{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,13]],"date-time":"2025-10-13T15:29:32Z","timestamp":1760369372638,"version":"build-2065373602"},"reference-count":27,"publisher":"MDPI AG","issue":"2","license":[{"start":{"date-parts":[[2017,2,17]],"date-time":"2017-02-17T00:00:00Z","timestamp":1487289600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"the National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["61471255, 61474079, 61501316, 51505324, 51622507"],"award-info":[{"award-number":["61471255, 61474079, 61501316, 51505324, 51622507"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Basic Research Program of Shanxi for Youths","award":["2014021023-3, 2015021092"],"award-info":[{"award-number":["2014021023-3, 2015021092"]}]},{"DOI":"10.13039\/501100003398","name":"Shanxi Scholarship Council of China","doi-asserted-by":"publisher","award":["2015-047"],"award-info":[{"award-number":["2015-047"]}],"id":[{"id":"10.13039\/501100003398","id-type":"DOI","asserted-by":"publisher"}]},{"name":"863 project","award":["2015AA042601"],"award-info":[{"award-number":["2015AA042601"]}]},{"name":"Hundreds of Talents of Shanxi Province"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Acceleration is a significant parameter for monitoring the status of a given objects. This paper presents a novel linear acceleration sensor that functions via a unique physical mechanism, the resonant optical tunneling effect (ROTE). The accelerometer consists of a fixed frame, two elastic cantilevers, and a major cylindrical mass comprised of a resonant cavity that is separated by two air tunneling gaps in the middle. The performance of the proposed sensor was analyzed with a simplified mathematical model, and simulated using finite element modeling. The simulation results showed that the optical Q factor and the sensitivity of the accelerometer reach up to 8.857 \u00d7 107 and 9 pm\/g, respectively. The linear measurement range of the device is \u00b1130 g. The work bandwidth obtained is located in 10\u20131500 Hz. The results of this study provide useful guidelines to improve measurement range and resolution of integrated optical acceleration sensors.<\/jats:p>","DOI":"10.3390\/s17020389","type":"journal-article","created":{"date-parts":[[2017,2,17]],"date-time":"2017-02-17T12:10:34Z","timestamp":1487333434000},"page":"389","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":18,"title":["Theoretical Analysis of an Optical Accelerometer Based on Resonant Optical Tunneling Effect"],"prefix":"10.3390","volume":"17","author":[{"given":"Aoqun","family":"Jian","sequence":"first","affiliation":[{"name":"MicroNano System Research Center, Taiyuan University of Technology, Taiyuan 030024, China"},{"name":"Key Laboratory of Advanced Transducers and Intelligent Control System, Shanxi Province and Ministry of Education, Taiyuan 030024, China"}]},{"given":"Chongguang","family":"Wei","sequence":"additional","affiliation":[{"name":"MicroNano System Research Center, Taiyuan University of Technology, Taiyuan 030024, China"},{"name":"Key Laboratory of Advanced Transducers and Intelligent Control System, Shanxi Province and Ministry of Education, Taiyuan 030024, China"}]},{"given":"Lifang","family":"Guo","sequence":"additional","affiliation":[{"name":"Laboratory of Wireless Communication Network, Taiyuan University of Technology, Taiyuan 030024, China"}]},{"given":"Jie","family":"Hu","sequence":"additional","affiliation":[{"name":"MicroNano System Research Center, Taiyuan University of Technology, Taiyuan 030024, China"},{"name":"Key Laboratory of Advanced Transducers and Intelligent Control System, Shanxi Province and Ministry of Education, Taiyuan 030024, China"}]},{"given":"Jun","family":"Tang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Science and Technology on Electronic Test &amp; Measurement, North University of China, Taiyuan 030051, China"},{"name":"Key Laboratory of Instrumentation Science &amp; Dynamic Measurement, North University of China, Ministry of Education, Taiyuan 030051, China"}]},{"given":"Jun","family":"Liu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Science and Technology on Electronic Test &amp; Measurement, North University of China, Taiyuan 030051, China"},{"name":"Key Laboratory of Instrumentation Science &amp; Dynamic Measurement, North University of China, Ministry of Education, Taiyuan 030051, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-9326-5547","authenticated-orcid":false,"given":"Xuming","family":"Zhang","sequence":"additional","affiliation":[{"name":"Department of Applied Physics, Hong Kong Polytechnic University, Hung Hom, Kowloon, Hong Kong, China"}]},{"given":"Shengbo","family":"Sang","sequence":"additional","affiliation":[{"name":"MicroNano System Research Center, Taiyuan University of Technology, Taiyuan 030024, China"},{"name":"Key Laboratory of Advanced Transducers and Intelligent Control System, Shanxi Province and Ministry of Education, Taiyuan 030024, China"}]}],"member":"1968","published-online":{"date-parts":[[2017,2,17]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"1732","DOI":"10.2514\/1.49978","article-title":"Robust flight control using incremental nonlinear dynamic inversion and angular acceleration prediction","volume":"33","author":"Sieberling","year":"2010","journal-title":"J. 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Express"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/17\/2\/389\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T18:28:28Z","timestamp":1760207308000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/17\/2\/389"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2017,2,17]]},"references-count":27,"journal-issue":{"issue":"2","published-online":{"date-parts":[[2017,2]]}},"alternative-id":["s17020389"],"URL":"https:\/\/doi.org\/10.3390\/s17020389","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2017,2,17]]}}}