{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,7]],"date-time":"2026-04-07T19:06:13Z","timestamp":1775588773050,"version":"3.50.1"},"reference-count":23,"publisher":"MDPI AG","issue":"2","license":[{"start":{"date-parts":[[2017,1,28]],"date-time":"2017-01-28T00:00:00Z","timestamp":1485561600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"Natural Science Foundation of China","doi-asserted-by":"publisher","award":["No. 61673287"],"award-info":[{"award-number":["No. 61673287"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"Natural Science Foundation of China","doi-asserted-by":"publisher","award":["No. 61433010"],"award-info":[{"award-number":["No. 61433010"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"National High-Tech Research and Development Program of China","award":["No. 2015AA042601"],"award-info":[{"award-number":["No. 2015AA042601"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Nano-positioning technology has been widely used in many fields, such as microelectronics, optical engineering, and micro manufacturing. This paper presents a one-dimensional (1D) nano-positioning system, adopting a piezoelectric ceramic (PZT) actuator and a multi-objective topological optimal structure. The combination of a nano-positioning stage and a feedback capacitive comb sensor has been achieved. In order to obtain better performance, a wedge-shaped structure is used to apply the precise pre-tension for the piezoelectric ceramics. Through finite element analysis and experimental verification, better static performance and smaller kinetic coupling are achieved. The output displacement of the system achieves a long-stroke of up to 14.7 \u03bcm and high-resolution of less than 3 nm. It provides a flexible and efficient way in the design and optimization of the nano-positioning system.<\/jats:p>","DOI":"10.3390\/s17020257","type":"journal-article","created":{"date-parts":[[2017,1,30]],"date-time":"2017-01-30T11:36:30Z","timestamp":1485776190000},"page":"257","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":8,"title":["Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor"],"prefix":"10.3390","volume":"17","author":[{"given":"Tao","family":"Chen","sequence":"first","affiliation":[{"name":"Jiangsu Provincial Key Laboratory of Advanced Robotics &amp; Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yaqiong","family":"Wang","sequence":"additional","affiliation":[{"name":"Jiangsu Provincial Key Laboratory of Advanced Robotics &amp; Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Huicong","family":"Liu","sequence":"additional","affiliation":[{"name":"Jiangsu Provincial Key Laboratory of Advanced Robotics &amp; Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-3063-4819","authenticated-orcid":false,"given":"Zhan","family":"Yang","sequence":"additional","affiliation":[{"name":"Jiangsu Provincial Key Laboratory of Advanced Robotics &amp; Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Pengbo","family":"Wang","sequence":"additional","affiliation":[{"name":"Jiangsu Provincial Key Laboratory of Advanced Robotics &amp; Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Lining","family":"Sun","sequence":"additional","affiliation":[{"name":"Jiangsu Provincial Key Laboratory of Advanced Robotics &amp; Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2017,1,28]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","unstructured":"Sun, L., Wang, J., Rong, W., Li, X., and Bao, H. 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