{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T04:10:35Z","timestamp":1760242235295,"version":"build-2065373602"},"reference-count":27,"publisher":"MDPI AG","issue":"2","license":[{"start":{"date-parts":[[2017,1,31]],"date-time":"2017-01-31T00:00:00Z","timestamp":1485820800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This article concerns the characterization of the stability and performance of a motorized stage used in laser direct writing lithography. The system was built from commercial components and commanded by G-code. Measurements use a pseudo-periodic-pattern (PPP) observed by a camera and image processing is based on Fourier transform and phase measurement methods. The results report that the built system has a stability against vibrations determined by peak-valley deviations of 65 nm and 26 nm in the x and y directions, respectively, with a standard deviation of 10 nm in both directions. When the xy-stage is in movement, it works with a resolution of 0.36 \u03bcm, which is an acceptable value for most of research and development (R and D) microtechnology developments in which the typical feature size used is in the micrometer range.<\/jats:p>","DOI":"10.3390\/s17020278","type":"journal-article","created":{"date-parts":[[2017,1,31]],"date-time":"2017-01-31T10:30:44Z","timestamp":1485858644000},"page":"278","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":6,"title":["Performance Characterization of an xy-Stage Applied to Micrometric Laser Direct Writing Lithography"],"prefix":"10.3390","volume":"17","author":[{"given":"Juan","family":"Jaramillo","sequence":"first","affiliation":[{"name":"Grupo de Investigaci\u00f3n Electromagnetismo Aplicado, l\u00ednea Microingenier\u00eda, Universidad EAFIT, Medell\u00edn 050022, Colombia"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Artur","family":"Zarzycki","sequence":"additional","affiliation":[{"name":"Grupo de Investigaci\u00f3n en Autom\u00e1tica, Electr\u00f3nica y Ciencias Computacionales, L\u00ednea Sistemas de Control y Rob\u00f3tica, Instituto Tecnol\u00f3gico Metropolitano, ITM, Medell\u00edn 050013, Colombia"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"July","family":"Galeano","sequence":"additional","affiliation":[{"name":"Grupo de Investigaci\u00f3n en Materiales Avanzados y Energ\u00eda MatyEr, L\u00ednea Biomateriales y Electromedicina, Instituto Tecnol\u00f3gico Metropolitano, ITM, Medell\u00edn 050013, Colombia"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Patrick","family":"Sandoz","sequence":"additional","affiliation":[{"name":"Department of Applied Mechanics, FEMTO-ST Institute, University Bourgogne Franche-Comt\u00e9, UFC\/CNRS\/ENSMM\/UTBM, Besan\u00e7on 25000, France"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2017,1,31]]},"reference":[{"key":"ref_1","unstructured":"Rawat, K., and Boolchandani, S. 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