{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,31]],"date-time":"2025-10-31T16:57:32Z","timestamp":1761929852032,"version":"build-2065373602"},"reference-count":24,"publisher":"MDPI AG","issue":"4","license":[{"start":{"date-parts":[[2017,4,16]],"date-time":"2017-04-16T00:00:00Z","timestamp":1492300800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This paper presents an out-of-plane electrostatic micro-power generator (MPG). Electret-based continuous MPGs with different gaps and masses are fabricated to demonstrate the merits of this topology. Experimental results of the MPG demonstrate output power of 1 mW for a base acceleration amplitude and frequency of 0.08 g and 86 Hz. The MPGs also demonstrate a wideband harvesting bandwidth reaching up to 9 Hz. A free-flight and an impact mode model of electrostatic MPGs are also derived and validated by comparison to experimental results.<\/jats:p>","DOI":"10.3390\/s17040877","type":"journal-article","created":{"date-parts":[[2017,4,18]],"date-time":"2017-04-18T11:22:04Z","timestamp":1492514524000},"page":"877","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":9,"title":["Out-of-Plane Continuous Electrostatic Micro-Power Generators"],"prefix":"10.3390","volume":"17","author":[{"given":"M.","family":"Mahmoud","sequence":"first","affiliation":[{"name":"Department of Electrical and Computer Engineering, Ain Shams University, 1156 Cairo, Egypt"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-3709-7593","authenticated-orcid":false,"given":"E.","family":"Abdel-Rahman","sequence":"additional","affiliation":[{"name":"Department of Systems Design Engineering, University of Waterloo, Waterloo, N2L 3G1 ON, Canada"}]},{"given":"R.","family":"Mansour","sequence":"additional","affiliation":[{"name":"Department of Electrical and Computer Engineering, University of Waterloo, Waterloo, N2L 3G1 ON, Canada"}]},{"given":"E.","family":"El-Saadany","sequence":"additional","affiliation":[{"name":"Department of Electrical and Computer Engineering, University of Waterloo, Waterloo, N2L 3G1 ON, Canada"}]}],"member":"1968","published-online":{"date-parts":[[2017,4,16]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"R175","DOI":"10.1088\/0957-0233\/17\/12\/R01","article-title":"Energy harvesting vibration sources for microsystems applications","volume":"17","author":"Beeby","year":"2006","journal-title":"Meas. Sci. Technol."},{"key":"ref_2","unstructured":"Boland, J., Chao, Y.H., Suzuki, Y., and Tai, Y. (2003, January 19\u201323). Micro electret power generator. Proceedings of the 16th IEEE Annual International Conference on Micro Electro Mechanical Systems: MEMS 2003, Kyoto, Japan."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"846","DOI":"10.1143\/JJAP.31.846","article-title":"Experimental Characteristics of Electret Generator, Using Polymer Film Electrets","volume":"31","author":"Tada","year":"1992","journal-title":"Jpn. J. Appl. Phys."},{"key":"ref_4","unstructured":"Sterken, T., Fiorini, P., Baert, K., Puers, R., and Borghs, G. (2003, January 9\u201312). An electret-based electrostatic \u03bc-generator. Proceedings of Transducers \u201903 - the 12th International Conference on Transducers, Solid-State Sensors, Actuators and Microsystems, Boston, MA, USA."},{"key":"ref_5","unstructured":"Tsutsumino, T., Suzuki, Y., Kasagi, N., Kashiwagi, K., and Morizawa, Y. (December, January 29). Micro seismic electret generator for energy harvesting. Proceedings of the Sixth International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications: PowerMEMS 2006, Berkeley, CA, USA."},{"key":"ref_6","unstructured":"Tsutsumino, T., Suzuki, Y., Kasagi, N., and Sakane, Y. (2006, January 22\u201326). Seismic power generator using high-performance polymer electret. Proceedings of the 19th IEEE International Conference on Micro Electro Mechanical Systems: MEMS 2006, Istanbul, Turkey."},{"key":"ref_7","doi-asserted-by":"crossref","unstructured":"Tsutsumino, T., Suzuki, Y., and Kasagi, N. (2007, January 10\u201314). Electromechanical modeling of micro electret generator for energy harvesting. Proceedings of Transducers \u201907 - the 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Lyon, France.","DOI":"10.1109\/SENSOR.2007.4300267"},{"key":"ref_8","doi-asserted-by":"crossref","unstructured":"Edamoto, M., Suzuki, Y., Kasagi, N., Kashiwagi, K., Morizawa, Y., Yokoyama, T., Seki, T., and Oba, M. (2009, January 25\u201329). Low-Resonant-Frequency Micro Electret Geenrator for Energy Harvesting Application. Proceedings of the 22nd IEEE International Conference on Micro Electro Mechanical Systems: MEMS 2009, Sorrento, Italy.","DOI":"10.1109\/MEMSYS.2009.4805569"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"1364","DOI":"10.1109\/JMEMS.2006.879706","article-title":"Micromachined high-aspect ratio parylene spring and its application to low-frequency accelerometers","volume":"15","author":"Suzuki","year":"2006","journal-title":"J. Micromech. Microeng."},{"key":"ref_10","unstructured":"Tsurumi, Y., Suzuki, Y., and Kasagi, N. (2008, January 13\u201317). Non-contact electrostatic micro-bearing using polymer electret. Proceedings of the 21st IEEE International Conference on Micro Electro Mechanical Systems: MEMS 2008, Tucson, AZ, USA."},{"key":"ref_11","unstructured":"Suzuki, Y., Edamoto, M., Kasagi, N., Kashiwagi, K., Morizawa, Y., Yokoyama, T.S., and Oba, M. (2008, January 9\u201312). Micro electret energy harvesting device with analogue impedance conversion circuit. Proceedings of 8th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications: Power MEMS 2008, Sendai, Japan."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"636","DOI":"10.1524\/teme.2007.74.12.636","article-title":"Elektromechanischer Energiewandler basierend auf SOI-Technologie","volume":"20","author":"Bartsch","year":"2007","journal-title":"Techn. Messen 74"},{"key":"ref_13","doi-asserted-by":"crossref","unstructured":"Bartsch, U., Trautmann, A., Ruther, P., Gaspar, J., and Paul, O. (2007, January 10\u201314). Electrostatic transducers for micro energy harvesting based on SOI technology. Proceedings of Transducers \u201907 - the 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Lyon, France.","DOI":"10.1109\/SENSOR.2007.4300091"},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"094001","DOI":"10.1088\/0960-1317\/19\/9\/094001","article-title":"Fabrication, characterization and modelling of electrostatic micro-generators","volume":"19","author":"Hoffmann","year":"2009","journal-title":"J. Micromech. Microeng."},{"key":"ref_15","unstructured":"Mahmoud, M.A., El-Saadany, E.F., and Mansour, R.R. (December, January 29). Planar Electret Based Electrostatic Micro-Generator. Proceedings of the Sixth International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications: PowerMEMS 2006, Berkeley, CA, USA."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"95","DOI":"10.1016\/j.sna.2015.02.021","article-title":"Sandwich-structured two-dimensional MEMS electret power generator for low-level ambient vibrational energy harvesting","volume":"228","author":"Tao","year":"2015","journal-title":"Sens. Actuators A Phys."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"065022","DOI":"10.1088\/0960-1317\/24\/6\/065022","article-title":"A three-dimensional electret-based micro power generator for low-level ambient vibrational energy harvesting","volume":"24","author":"Tao","year":"2014","journal-title":"J. Micromech. Microeng."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"104014","DOI":"10.1088\/0960-1317\/25\/10\/104014","article-title":"Out-of-plane electret-based MEMS energy harvester with the combined nonlinear effect from electrostatic force and a mechanical elastic stopper","volume":"25","author":"Tao","year":"2015","journal-title":"J. Micromech. Microeng."},{"key":"ref_19","unstructured":"Fedder, G.K. (1994). Simulation of Microelectromechanical Systems. [Ph.D. Thesis, University of California at Berkely]."},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"8","DOI":"10.1016\/0924-4247(96)80118-X","article-title":"Analysis of a micro-electric generator for microsystems","volume":"52","author":"Williams","year":"1996","journal-title":"Sens. Actuators A Phys."},{"key":"ref_21","doi-asserted-by":"crossref","unstructured":"Sessler, G. (1987). Topics in Applied Physics: Electrets, Springer.","DOI":"10.1007\/3-540-17335-8"},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"115021","DOI":"10.1088\/0960-1317\/18\/11\/115021","article-title":"A wideband vibration-based energy harvester","volume":"18","author":"Soliman","year":"2008","journal-title":"J. Micromech. Microeng."},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"1057","DOI":"10.1109\/JMEMS.2009.2031695","article-title":"Design Procedure for Wideband Micropower Generators","volume":"18","author":"Soliman","year":"2009","journal-title":"J. Microelectromech. Syst."},{"key":"ref_24","unstructured":"Kloub, H., Hoffmann, D., Folkmer, B., and Manoli, Y. (2009, January 1\u20134). A Micro Capacitive Vibration Energy Harvester for Low Power Electronics. Proceedings of the 9th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications: Power MEMS 2009, Washington, DC, USA."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/17\/4\/877\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T18:32:46Z","timestamp":1760207566000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/17\/4\/877"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2017,4,16]]},"references-count":24,"journal-issue":{"issue":"4","published-online":{"date-parts":[[2017,4]]}},"alternative-id":["s17040877"],"URL":"https:\/\/doi.org\/10.3390\/s17040877","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2017,4,16]]}}}