{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,10]],"date-time":"2026-05-10T00:54:15Z","timestamp":1778374455086,"version":"3.51.4"},"reference-count":23,"publisher":"MDPI AG","issue":"5","license":[{"start":{"date-parts":[[2017,5,13]],"date-time":"2017-05-13T00:00:00Z","timestamp":1494633600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>We experimentally investigate the primary superharmonic of order two and subharmonic of order one-half resonances of an electrostatic MEMS actuator under direct excitation. We identify the parameters of a one degree of freedom (1-DOF) generalized Duffing oscillator model representing it. The experiments were conducted in soft vacuum to reduce squeeze-film damping, and the actuator response was measured optically using a laser vibrometer. The predictions of the identified model were found to be in close agreement with the experimental results. We also identified the noise spectral density of process (actuation voltage) and measurement noise.<\/jats:p>","DOI":"10.3390\/s17051121","type":"journal-article","created":{"date-parts":[[2017,5,15]],"date-time":"2017-05-15T12:16:12Z","timestamp":1494850572000},"page":"1121","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":16,"title":["Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator"],"prefix":"10.3390","volume":"17","author":[{"given":"Majed","family":"Al-Ghamdi","sequence":"first","affiliation":[{"name":"Department of Systems Design Engineering, University of Waterloo, Waterloo, ON N2L 3G1, Canada"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ayman","family":"Alneamy","sequence":"additional","affiliation":[{"name":"Department of Systems Design Engineering, University of Waterloo, Waterloo, ON N2L 3G1, Canada"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Sangtak","family":"Park","sequence":"additional","affiliation":[{"name":"Department of Systems Design Engineering, University of Waterloo, Waterloo, ON N2L 3G1, Canada"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Beichen","family":"Li","sequence":"additional","affiliation":[{"name":"Department of Mechanical and Mechatronics Engineering, University of Waterloo, Waterloo, ON N2L 3G1, Canada"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Mahmoud","family":"Khater","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, King Fahd University of Petroleum and Minerals, Dhahran 31261, Saudi Arabia"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-3709-7593","authenticated-orcid":false,"given":"Eihab","family":"Abdel-Rahman","sequence":"additional","affiliation":[{"name":"Department of Systems Design Engineering, University of Waterloo, Waterloo, ON N2L 3G1, Canada"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Glenn","family":"Heppler","sequence":"additional","affiliation":[{"name":"Department of Systems Design Engineering, University of Waterloo, Waterloo, ON N2L 3G1, Canada"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Mustafa","family":"Yavuz","sequence":"additional","affiliation":[{"name":"Department of Mechanical and Mechatronics Engineering, University of Waterloo, Waterloo, ON N2L 3G1, Canada"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2017,5,13]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","unstructured":"Rebeiz, G. (2003). RF MEMS: Theory, Design, and Technology, John Wiley & Sons.","DOI":"10.1002\/0471225282"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"187","DOI":"10.1016\/j.sna.2016.05.046","article-title":"Development of Compact 180\u2218 Phase Shifters Based on MEMS Technology","volume":"247","author":"Chakraborty","year":"2016","journal-title":"Sens. Actuators A Phys."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"202","DOI":"10.1016\/j.sna.2015.05.008","article-title":"On the Electrostatic Actuation of Capacitive RF MEMS Switches on GaAs Substrate","volume":"232","author":"Persano","year":"2015","journal-title":"Sens. Actuators A Phys."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"1878","DOI":"10.1109\/TMTT.2003.814317","article-title":"Miniature and Tunable Filters Using MEMS Capacitors","volume":"51","author":"Dussopt","year":"2003","journal-title":"IEEE Trans. Microw. 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Available online: http:\/\/www.polytec.com."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/17\/5\/1121\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T18:35:46Z","timestamp":1760207746000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/17\/5\/1121"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2017,5,13]]},"references-count":23,"journal-issue":{"issue":"5","published-online":{"date-parts":[[2017,5]]}},"alternative-id":["s17051121"],"URL":"https:\/\/doi.org\/10.3390\/s17051121","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2017,5,13]]}}}