{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,1,15]],"date-time":"2026-01-15T03:26:23Z","timestamp":1768447583450,"version":"3.49.0"},"reference-count":33,"publisher":"MDPI AG","issue":"1","license":[{"start":{"date-parts":[[2016,12,30]],"date-time":"2016-12-30T00:00:00Z","timestamp":1483056000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>In the sensors field the active sensing material frequently needs a controlled temperature in order to work properly. In microsystems technology, micro-machined hotplates represent a platform consisting of a thin suspended membrane where the sensing material can be deposited, usually integrating electrical stimuli and temperature readout. The micro-hotplate ensures a series of advantages such as miniaturized size, fast response, high sensitivity, low power consumption and selectivity for chemical sensing. This work compares the coplanar and the buried approach for the micro-hotplate heaters design with the aim to optimize the fabrication process and to propose a guideline for the choice of the suitable design with respect to the applications. In particular, robust Finite Element Method (FEM) models are set up in order to predict the electrical and thermal behavior of the micro-hotplates. The multiphysics approach used for the simulation allows to match as close as possible the actual device to the predictive model: geometries, materials, physics have been carefully linked to the fabricated devices to obtain the best possible accuracy. The materials involved in the fabrication process are accurately selected in order to improve the yield of the process and the performance of the devices. The fabricated micro-hotplates are able to warm the active region up to 400 \u00b0C (with a corresponding power consumption equal to 250 mW @ 400 \u00b0C) with a uniform temperature distribution in the buried micro-hotplate and a controlled temperature gradient in the coplanar one. A response time of about 70 ms was obtained on the virtual model, which perfectly agrees with the one measured on the fabricated device. Besides morphological, electrical and thermal characterizations, this work includes reliability tests in static and dynamic modes.<\/jats:p>","DOI":"10.3390\/s17010062","type":"journal-article","created":{"date-parts":[[2016,12,30]],"date-time":"2016-12-30T08:48:53Z","timestamp":1483087733000},"page":"62","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":23,"title":["Modeling, Fabrication and Testing of a Customizable Micromachined Hotplate for Sensor Applications"],"prefix":"10.3390","volume":"17","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-5220-2227","authenticated-orcid":false,"given":"Alessio","family":"Tommasi","sequence":"first","affiliation":[{"name":"\u03c7lab\u2014Materials and Microsystems Laboratory, Department of Applied Science and Technology, Politecnico di Torino\u2014Via Lungo Piazza d\u2019Armi 6, 10034 Chivasso, Turin, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-3506-216X","authenticated-orcid":false,"given":"Matteo","family":"Cocuzza","sequence":"additional","affiliation":[{"name":"\u03c7lab\u2014Materials and Microsystems Laboratory, Department of Applied Science and Technology, Politecnico di Torino\u2014Via Lungo Piazza d\u2019Armi 6, 10034 Chivasso, Turin, Italy"},{"name":"Istituto Materiali per Elettronica e Magnetismo, Consiglio Nazionale delle Ricerche, Parco Area delle Scienze, 37a, 43124 Parma, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Denis","family":"Perrone","sequence":"additional","affiliation":[{"name":"Italian Institute of Technology, Center for Sustainable Futures, C.so Trento 21, 10129 Torino, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-4991-9459","authenticated-orcid":false,"given":"Candido","family":"Pirri","sequence":"additional","affiliation":[{"name":"\u03c7lab\u2014Materials and Microsystems Laboratory, Department of Applied Science and Technology, Politecnico di Torino\u2014Via Lungo Piazza d\u2019Armi 6, 10034 Chivasso, Turin, Italy"},{"name":"Italian Institute of Technology, Center for Sustainable Futures, C.so Trento 21, 10129 Torino, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Roberto","family":"Mosca","sequence":"additional","affiliation":[{"name":"Istituto Materiali per Elettronica e Magnetismo, Consiglio Nazionale delle Ricerche, Parco Area delle Scienze, 37a, 43124 Parma, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-9229-3490","authenticated-orcid":false,"given":"Marco","family":"Villani","sequence":"additional","affiliation":[{"name":"Istituto Materiali per Elettronica e Magnetismo, Consiglio Nazionale delle Ricerche, Parco Area delle Scienze, 37a, 43124 Parma, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-2082-267X","authenticated-orcid":false,"given":"Nicola","family":"Delmonte","sequence":"additional","affiliation":[{"name":"Department of Information Engineering, University of Parma, Parco Area delle Scienze 181\/A, 43124 Parma, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Andrea","family":"Zappettini","sequence":"additional","affiliation":[{"name":"Istituto Materiali per Elettronica e Magnetismo, Consiglio Nazionale delle Ricerche, Parco Area delle Scienze, 37a, 43124 Parma, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Davide","family":"Calestani","sequence":"additional","affiliation":[{"name":"Istituto Materiali per Elettronica e Magnetismo, Consiglio Nazionale delle Ricerche, Parco Area delle Scienze, 37a, 43124 Parma, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-4570-2674","authenticated-orcid":false,"given":"Simone","family":"Marasso","sequence":"additional","affiliation":[{"name":"\u03c7lab\u2014Materials and Microsystems Laboratory, Department of Applied Science and Technology, Politecnico di Torino\u2014Via Lungo Piazza d\u2019Armi 6, 10034 Chivasso, Turin, Italy"},{"name":"Istituto Materiali per Elettronica e Magnetismo, Consiglio Nazionale delle Ricerche, Parco Area delle Scienze, 37a, 43124 Parma, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2016,12,30]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"828","DOI":"10.1039\/B816543B","article-title":"Devices and chemical sensing applications of metal oxide nanowires","volume":"19","author":"Shen","year":"2009","journal-title":"J. Mater. Chem."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"B109","DOI":"10.1115\/1.1508147","article-title":"MEMS Handbook","volume":"55","author":"Seemann","year":"2002","journal-title":"Appl. Mech. Rev."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"1408","DOI":"10.1109\/JMEMS.2008.2007228","article-title":"Tungsten-based SOI microhotplates for smart gas sensors","volume":"17","author":"Ali","year":"2008","journal-title":"J. Microelectromech. Syst."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"143","DOI":"10.1016\/j.jpowsour.2006.12.072","article-title":"Micro-hotplates-A platform for micro-solid oxide fuel cells","volume":"166","author":"Beckel","year":"2007","journal-title":"J. Power Sources"},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"91","DOI":"10.1016\/j.snb.2004.04.040","article-title":"Ceramic meso hot-plates for gas sensors","volume":"103","author":"Rettig","year":"2004","journal-title":"Sens. Actuators B Chem."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"317","DOI":"10.1016\/j.sna.2006.06.003","article-title":"Micro-hotplates on polyimide for sensors and actuators","volume":"132","author":"Briand","year":"2006","journal-title":"Sens. Actuators A Phys."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"183","DOI":"10.1007\/s005420050078","article-title":"Silicon hotplates for metal oxide gas sensor elements","volume":"3","author":"Sberveglieri","year":"1997","journal-title":"Microsyst. Technol."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"798","DOI":"10.1109\/JSEN.2005.844340","article-title":"Nanoparticle metal-oxide films for micro-hotplate-based gas sensor systems","volume":"5","author":"Ivanov","year":"2005","journal-title":"IEEE Sens. J."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"1384","DOI":"10.1109\/JMEMS.2015.2399696","article-title":"Micromachined Hotplate Platform for the Investigation of Ink-Jet Printed, Functionalized Metal Oxide Nanoparticles","volume":"24","author":"Walden","year":"2015","journal-title":"J. Microelectromech. Syst."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"374","DOI":"10.1016\/j.snb.2015.03.076","article-title":"Localized aerosol-assisted CVD of nanomaterials for the fabrication of monolithic gas sensor microarrays","volume":"216","author":"Annanouch","year":"2015","journal-title":"Sens. Actuators B Chem."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1088\/0957-4484\/27\/38\/385503","article-title":"A new method to integrate ZnO nano-tetrapods on MEMS micro-hotplates for large scale gas sensor production","volume":"27","author":"Marasso","year":"2016","journal-title":"Nanotechnology"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"137","DOI":"10.1016\/j.mee.2014.04.005","article-title":"Process optimisation of a MEMS based PZT actuated microswitch","volume":"119","author":"Tommasi","year":"2014","journal-title":"Microelectron. Eng."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"2208","DOI":"10.1016\/j.mee.2011.02.097","article-title":"Piezoelectrically actuated MEMS microswitches for high current applications","volume":"88","author":"Balma","year":"2011","journal-title":"Microelectron. Eng."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"115","DOI":"10.1016\/j.snb.2005.11.006","article-title":"A WO3-based gas sensor array with linear temperature gradient for wine quality monitoring","volume":"117","author":"Adami","year":"2006","journal-title":"Sens. Actuators B Chem."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"660","DOI":"10.1016\/j.snb.2008.06.008","article-title":"Linear temperature microhotplate gas sensor array for automotive cabin air quality monitoring","volume":"134","author":"Francioso","year":"2008","journal-title":"Sens. Actuators B Chem."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"7374","DOI":"10.3390\/s140407374","article-title":"An accurate and computationally efficient model for membrane-type circular-symmetric micro-hotplates","volume":"14","author":"Khan","year":"2014","journal-title":"Sensors"},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"17837","DOI":"10.1038\/srep17837","article-title":"Resonating Behaviour of Nanomachined Holed Microcantilevers","volume":"5","author":"Canavese","year":"2015","journal-title":"Sci. Rep."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"2189","DOI":"10.1177\/1045389X12445031","article-title":"Toward mechano-spintronics: Nanostructured magnetic multilayers for the realization of microcantilever sensors featuring wireless actuation for liquid environments","volume":"24","author":"Chiolerio","year":"2012","journal-title":"J. Intell. Mater. Syst. Struct."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"1115","DOI":"10.1063\/1.1145989","article-title":"Thermal conductivity and diffusivity of free-standing silicon nitride thin films","volume":"66","author":"Zhang","year":"1995","journal-title":"Rev. Sci. Instrum."},{"key":"ref_20","first-page":"1","article-title":"Thermal and electrical conductivity of a suspended platinum nanofilm","volume":"86","author":"Zhang","year":"2005","journal-title":"Appl. Phys. Lett."},{"key":"ref_21","doi-asserted-by":"crossref","unstructured":"Ida, N. (2015). Engineering Electromagnetics, Springer International Publishing.","DOI":"10.1007\/978-3-319-07806-9"},{"key":"ref_22","unstructured":"Incropera, F.P., DeWitt, D.P., Bergman, T.L., and Lavine, A.S. (2007). Fundamentals of Heat and Mass Transfer, John Wiley & Sons Inc."},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"39","DOI":"10.1016\/j.sna.2009.03.017","article-title":"Stability of thin platinum films implemented in high-temperature microdevices","volume":"152","author":"Tiggelaar","year":"2009","journal-title":"Sens. Actuators A Phys."},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"63","DOI":"10.1016\/S0169-4332(02)00554-8","article-title":"Effect of in situ Pt bottom electrode deposition and of Pt top electrode preparation on PZT thin films properties","volume":"195","author":"Vilquin","year":"2002","journal-title":"Appl. Surf. Sci."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"196","DOI":"10.1016\/j.sna.2004.09.004","article-title":"Fabrication of a high-temperature microreactor with integrated heater and sensor patterns on an ultrathin silicon membrane","volume":"119","author":"Tiggelaar","year":"2005","journal-title":"Sens. Actuators A Phys."},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"157","DOI":"10.1016\/0924-4247(95)00994-9","article-title":"Fabrication and characterization of PZT thin-film vibrators for micromotors","volume":"48","author":"Muralt","year":"1995","journal-title":"Sens. Actuators A Phys."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"232","DOI":"10.1063\/1.355889","article-title":"Investigation of Pt\/Ti bilayer metallization on silicon for ferroelectric thin film integration","volume":"75","author":"Sreenivas","year":"1994","journal-title":"J. Appl. Phys."},{"key":"ref_28","doi-asserted-by":"crossref","unstructured":"Cabral, C., Clevenger, L.A., and Schad, R.G. (1993). Compressive Stress Increase With Repeated Thermal Cycling in Tantalum (Oxygen) Thin Films. MRS Proc., 308.","DOI":"10.1557\/PROC-308-57"},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"L465","DOI":"10.1143\/JJAP.37.L465","article-title":"Thermal stability of Pt bottom electrodes for ferroelectric capacitors","volume":"37","author":"Matsui","year":"1998","journal-title":"Jpn. J. Appl. Phys. Part 2 Lett."},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"235","DOI":"10.1016\/0167-9317(95)00152-2","article-title":"Stresses in Ru\/PbZr0.4Ti0.6O3\/Ru thin film stacks for integrated ferroelectric capacitors","volume":"29","author":"Spierings","year":"1995","journal-title":"Microelectron. Eng."},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"264","DOI":"10.1016\/S0040-6090(00)00970-6","article-title":"Formation of hillocks in Pt\/Ti electrodes and their effects on short phenomena of PZT films deposited by reactive sputtering","volume":"371","author":"Nam","year":"2000","journal-title":"Thin Solid Films"},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"55","DOI":"10.1007\/s10832-004-5076-0","article-title":"Platinum (100) hillock growth in Pt\/Ti electrode stack for SrBi 2Ta2O9 ferroelectric random access memory","volume":"13","author":"Jung","year":"2004","journal-title":"J. Electroceram."},{"key":"ref_33","doi-asserted-by":"crossref","unstructured":"Maher, A., Velusamy, V., Riordan, D., and Walsh, J. (2014, January 2\u20134). Modelling of temperature coefficient of resistance of a thin film RTD towards exhaust gas measurement applications. Proceedings of the 8th International Conference on Sensing Technology, Liverpool, UK.","DOI":"10.21307\/ijssis-2019-026"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/17\/1\/62\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T19:29:35Z","timestamp":1760210975000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/17\/1\/62"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2016,12,30]]},"references-count":33,"journal-issue":{"issue":"1","published-online":{"date-parts":[[2017,1]]}},"alternative-id":["s17010062"],"URL":"https:\/\/doi.org\/10.3390\/s17010062","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2016,12,30]]}}}