitative analysis of a prostate-specific antigen (PSA) using a nanomechanical PZT cantilever","volume":"4","author":"Hwang","year":"2004","journal-title":"Lab Chip"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"3187","DOI":"10.1063\/1.1712028","article-title":"Effect of mass and stress on resonant frequency shift of functionalized Pb(Zr0.52Ti0.48)O3 thin film microcantilever for the detection of C-reactive protein","volume":"84","author":"Lee","year":"2004","journal-title":"Appl. Phys. Lett."},{"key":"ref_10","doi-asserted-by":"crossref","unstructured":"Gil, M., Manzaneque, T., Hernando-Garc\u00eda, J., Ababneh, A., Seidel, H., and S\u00e1nchez-Rojas, J.L. (2011, January 5\u20139). Piezoelectric micro-scale tuning fork resonators for sensing applications. Proceedings of the 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Beijing, China.","DOI":"10.1109\/TRANSDUCERS.2011.5969682"},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"S285","DOI":"10.1016\/j.cap.2011.03.006","article-title":"Piezoelectric biosensor platform based on ZnO micro membrane","volume":"11","author":"Lu","year":"2011","journal-title":"Curr. Appl. Phys."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"105","DOI":"10.1016\/j.sna.2005.11.067","article-title":"A self-excited micro cantilever biosensor actuated by PZT using the mass micro balancing technique","volume":"130\u2013131","author":"Lee","year":"2006","journal-title":"Sens. Actuators A Phys."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"102902","DOI":"10.1063\/1.2977869","article-title":"A multisized piezoelectric microcantilever biosensor array for the quantitative analysis of mass and surface stress","volume":"93","author":"Shin","year":"2008","journal-title":"Appl. Phys. Lett."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"638","DOI":"10.1016\/j.bios.2008.06.024","article-title":"Micro-machined piezoelectric membrane-based immunosensor array","volume":"24","author":"Xu","year":"2008","journal-title":"Biosens. Bioelectron."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"370","DOI":"10.1016\/j.snb.2010.08.013","article-title":"Micro-piezoelectric immunoassay chip for simultaneous detection of Hepatitis B virus and \u03b1-fetoprotein","volume":"151","author":"Xu","year":"2011","journal-title":"Sens. Actuators B Chem."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"136","DOI":"10.1016\/j.sna.2014.05.022","article-title":"Microelectromechanical disk resonators for direct detection of liquid-phase analytes","volume":"216","author":"Mehdizadeh","year":"2014","journal-title":"Sens. Actuators A Phys."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"2724","DOI":"10.1063\/1.1484254","article-title":"Circuit for continuous motional series resonant frequency and motional resistance monitoring of quartz crystal resonators by parallel capacitance compensation","volume":"73","author":"Arnau","year":"2002","journal-title":"Rev. Sci. Instrum."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"2596","DOI":"10.1109\/TUFFC.2008.976","article-title":"Thin film piezoelectric-on-silicon resonators for high frequency reference oscillator applications","volume":"55","author":"Abdolvand","year":"2008","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"120","DOI":"10.1115\/1.2930387","article-title":"An impedance method for dynamic analysis of active material systems","volume":"116","author":"Liang","year":"1994","journal-title":"J. Vib. Acoust."},{"key":"ref_20","doi-asserted-by":"crossref","unstructured":"Sun, F.P., Liang, C., and Rogers, C.A. (1994, January 14\u201316). Structural modal analysis using collocated piezoelectric actuator\/sensors\u2014An electromechanical approach. Proceedings of the SPIE 2190, Smart Structures and Materials 1994: Smart Structures and Intelligent Systems, Orlando, FL, USA.","DOI":"10.1117\/12.175186"},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"1397","DOI":"10.1063\/1.1636530","article-title":"Temperature dependence of the piezoelectric response in lead zirconate titanate films","volume":"95","author":"Wolf","year":"2004","journal-title":"J. Appl. Phys."},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"941","DOI":"10.1177\/1045389X04046308","article-title":"Improved piezoelectric self-sensing actuation","volume":"15","author":"Simmers","year":"2004","journal-title":"J. Intell. Mater. Syst. Struct."},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"1487","DOI":"10.1088\/0960-1317\/16\/8\/008","article-title":"The principles of a MEMS circular diaphragm mass sensor","volume":"16","author":"Ismail","year":"2006","journal-title":"J. Micromech. Microeng."},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"115032","DOI":"10.1088\/0960-1317\/22\/11\/115032","article-title":"Issues associated with scaling up production of a lab demonstrated MEMS mass sensor","volume":"22","author":"Ortiz","year":"2012","journal-title":"J. Micromech. Microeng."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"275","DOI":"10.1121\/1.1928110","article-title":"Vibration of circular plates","volume":"34","author":"Wah","year":"1962","journal-title":"J. Acoust. Soc. Am."},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"125019","DOI":"10.1088\/0960-1317\/23\/12\/125019","article-title":"Design, fabrication and characterization of a piezoelectric MEMS diaphragm resonator mass sensor","volume":"23","author":"Hu","year":"2013","journal-title":"J. Micromech. Microeng."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"157","DOI":"10.1088\/0960-1317\/6\/1\/036","article-title":"Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems","volume":"6","author":"Tilmans","year":"1996","journal-title":"J. Micromech. Microeng."},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"1546","DOI":"10.1109\/JMEMS.2006.879693","article-title":"Analysis of frequency locking in optically driven MEMS resonators","volume":"15","author":"Pandey","year":"2006","journal-title":"J. Microelectromech. Syst."},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"2044","DOI":"10.1109\/16.155876","article-title":"Electrical characteristics of ferroelectric PZT thin films for DRAM applications","volume":"39","author":"Moazzami","year":"1992","journal-title":"IEEE Trans. Electron Dev."},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"075110","DOI":"10.1063\/1.2960571","article-title":"Improved electronic interfaces for AT-cut quartz crystal microbalance sensors under variable damping and parallel capacitance conditions","volume":"79","author":"Jimenez","year":"2008","journal-title":"Rev. Sci. Instrum."},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"2537","DOI":"10.1063\/1.1149788","article-title":"Interface circuits for quartz-crystal-microbalance sensors","volume":"70","author":"Eichelbaum","year":"1999","journal-title":"Rev. Sci. Instrum."},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"526","DOI":"10.1016\/S0006-3495(01)75719-0","article-title":"High-Q dynamic force microscopy in liquid and its application to living cells","volume":"81","author":"Tamayo","year":"2001","journal-title":"Biophys. J."},{"key":"ref_33","doi-asserted-by":"crossref","first-page":"025007","DOI":"10.1088\/0960-1317\/21\/2\/025007","article-title":"Quality-factor amplification in piezoelectric MEMS resonators applying an all-electrical feedback loop","volume":"21","author":"Manzaneque","year":"2011","journal-title":"J. Micromech. Microeng."},{"key":"ref_34","doi-asserted-by":"crossref","first-page":"214","DOI":"10.1049\/ip-g-1.1982.0038","article-title":"Active compensation of op-amp circuits","volume":"129","author":"Nguyen","year":"1982","journal-title":"IEE Proc. G Electron. Circuits Syst."},{"key":"ref_35","doi-asserted-by":"crossref","first-page":"025021","DOI":"10.1088\/0960-1317\/18\/2\/025021","article-title":"The fabrication, characterization and testing of a MEMS circular diaphragm mass sensor","volume":"18","author":"Ismail","year":"2008","journal-title":"J. Micromech. Microeng."},{"key":"ref_36","doi-asserted-by":"crossref","first-page":"3039","DOI":"10.1063\/1.1574395","article-title":"High-stability quartz-crystal microbalance for investigations in surface science","volume":"74","author":"Bouzidi","year":"2003","journal-title":"Rev. Sci. Instrum."},{"key":"ref_37","first-page":"161","article-title":"A highly stable quartz crystal microbalance sensor and its application to water vapor measurements","volume":"48","author":"Kwon","year":"2006","journal-title":"J. Korean Phys. Soc."},{"key":"ref_38","doi-asserted-by":"crossref","first-page":"103901","DOI":"10.1063\/1.3488368","article-title":"Stabilization of sample temperature in a surface-science vacuum chamber to 0.03 K and quartz-crystal microbalance frequency to 0.06 Hz over 0.5 h","volume":"81","author":"Slavin","year":"2010","journal-title":"Rev. Sci. Instrum."},{"key":"ref_39","doi-asserted-by":"crossref","first-page":"4004","DOI":"10.1002\/1521-3773(20001117)39:22<4004::AID-ANIE4004>3.0.CO;2-2","article-title":"Piezoelectric mass-sensing devices as biosensors\u2014An alternative to optical biosensors?","volume":"39","author":"Janshoff","year":"2000","journal-title":"Angew. Chem. Int. Ed."},{"key":"ref_40","doi-asserted-by":"crossref","first-page":"29","DOI":"10.1039\/C1LC20492K","article-title":"Piezoelectric microelectromechanical resonant sensors for chemical and biological detection","volume":"12","author":"Pang","year":"2012","journal-title":"Lab Chip"},{"key":"ref_41","unstructured":"Wasa, K., Kanno, I., and Kotera, H. (2009, January 1\u20134). Fundamentals of thin film piezoelectric materials of thin film piezoelectric materials and processing design for a better energy harvesting MEMS. Proceedings of the 9th International Workshop Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Washington, DC, USA."},{"key":"ref_42","first-page":"85","article-title":"AC and DC electrical stress reliability of Piezoelectric Lead Zirconate Titanate (PZT) thin films","volume":"23","author":"Polcawich","year":"2000","journal-title":"Int. J. Microcircuits Electron. Packag."},{"key":"ref_43","unstructured":"IEEE Standard on Piezoelectricity (1987). ANSI\/IEEE Std 176\u20131987, American Standards National Institute."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/16\/11\/1781\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T19:33:56Z","timestamp":1760211236000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/16\/11\/1781"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2016,10,25]]},"references-count":43,"journal-issue":{"issue":"11","published-online":{"date-parts":[[2016,11]]}},"alternative-id":["s16111781"],"URL":"https:\/\/doi.org\/10.3390\/s16111781","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2016,10,25]]}}}