{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,2,26]],"date-time":"2026-02-26T23:45:08Z","timestamp":1772149508743,"version":"3.50.1"},"reference-count":29,"publisher":"MDPI AG","issue":"3","license":[{"start":{"date-parts":[[2017,2,25]],"date-time":"2017-02-25T00:00:00Z","timestamp":1487980800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100004347","name":"STMicroelectronics","doi-asserted-by":"publisher","id":[{"id":"10.13039\/501100004347","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>In this work, we have applied optical low-coherence reflectometry (OLCR), implemented with infra-red light propagating in fiberoptic paths, to perform static and dynamic analyses on piezo-actuated glass micro-membranes. The actuator was fabricated by means of thin-film piezoelectric MEMS technology and was employed for modifying the micro-membrane curvature, in view of its application in micro-optic devices, such as variable focus micro-lenses. We are here showing that OLCR incorporating a near-infrared superluminescent light emitting diode as the read-out source is suitable for measuring various parameters such as the micro-membrane optical path-length, the membrane displacement as a function of the applied voltage (yielding the piezo-actuator hysteresis) as well as the resonance curve of the fundamental vibration mode. The use of an optical source with short coherence-time allows performing interferometric measurements without spurious resonance effects due to multiple parallel interfaces of highly planar slabs, furthermore selecting the plane\/layer to be monitored. We demonstrate that the same compact and flexible setup can be successfully employed to perform spot optical measurements for static and dynamic characterization of piezo-MEMS in real time.<\/jats:p>","DOI":"10.3390\/s17030462","type":"journal-article","created":{"date-parts":[[2017,2,27]],"date-time":"2017-02-27T11:00:20Z","timestamp":1488193220000},"page":"462","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":5,"title":["Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry"],"prefix":"10.3390","volume":"17","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-2559-5939","authenticated-orcid":false,"given":"Sabina","family":"Merlo","sequence":"first","affiliation":[{"name":"Dipartimento di Ingegneria Industriale e dell\u2019Informazione, Universita\u0300 degli Studi di Pavia, 27100 Pavia, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Paolo","family":"Poma","sequence":"additional","affiliation":[{"name":"Dipartimento di Ingegneria Industriale e dell\u2019Informazione, Universita\u0300 degli Studi di Pavia, 27100 Pavia, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Eleonora","family":"Cris\u00e0","sequence":"additional","affiliation":[{"name":"Dipartimento di Ingegneria Industriale e dell\u2019Informazione, Universita\u0300 degli Studi di Pavia, 27100 Pavia, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Dino","family":"Faralli","sequence":"additional","affiliation":[{"name":"STMicroelectronics, 20864 Agrate Brianza (MB), Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Marco","family":"Soldo","sequence":"additional","affiliation":[{"name":"STMicroelectronics, 20010 Cornaredo (Mi), Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2017,2,25]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"563","DOI":"10.1146\/annurev.matsci.28.1.563","article-title":"Processing and characterization of piezoelectric materials and integration into microelectromechanical systems","volume":"28","author":"Polla","year":"1998","journal-title":"Annu. 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