{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,2,4]],"date-time":"2026-02-04T18:14:43Z","timestamp":1770228883959,"version":"3.49.0"},"reference-count":35,"publisher":"MDPI AG","issue":"5","license":[{"start":{"date-parts":[[2017,4,30]],"date-time":"2017-04-30T00:00:00Z","timestamp":1493510400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"Jiangsu Provincial Key Technology Research and Development Program","award":["BE2014003-3"],"award-info":[{"award-number":["BE2014003-3"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This paper presents the design and application of a lever coupling mechanism to improve the shock resistance of a dual-mass silicon micro-gyroscope with drive mode coupled along the driving direction without sacrificing the mechanical sensitivity. Firstly, the mechanical sensitivity and the shock response of the micro-gyroscope are theoretically analyzed. In the mechanical design, a novel lever coupling mechanism is proposed to change the modal order and to improve the frequency separation. The micro-gyroscope with the lever coupling mechanism optimizes the drive mode order, increasing the in-phase mode frequency to be much larger than the anti-phase one. Shock analysis results show that the micro-gyroscope structure with the designed lever coupling mechanism can notably reduce the magnitudes of the shock response and cut down the stress produced in the shock process compared with the traditional elastic coupled one. Simulations reveal that the shock resistance along the drive direction is greatly increased. Consequently, the lever coupling mechanism can change the gyroscope\u2019s modal order and improve the frequency separation by structurally offering a higher stiffness difference ratio. The shock resistance along the driving direction is tremendously enhanced without loss of the mechanical sensitivity.<\/jats:p>","DOI":"10.3390\/s17050995","type":"journal-article","created":{"date-parts":[[2017,5,2]],"date-time":"2017-05-02T11:37:20Z","timestamp":1493725040000},"page":"995","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":12,"title":["A Lever Coupling Mechanism in Dual-Mass Micro-Gyroscopes for Improving the Shock Resistance along the Driving Direction"],"prefix":"10.3390","volume":"17","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-1620-9389","authenticated-orcid":false,"given":"Yang","family":"Gao","sequence":"first","affiliation":[{"name":"School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China"},{"name":"Key Laboratory of Micro-Inertial Instruments and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China"}]},{"given":"Hongsheng","family":"Li","sequence":"additional","affiliation":[{"name":"School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China"},{"name":"Key Laboratory of Micro-Inertial Instruments and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China"}]},{"given":"Libin","family":"Huang","sequence":"additional","affiliation":[{"name":"School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China"},{"name":"Key Laboratory of Micro-Inertial Instruments and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China"}]},{"given":"Hui","family":"Sun","sequence":"additional","affiliation":[{"name":"School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China"},{"name":"Key Laboratory of Micro-Inertial Instruments and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China"}]}],"member":"1968","published-online":{"date-parts":[[2017,4,30]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"13024","DOI":"10.3390\/s140713024","article-title":"On Bandwidth Characteristics of Tuning Fork Micro-Gyroscope with Mechanically Coupled Sense Mode","volume":"14","author":"Ni","year":"2014","journal-title":"Sensors"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"280","DOI":"10.4028\/www.scientific.net\/KEM.562-565.280","article-title":"Temperature Model for a Vacuum Packaged MEMS Gyroscope Structure","volume":"562\u2013565","author":"Cao","year":"2013","journal-title":"Key Eng. Mater."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"1657","DOI":"10.1016\/S0026-2714(01)00173-1","article-title":"Mechanical Reliability of MEMS-structures under shock load","volume":"41","author":"Wagner","year":"2001","journal-title":"Microelectron. Reliab."},{"key":"ref_4","unstructured":"Brown, T.G. (2003, January 22\u201324). Harsh military environments and microelectromechanical (MEMS) devices. Proceedings of the IEEE SENSORS 2003, Toronto, ON, Canada."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"137","DOI":"10.1007\/s00542-013-1833-9","article-title":"Design and fabrication of a micromachined gyroscope with high shock resistance","volume":"20","author":"Zhou","year":"2014","journal-title":"Microsyst. Technol."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"1328","DOI":"10.1016\/j.microrel.2014.02.011","article-title":"Flexible stop and double-cascaded stop to improve shock reliability of MEMS accelerometer","volume":"54","author":"Tao","year":"2014","journal-title":"Microelectron. Reliab."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"643","DOI":"10.1016\/j.ijnonlinmec.2007.01.017","article-title":"The response of clamped\u2013clamped microbeams under mechanical shock","volume":"42","author":"Younis","year":"2007","journal-title":"Int. J. Non-Linear Mech."},{"key":"ref_8","unstructured":"Fang, X.W., Huang, Q.A., and Tang, J.Y. (2004, January 18\u201321). Modeling of MEMS reliability in shock environments. Proceedings of the 7th International Conference on Solid-State and Integrated Circuits Technology, Beijing, China."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"280","DOI":"10.1016\/S0924-4247(00)00427-1","article-title":"Drop test and analysis on micro-machined structures","volume":"85","author":"Li","year":"2000","journal-title":"Sens. Actuators A Phys."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"48","DOI":"10.1109\/54.808209","article-title":"Evaluation of MEMS capacitive accelerometers","volume":"16","author":"Spencer","year":"1999","journal-title":"IEEE Des. Test Comput."},{"key":"ref_11","unstructured":"Fan, M.S., and Shaw, H.C. (2001). Dynamic Response Assessment for the MEMS Accelerometer under Severe Shock Loads, NASA Goddard Space Flight Center."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"1817","DOI":"10.3390\/s7081817","article-title":"Multi-scale analysis of MEMS sensors subject to drop impacts","volume":"7","author":"Mariani","year":"2007","journal-title":"Sensors"},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"556","DOI":"10.3390\/s90100556","article-title":"Modeling impact-induced failure of polysilicon MEMS: A multi-scale approach","volume":"9","author":"Mariani","year":"2009","journal-title":"Sensors"},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"4972","DOI":"10.3390\/s110504972","article-title":"Two-scale simulation of drop-induced failure of polysilicon MEMS sensors","volume":"11","author":"Mariani","year":"2011","journal-title":"Sensors"},{"key":"ref_15","first-page":"016","article-title":"Optimization Research on Anti High Shock Ability of Quartz MEMS Gyroscope","volume":"1","author":"Lin","year":"2013","journal-title":"Piezoelectr. Acoustoopt."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"1720","DOI":"10.3390\/s7091720","article-title":"Reliability of a MEMS actuator improved by spring corner designs and reshaped driving waveforms","volume":"7","author":"Hsieh","year":"2007","journal-title":"Sensors"},{"key":"ref_17","unstructured":"Yoon, S.W. (2009). Vibration Isolation and Shock Protection for MEMS. [Ph.D. Thesis, University of Michigan]."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"166","DOI":"10.1016\/j.sna.2005.12.032","article-title":"Micromachined integrated shock protection for MEMS","volume":"130","author":"Yoon","year":"2006","journal-title":"Sens. Actuators A Phys."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"29","DOI":"10.1109\/MAES.2006.284356","article-title":"Current capabilities of MEMS capacitive accelerometers in a harsh environment, aerospace and electronic systems magazine","volume":"21","author":"Stauffer","year":"2006","journal-title":"IEEE Aerosp. Electron. Syst. Mag."},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"137","DOI":"10.1007\/s00542-013-1833-9","article-title":"Design and fabrication of a micromachined gyroscope with high shock resistance","volume":"20","author":"Zhou","year":"2014","journal-title":"Microsyst. Technol."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"247","DOI":"10.1007\/s00542-014-2405-3","article-title":"Design and vibration sensitivity of a MEMS tuning fork gyroscope with anchored coupling mechanism","volume":"22","author":"Guan","year":"2016","journal-title":"Microsyst. Technol."},{"key":"ref_22","doi-asserted-by":"crossref","unstructured":"Guan, Y., Gao, S., Liu, H., Jin, L., and Niu, S. (2016). Design and Vibration Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Diamond Coupling Mechanism. Sensors, 16.","DOI":"10.3390\/s16040468"},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"281","DOI":"10.1007\/s00542-013-1947-0","article-title":"Design and analysis of a z-axis tuning fork gyroscope with guided-mechanical coupling","volume":"20","author":"Trinh","year":"2014","journal-title":"Microsyst. Technol."},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"401","DOI":"10.4028\/www.scientific.net\/AMR.338.401","article-title":"Shock Analysis on Dual-Mass Silicon Micro-Gyroscope","volume":"338","author":"Ni","year":"2011","journal-title":"Adv. Mater. Res."},{"key":"ref_25","first-page":"15","article-title":"Dual-mass silicon micro-gyroscope","volume":"6","author":"Yin","year":"2008","journal-title":"J. Chin. Inert. Technol."},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"20419","DOI":"10.3390\/s141120419","article-title":"Design and application of quadrature compensation patterns in bulk silicon micro-gyroscopes","volume":"14","author":"Ni","year":"2014","journal-title":"Sensors"},{"key":"ref_27","unstructured":"Yin, Y., Wang, S.-R., Wang, C.-C., and Yang, B. (2010, January 20\u201323). Structure-decoupled dual-mass MEMS gyroscope with self-adaptive closed-loop detection. Proceedings of the 2010 IEEE 5th International Conference on Nano\/Micro Engineered and Molecular Systems, Xiamen, China."},{"key":"ref_28","doi-asserted-by":"crossref","unstructured":"Yang, B., Yin, Y., Huang, L., Wang, S.-R., and Li, H.S. (2011, January 16\u201319). Research on a new decoupled dual-mass micro-gyroscope. Proeedings of the 2011 10th International Conference on Electronic Measurement & Instruments (ICEMI), Chengdu, China.","DOI":"10.1109\/ICEMI.2011.6037714"},{"key":"ref_29","unstructured":"Yin, Y. (2011). Research on Design Theory and Methods of Dual-Mass Micromachined Silicon Gyroscope, Southeast University. (In Chinese)."},{"key":"ref_30","unstructured":"(2017, March 23). ANSYS Mechanical APDL Feature Archive. Available online: http:\/\/148.204.81.206\/Ansys\/150\/ANSYS%20Mechanical%20APDL%20Feature%20Archive.pdf."},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"229","DOI":"10.1109\/JMEMS.2009.2039697","article-title":"What is the Young\u2019s Modulus of Silicon?","volume":"19","author":"Hopcroft","year":"2010","journal-title":"J. Microelectromech. Syst."},{"key":"ref_32","doi-asserted-by":"crossref","unstructured":"Gad-el-Hak, M. (2001). The MEMS Handbook, CRC Press.","DOI":"10.1201\/9781420050905"},{"key":"ref_33","unstructured":"Bathe, K.J., and Wilson, E.L. (1976). Numerical Methods in Finite Element Analysis, Prentice-Hall Inc."},{"key":"ref_34","unstructured":"Bathe, K.J., and Wilson, E.L. (2013). Numerical Methods in Finite Element Analysis, Prentice-Hall Inc."},{"key":"ref_35","unstructured":"Rao, S.S. (2011). Mechanical Vibration, Prentice Hall."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/17\/5\/995\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T18:34:18Z","timestamp":1760207658000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/17\/5\/995"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2017,4,30]]},"references-count":35,"journal-issue":{"issue":"5","published-online":{"date-parts":[[2017,5]]}},"alternative-id":["s17050995"],"URL":"https:\/\/doi.org\/10.3390\/s17050995","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2017,4,30]]}}}